{"title":"Off-Axis Electron Holography as a Tool for the Mapping of Electromagnetic Properties in the Semiconductor Industry","authors":"David Cooper;Victor Boureau;Trevor P. Almeida","doi":"10.1109/TMAT.2024.3482284","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3482284","url":null,"abstract":"In this paper we discuss the state-of-the-art of off-axis electron holography today. We introduce the method and illustrate how it can be used for the measurements of dopants and polarization potentials in a range of different semiconductor materials. We then demonstrate how it can be used to measure the magnetic fields around technologically relevant materials for spintronics. Within this work we also demonstrate the use of off-axis electron holography during in-situ electrical biasing experiments for the study of micro-LED devices and in-situ annealing for the case of MRAM devices. We discuss when holography can and cannot be successfully applied and demonstrate clearly that it is a useful tool that can be used for routine analysis in the semiconductor industry.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"136-150"},"PeriodicalIF":0.0,"publicationDate":"2024-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142679378","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Saif Taqy;Pallab Sarkar;Istiaq Shiam;Subrata Karmakar;Ariful Haque
{"title":"Work Function Measurements of Carbon Structures Using Ultraviolet Photoelectron Spectroscopy","authors":"Saif Taqy;Pallab Sarkar;Istiaq Shiam;Subrata Karmakar;Ariful Haque","doi":"10.1109/TMAT.2024.3475331","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3475331","url":null,"abstract":"The work function of carbon-based materials is crucial in understanding the electronic properties, offering critical insights for optimizing device performance and advancing electronic applications. The work function of diamond-like carbon (DLC), Q-carbon, and diamond is measured using ultraviolet photoelectron spectroscopy (UPS). Three DLC films having different sp\u0000<sup>2</sup>\u0000/sp\u0000<sup>3</sup>\u0000 content (I\u0000<sub>D</sub>\u0000/I\u0000<sub>G</sub>\u0000 ratios 0.43, 0.87, and 1.61) are grown using pulsed laser deposition, and the Q-carbon films are fabricated using subsequent pulsed laser annealing of the DLC films. Moreover, the diamond films are deposited using hot filament chemical vapor deposition (HFCVD). The compositional analysis of the films is performed using Raman spectroscopy, and the formation of Q-carbon is confirmed through Raman spectroscopy and scanning electron microscopic (SEM) analysis. The bandgap measurement using the Tauc plot demonstrates the bandgap of the DLC films to range from 2.56 eV to 3.77 eV, while the bandgap of Q-carbon is measured to be 3.7 eV. The work function measurement reveals the values to range from 3.91 eV to 4.18 eV for the DLC films. Additionally, the work function of Q-carbon is calculated to be 3.82 eV from experimental measurements, while the DFT simulations provide a value of 3.62 eV. Finally, the diamond film's work function is measured at 4.54 eV. Overall, the results reveal insights into the relationship between structural characteristics and work function, providing valuable information for optimizing the performance of these materials in electronic and optoelectronic technologies.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"121-125"},"PeriodicalIF":0.0,"publicationDate":"2024-10-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142555111","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Editorial A Quick History of Modern Electronics and the Role of Materials, Processes and Interfaces","authors":"Paolo A. Gargini","doi":"10.1109/TMAT.2024.3428948","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3428948","url":null,"abstract":"","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"64-67"},"PeriodicalIF":0.0,"publicationDate":"2024-08-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10659743","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142090942","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Karsu Ipek Kilic;Rasit O. Topaloglu;Jeff Bielefeld;Reinhold H. Dauskardt
{"title":"Computational Analysis of the Effects of Nanoscale Confinement on the Structure of Low-k Dielectric Hybrid Organosilicate Materials","authors":"Karsu Ipek Kilic;Rasit O. Topaloglu;Jeff Bielefeld;Reinhold H. Dauskardt","doi":"10.1109/TMAT.2024.3446740","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3446740","url":null,"abstract":"Emerging interconnect technologies with increased performance of microchips necessitate the reliable integration of ultra-low-k dielectrics such as hybrid organosilicate glasses (OSG) as insulating units to prevent crosstalk. However, obtaining nanoscale trench patterns densely filled with low-k dielectrics has been challenging as the feature sizes become smaller. Several studies report on the formation of undesired low-density regions within the low-k dielectric decreasing device reliability and preventing easy scalability. With the help of molecular dynamics simulations, we developed computational modeling strategies where we explore the role of OSG precursor