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Numerically modeled dynamic response of perfect and leaky dielectric droplets in an electric field 完美和漏电液滴在电场中的动态响应的数值模拟
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.92
Graeme Supeene, C. Koch, S. Bhattacharjee
{"title":"Numerically modeled dynamic response of perfect and leaky dielectric droplets in an electric field","authors":"Graeme Supeene, C. Koch, S. Bhattacharjee","doi":"10.1109/ICMENS.2005.92","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.92","url":null,"abstract":"Summary form only given. A dielectric liquid droplet in an immiscible dielectric medium will deform when subjected to an external electric field. This effect is a component of the motion seen in electrically actuated droplets in a lab-on-a-chip setting, and is being studied in order to provide a basis for modeling electrowetting actuation behaviour. It is, however, a widely studied phenomenon in its own right, and can be employed in various emulsion technologies. The present work is a finite element analysis of both the perfect and leaky dielectric models, taking into account the time dependence of the deformation and the nonlinearity encountered when the deformation becomes large. In order to assess the accuracy of the model, comparisons are made with the classical small-deformation analytic results and with recent finite element results. The effects of the fluid properties and the applied field on the transient response and the resulting deformation are observed, and the transient response in particular is analyzed in order to provide a basis for dynamic control of the system. This could lead to a strategy for reliably controlling the behaviour of droplets under electrowetting actuation on a microfluidic chip.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134608556","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
On the effect of cationic surfactants in the rinse to reduce pattern collapse in high aspect ratio patterning of photoresists 阳离子表面活性剂对高纵横比光刻胶制版中减少图案塌陷的影响
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.93
K. Grundke, A. Drechsler, N. Petong, C. Bellmann, M. Stamm, O. Wunnicke, J. Reichelt, Iris Mäge, B. Pinter, T. Pearce, M. Voigt
{"title":"On the effect of cationic surfactants in the rinse to reduce pattern collapse in high aspect ratio patterning of photoresists","authors":"K. Grundke, A. Drechsler, N. Petong, C. Bellmann, M. Stamm, O. Wunnicke, J. Reichelt, Iris Mäge, B. Pinter, T. Pearce, M. Voigt","doi":"10.1109/ICMENS.2005.93","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.93","url":null,"abstract":"This paper presents a novel concept based on the mechanism of cationic surfactant adsorption on the photoresist surface. The minimum capillary forces calculated from the study with model photoresist surfaces and surfactant solutions correlated with a maximum of pattern collapse reduction obtained in the photolithographic process.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"93 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124535148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis of tip effects on the dynamic characteristics of V-shaped atomic force microscope probes 尖端对v形原子力显微镜探针动态特性的影响分析
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.26
Kun-Nan Chen, Jen-Ching Huang
{"title":"Analysis of tip effects on the dynamic characteristics of V-shaped atomic force microscope probes","authors":"Kun-Nan Chen, Jen-Ching Huang","doi":"10.1109/ICMENS.2005.26","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.26","url":null,"abstract":"When an atomic force microscope (AFM) operates in a dynamic mode, the AFM probe is vibrated in a high frequency. Each vibration mode of the cantilevered probe has a different modal sensitivity that is defined as the change in frequency due to a change in the contact stiffness, and the scanned image contrast is significantly dictated by this sensitivity. This paper shows, by the finite element method, the significant effects of various tip lengths on the resonant frequencies and modal sensitivities for a commercial AFM V-shaped probe.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"110 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127996207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
LIGA cavity resonator for K-band applications 用于k波段应用的LIGA腔谐振器
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.65
Zhen Ma, D. Klymyshyn, S. Achenbach
{"title":"LIGA cavity resonator for K-band applications","authors":"Zhen Ma, D. Klymyshyn, S. Achenbach","doi":"10.1109/ICMENS.2005.65","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.65","url":null,"abstract":"A 2-mm deep microwave cavity resonator is proposed for UGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q) factor. Simulation using 3-D finite element method (FEM) shows an unloaded Q (Q/sub u/) very close to the theoretical calculation. Feasibility of obtaining such cavities with hard X-ray lithography (XRL) is demonstrated.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129084258","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Deformation analysis of tunable Fabry-Perot structure caused by thermal residual gradient stresses 热残余梯度应力引起的可调谐Fabry-Perot结构变形分析
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.38
Peng Chang, Shun-Wu Wang, M. Lin
{"title":"Deformation analysis of tunable Fabry-Perot structure caused by thermal residual gradient stresses","authors":"Peng Chang, Shun-Wu Wang, M. Lin","doi":"10.1109/ICMENS.2005.38","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.38","url":null,"abstract":"The deformation of Fabry-Perot caused by thermal residual stresses is investigated. The sizes of structure have effect on deformation, especially the ratio of width to length, W/L. If the W/L ratio is smaller, the deformation is larger. But, the structure could be still considered as flat surface. It only tilts an angle. However, when depositing a material on the structure layer, the structure would no more flat for the mismatch of thermal expansion coefficients inducing larger thermal residual gradient. The results show the structure with larger W/L ratio will be more flat. If the W/L ratio is less than one, the structure is deformed and has less flat part. Even the warpage could happen.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129261105","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A parametric study of thermal effects on the reliability of RF MEMS switches 热对射频MEMS开关可靠性影响的参数化研究
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.17
Jonathan Lueke, N. Quddus, W. Moussa, Aman Chahal
