用于k波段应用的LIGA腔谐振器

2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI:10.1109/ICMENS.2005.65

Zhen Ma, D. Klymyshyn, S. Achenbach

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引用次数: 8

摘要

提出了一种用于UGA微加工的2 mm深微波腔谐振器。LIGA提供高度垂直和光学光滑的侧壁，从而带来潜在的高质量(Q)系数。利用三维有限元法(FEM)进行了仿真，结果表明，卸载后的Q值(Q/sub u/)与理论计算值非常接近。证明了用硬x射线光刻(XRL)获得这种空腔的可行性。

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LIGA cavity resonator for K-band applications

A 2-mm deep microwave cavity resonator is proposed for UGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q) factor. Simulation using 3-D finite element method (FEM) shows an unloaded Q (Q/sub u/) very close to the theoretical calculation. Feasibility of obtaining such cavities with hard X-ray lithography (XRL) is demonstrated.

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来源期刊

2005 International Conference on MEMS,NANO and Smart Systems

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