structure and the OSG precursor-trench interaction on the formation of low-density regions and final morphology of the low-k filling under confinement. Our goal is to ultimately provide guidance for the experimental efforts for precursor selection to control the formation of low-density regions to enhance mechanical reliability. Our simulation results show that cyclic and hyperconnected 1,3,5-benzene precursor molecules can pack in a relatively more homogeneous fashion under nanoscale confinement compared to more conventionally connected ethylene bridged Et-OCS molecules. The molecular geometry and crosslinking of hyperconnected 1,3,5-benzene precursors can help reduce the formation of low-density regions and lead to better connectivity of the filling material formed under nanoconfinement; thereby yielding improved elastic and fracture properties.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"82-89"},"PeriodicalIF":0.0,"publicationDate":"2024-08-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142165001","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Baiyu Zhang;Hansel A. Hobbie;Yizhang Wu;Wubin Bai;Aaron D. Franklin
{"title":"MXene-Contacted Carbon Nanotube Thin-Film Transistors Using Aerosol Jet Printing","authors":"Baiyu Zhang;Hansel A. Hobbie;Yizhang Wu;Wubin Bai;Aaron D. Franklin","doi":"10.1109/TMAT.2024.3443753","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3443753","url":null,"abstract":"MXenes have garnered significant attention for electronics applications due to their facile synthesis, tunable properties, and exceptional optical and electrical characteristics. Their stable aqueous suspension without additional surfactants enables compatibility of MXenes with various low-cost, additive manufacturing techniques, including spin coating, spraying, and direct-write printing. In this work, we investigate the aerosol jet printing of water-based Ti\u0000<sub>3</sub>\u0000C\u0000<sub>2</sub>\u0000T\u0000<italic><sub>x</sub></i>\u0000 MXene on surfaces with different wettability, achieving printed thin films with sheet resistance as low as ∼7 Ω/□ within three printing passes on both hydrophilic and hydrophobic substrates. Furthermore, we present MXene-contacted carbon nanotube thin-film transistors (CNT-TFTs) with various device geometries, finding a tradeoff between on- and off-state performance when selecting between bottom and top contacts, respectively. Devices with MXene contacts exhibited performance (on-state current up to 16.9 μA/mm and on/off-current ratio of 10\u0000<sup>6</sup>\u0000) comparable to printed CNT-TFTs contacted by graphene and silver nanowires; meanwhile, the lower unit price of MXene ink makes it a more attractive candidate for low-cost, large-area fabrication.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"90-96"},"PeriodicalIF":0.0,"publicationDate":"2024-08-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142165030","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Manh Dat Nguyen;Zhiwei Yin;Rafael Del Rey;Francesca Iacopi;Yang Yang
{"title":"Additive Manufacturing Materials and Processes for Passive Electronics in Wireless Communication","authors":"Manh Dat Nguyen;Zhiwei Yin;Rafael Del Rey;Francesca Iacopi;Yang Yang","doi":"10.1109/TMAT.2024.3440889","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3440889","url":null,"abstract":"There is growing interest in Additive Manufacturing (AM) as a state-of-the-art fabrication technology for electronics, complementary to silicon -based manufacturing. Notwithstanding current limitations in the choice of available materials and minimum feature sizes, the ability to manufacture complex customized structures, compact and rapid prototyping are the main benefits of 3D printed electronics. This paper summarizes the status of AM electronics material's characteristics and introduces the principles of AME process. In particular, the AME applications in various frequency bands are discussed. Overall, this paper demonstrates the significance of AM in facilitating the advancement of advanced electronic component manufacturing, particularly as to passive circuits, electronic devices, antennas, metasurfaces and electronic packaging.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"97-105"},"PeriodicalIF":0.0,"publicationDate":"2024-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142313050","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"On the Thickness Scaling of Ferroelectric Hafnia","authors":"Suzanne Lancaster;Stefan Slesazeck;Thomas Mikolajick","doi":"10.1109/TMAT.2024.3423665","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3423665","url":null,"abstract":"The discovery of ferroelectricity in hafnia has revolutionized the field and brought industry applications closer than ever. One of the most interesting aspects of hafnia compared to other ferroelectric materials is the possibility of scaling film thicknesses down to the 10 nm regime and even below. However, going significantly below 10 nm poses some challenges in terms of materials engineering. In this perspective paper, the topic of thickness scaling in ferroelectric hafnia will be discussed in terms of physical limits, current achievements and challenges, and potential applications in different device types.