{"title":"MEMS继电器/开关","authors":"Tianshen Zhou, Y. Loke","doi":"10.1109/ICMENS.2005.7","DOIUrl":null,"url":null,"abstract":"This paper summarizes the design, microfabrication, simulation and characterization of MEMS relays. The lateral electrostatic driven relay has advantages of simple design and easy microfabrication, low voltage actuation, combination of micro relays to extend their electrical power handling as well as very low coupling loss for RF signal applications.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"MEMS relays/switches\",\"authors\":\"Tianshen Zhou, Y. Loke\",\"doi\":\"10.1109/ICMENS.2005.7\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper summarizes the design, microfabrication, simulation and characterization of MEMS relays. The lateral electrostatic driven relay has advantages of simple design and easy microfabrication, low voltage actuation, combination of micro relays to extend their electrical power handling as well as very low coupling loss for RF signal applications.\",\"PeriodicalId\":185824,\"journal\":{\"name\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"volume\":\"34 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-07-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMENS.2005.7\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 International Conference on MEMS,NANO and Smart Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2005.7","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper summarizes the design, microfabrication, simulation and characterization of MEMS relays. The lateral electrostatic driven relay has advantages of simple design and easy microfabrication, low voltage actuation, combination of micro relays to extend their electrical power handling as well as very low coupling loss for RF signal applications.
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