{"title":"A parametric study of thermal effects on the reliability of RF MEMS switches","authors":"Jonathan Lueke, N. Quddus, W. Moussa, Aman Chahal","doi":"10.1109/ICMENS.2005.17","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.17","url":null,"abstract":"The influence of thermal effects on the reliability of RF MEMS switches is investigated in this paper. Low power consumption and capacity to handle high power at very high frequency elevate the scope of RF MEMS in the field of satellite and mobile communication technology immensely. The reliability of these switches are still under consideration as they fail due to thermal stresses developed during operation. A significant temperature rise occurs while transmitting high power at high frequency. In this paper, we introduced design parameters and investigated their influence to improve the switch's resistance to acute thermal stresses. A three dimensional finite element model of RF MEMS switch was simulated. A current density model and a thermal model were coupled to calculate the current density, heat loss and temperature rise within the domain. The maximum frequency and power range that the switch can handle before buckling failure were estimated.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"202 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116170527","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
MEMS relays/switches MEMS继电器/开关
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.7
Tianshen Zhou, Y. Loke
{"title":"MEMS relays/switches","authors":"Tianshen Zhou, Y. Loke","doi":"10.1109/ICMENS.2005.7","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.7","url":null,"abstract":"This paper summarizes the design, microfabrication, simulation and characterization of MEMS relays. The lateral electrostatic driven relay has advantages of simple design and easy microfabrication, low voltage actuation, combination of micro relays to extend their electrical power handling as well as very low coupling loss for RF signal applications.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126145019","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Microscopic theory of liquid interfaces in molecular systems 分子系统中液体界面的微观理论
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.72
A. Kovalenko
{"title":"Microscopic theory of liquid interfaces in molecular systems","authors":"A. Kovalenko","doi":"10.1109/ICMENS.2005.72","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.72","url":null,"abstract":"A statistical-mechanical theory of inhomogeneous polyatomic fluids is proposed. It enables microscopic description of liquid interfaces in molecular systems with both non-polar and polar species. The method introduces a site-site generalization of the Lovett-Mow-Buff-Wertheim integro-differential equation for the one-particle density distributions to polyatomic fluids. It uses the inhomogeneous site-site direct correlation functions of molecular fluid consistently constructed by nonlinear interpolation between the homogeneous ones. The site-site correlations of the coexisting bulk phases are obtained from the reference interaction site model (RISM) integral equation with the closure approximation proposed by Kovalenko and Hirata. The theory is applied to the planar liquid-vapor as well as liquid-liquid interfaces of n-hexane and methanol in ambient conditions.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"245 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121984733","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Aerosol drug delivery to the lung periphery using nanoscale technologies 利用纳米技术将气溶胶药物输送到肺周围
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.23
T. Wilbanks, J. Schuster
{"title":"Aerosol drug delivery to the lung periphery using nanoscale technologies","authors":"T. Wilbanks, J. Schuster","doi":"10.1109/ICMENS.2005.23","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.23","url":null,"abstract":"Two applications of nanotechnoiogy to the AERx/spl reg/ drug delivery system are presented. Improved delivery performance is demonstrated using nanoscale nozzles. This gives higher emitted doses with reduced aerosol particle sizes, leading to deeper penetration of the drug into the lung periphery. Expanded capabilities are demonstrated using n a nanosuspensions. For example, drugs that are otherwise poorly soluble can be delivered to the lung periphery using nanosuspensions.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"193 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121539271","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Interfacial behavior of complex hydrocarbon fluids at elevated pressures and temperatures 复杂烃流体在高温高压下的界面行为
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.64
S. Ayirala, W. Xu, D. Rao
{"title":"Interfacial behavior of complex hydrocarbon fluids at elevated pressures and temperatures","authors":"S. Ayirala, W. Xu, D. Rao","doi":"10.1109/ICMENS.2005.64","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.64","url":null,"abstract":"Unlike all the physical properties of the bulk fluid phases, interfacial tension (IFT) is unique in the sense that it relates to the interface between the two immiscible fluid phases. Hence, interfacial tension between the fluid phases can be used to infer a great deal of information about solubility, miscibility and mass transfer interactions between the two bulk fluid phases in contact.In this paper, we examine the utility of interfacial tension to characterize miscibility and mass transfer mechanisms using complex hydrocarbon fluids at elevated pressures and temperatures.For CO2/n-decane system at 37.8 /spl deg/C the minimum miscibility pressure (MMP) determined using the VIT technique (7.9 MPa) matched well with the reported MMPs by slim-tube (8.2-8.6 MPa) and rising-bubble techniques (8.8 MPa). For CO2M-C1+ n-C4+ n-CW techniques system at 71.1 /spl deg/C the VIT technique resulted in an MMP value of 12.2 MPa, which is in good agreement with the published values of slim-tube and phase diagram measurements (11.7 MPa) and analytical model predictions (11.7 MPa). This paper discusses the multiple roles of interfacial tension with supporting experimental data obtained at elevated pressures and temperatures and emphasizes the need to recognize interfacial tension as a good phase behavior indicator in fluid-fluid phase equilibria for more efficient use of this fundamental property in several other applications.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122098147","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
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