{"title":"尖端对v形原子力显微镜探针动态特性的影响分析","authors":"Kun-Nan Chen, Jen-Ching Huang","doi":"10.1109/ICMENS.2005.26","DOIUrl":null,"url":null,"abstract":"When an atomic force microscope (AFM) operates in a dynamic mode, the AFM probe is vibrated in a high frequency. Each vibration mode of the cantilevered probe has a different modal sensitivity that is defined as the change in frequency due to a change in the contact stiffness, and the scanned image contrast is significantly dictated by this sensitivity. This paper shows, by the finite element method, the significant effects of various tip lengths on the resonant frequencies and modal sensitivities for a commercial AFM V-shaped probe.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"110 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Analysis of tip effects on the dynamic characteristics of V-shaped atomic force microscope probes\",\"authors\":\"Kun-Nan Chen, Jen-Ching Huang\",\"doi\":\"10.1109/ICMENS.2005.26\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"When an atomic force microscope (AFM) operates in a dynamic mode, the AFM probe is vibrated in a high frequency. Each vibration mode of the cantilevered probe has a different modal sensitivity that is defined as the change in frequency due to a change in the contact stiffness, and the scanned image contrast is significantly dictated by this sensitivity. This paper shows, by the finite element method, the significant effects of various tip lengths on the resonant frequencies and modal sensitivities for a commercial AFM V-shaped probe.\",\"PeriodicalId\":185824,\"journal\":{\"name\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"volume\":\"110 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-07-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMENS.2005.26\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 International Conference on MEMS,NANO and Smart Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2005.26","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Analysis of tip effects on the dynamic characteristics of V-shaped atomic force microscope probes
When an atomic force microscope (AFM) operates in a dynamic mode, the AFM probe is vibrated in a high frequency. Each vibration mode of the cantilevered probe has a different modal sensitivity that is defined as the change in frequency due to a change in the contact stiffness, and the scanned image contrast is significantly dictated by this sensitivity. This paper shows, by the finite element method, the significant effects of various tip lengths on the resonant frequencies and modal sensitivities for a commercial AFM V-shaped probe.
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