Impact of probe configuration and calibration techniques on quality factor determination of on-wafer inductors for GHz applications

Abstract

We demonstrate that the quality factors measured on on-wafer (spiral) inductor test-structures are largely influenced by the choice between ground-signal and ground-signal-ground probe configuration. In particular when the SOLT network analyzer calibration technique is used in combination with ground-signal probing, the quality factor value can be overestimated significantly.