探头配置和校准技术对千兆赫应用晶圆电感质量因子测定的影响

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI:10.1109/ICMTS.2002.1193164

R. Havens, L. Tiemeijer, L. Garnbus

{"title":"探头配置和校准技术对千兆赫应用晶圆电感质量因子测定的影响","authors":"R. Havens, L. Tiemeijer, L. Garnbus","doi":"10.1109/ICMTS.2002.1193164","DOIUrl":null,"url":null,"abstract":"We demonstrate that the quality factors measured on on-wafer (spiral) inductor test-structures are largely influenced by the choice between ground-signal and ground-signal-ground probe configuration. In particular when the SOLT network analyzer calibration technique is used in combination with ground-signal probing, the quality factor value can be overestimated significantly.","PeriodicalId":188074,"journal":{"name":"Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.","volume":"127 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-04-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":"{\"title\":\"Impact of probe configuration and calibration techniques on quality factor determination of on-wafer inductors for GHz applications\",\"authors\":\"R. Havens, L. Tiemeijer, L. Garnbus\",\"doi\":\"10.1109/ICMTS.2002.1193164\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We demonstrate that the quality factors measured on on-wafer (spiral) inductor test-structures are largely influenced by the choice between ground-signal and ground-signal-ground probe configuration. In particular when the SOLT network analyzer calibration technique is used in combination with ground-signal probing, the quality factor value can be overestimated significantly.\",\"PeriodicalId\":188074,\"journal\":{\"name\":\"Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.\",\"volume\":\"127 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-04-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"13\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMTS.2002.1193164\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2002.1193164","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 13

摘要

我们证明了在片上(螺旋)电感测试结构上测量的质量因子在很大程度上受到地信号和地信号-地探头配置的选择的影响。特别是当SOLT网络分析仪校准技术与地面信号探测结合使用时，质量因子值会被明显高估。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Impact of probe configuration and calibration techniques on quality factor determination of on-wafer inductors for GHz applications

We demonstrate that the quality factors measured on on-wafer (spiral) inductor test-structures are largely influenced by the choice between ground-signal and ground-signal-ground probe configuration. In particular when the SOLT network analyzer calibration technique is used in combination with ground-signal probing, the quality factor value can be overestimated significantly.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.

自引率

0.00%

发文量