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"36-48"},"PeriodicalIF":0.0,"publicationDate":"2024-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141965495","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"50 Years of Reactive Ion Etching in Microelectronics","authors":"Sergey Voronin;Christophe Vallée","doi":"10.1109/TMAT.2024.3420822","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3420822","url":null,"abstract":"In this short review, the evolution of plasma etching technologies used in microelectronics fabrication since the discovery of the reactive ion etching process 50 years ago is explored. These evolutions are first discussed from a process engineering point of view. After giving some examples of present and future challenges, it is described how the precision of the etching can be improved by using innovative solutions such as pulsing plasmas and cyclic processes. These changes are then discussed in a second section from a design point of view for industrial equipment and components. In particular, the tool design evolution is discussed by addressing its generic hardware components, most common plasma sources, power coupling efficiency and matching networks.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"49-63"},"PeriodicalIF":0.0,"publicationDate":"2024-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141965889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"The HRDL Interposer Technology Using Metal/Polymer Hybrid Bonding and Its Characteristics","authors":"Yu-Lun Liu;Chien-Kang Hsiung;Tzu-Han Sun;Chun-Ta Li;Yuan-Chiu Huang;Yu-Tao Yang;Kuan-Neng Chen","doi":"10.1109/TMAT.2024.3417888","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3417888","url":null,"abstract":"This article aims to comprehensively explore silicon, glass, organic, and RDL (Redistribution Layer) interposers, comparing their technological features, advantages, and associated challenges. Additionally, a pioneering technology, termed Hyper RDL interposer (HRDL), which integrates temporary bonding and low-temperature hybrid bonding techniques to create an RDL interposer with low warpage, high layer count, and minimal thermal accumulation effects, is introduced through new research results. The forthcoming discussion will rigorously examine the impact of interposer technologies in the semiconductor industry and advanced technology sectors, facilitating progress in critical areas, including high-performance computing (HPC), artificial intelligence (AI), and high-bandwidth applications.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"15-22"},"PeriodicalIF":0.0,"publicationDate":"2024-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141624089","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Liese B. Hubrechtsen;Philippe M. Vereecken;Louis L. De Taeye
{"title":"Thermogalvanic Harvesting With Thin-Film Li-Ion Materials: Experimental Reflections on Device Concepts","authors":"Liese B. Hubrechtsen;Philippe M. Vereecken;Louis L. De Taeye","doi":"10.1109/TMAT.2024.3416156","DOIUrl":"https://doi.org/10.1109/TMAT.2024.3416156","url":null,"abstract":"The Internet-of-Things (IoT) will require innovative solutions to enable power autonomy in miniaturized nodes. One possible strategy for these applications is to harvest energy using the thermogalvanic effect, which converts heat to electricity via an electrochemical reaction. In this work, three device concepts for thermogalvanic harvesting with thin-film Li-ion materials were considered, and a practical experiment demonstrating the operational limitations was presented for each approach. All demonstrations were executed using thin-film Li\u0000<inline-formula><tex-math>$_{4}$</tex-math></inline-formula>\u0000Ti\u0000<inline-formula><tex-math>$_{5}$</tex-math></inline-formula>\u0000O\u0000<inline-formula><tex-math>$_{12}$</tex-math></inline-formula>\u0000 (LTO) electrodes, which possess attractive thermogalvanic and kinetic properties. The first device concept was a thermogalvanic cell. This component harvests energy via the application and removal of a temperature difference between two identical LTO electrodes. In addition, a hybrid Thermally Regenerative Electrochemical Cycling (TREC) device was studied. Here, a cell with an LTO working electrode of variable temperature and a Li metal counter-electrode at constant temperature is charged at one LTO temperature and discharged at another temperature. The last concept was a thin-film TREC cell, which contains an LTO working electrode, a LiPON solid electrolyte, and a Li metal counter-electrode. Harvesting is accomplished by changing the temperature of the entire cell between the charge and discharge steps. By presenting an overview of the advantages and pitfalls of different device concepts, this work is a first step in the development of novel thermogalvanic harvesting components based on thin-film Li-ion materials.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"1 ","pages":"68-81"},"PeriodicalIF":0.0,"publicationDate":"2024-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142091008","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}