2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献_第7页

High-performance, 3D-microtransformers on multilayered magnetic cores 多层磁芯上的高性能3d微变压器

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474234

A. Moazenzadeh, N. Spengler, U. Wallrabe

引用次数: 15

Piezoelectric parametric amplifiers with integrated actuation and sensing capabilities 具有集成驱动和传感能力的压电参数放大器

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474310

O. Thomas, F. Mathieu, W. Mansfield, C. Huang, S. Trolier-McKinstry, L. Nicu

引用次数: 1

Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles 柔性，零功率，压电MEMS压力传感器阵列，用于海洋车辆的鱼状被动水下传感

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474193

M. Asadnia, A. Kottapalli, Z. Shen, J. Miao, G. Barbastathis, M. Triantafyllou

引用次数: 16

Sealless 3-D microfluidic channel fabrication by sacrificial caramel template direct-patterning

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474240

Y. Koyata, M. Ikeuchi, K. Ikuta

引用次数: 6

Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture 基于溶胶-凝胶高纵横比PZT结构的横向驱动压电双晶片MEMS驱动器

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474211

N. Wang, S. Yoshida, M. Kumano, Y. Kawai, S. Tanaka, M. Esashi

引用次数: 1

Superparamagnetic swimming microrobots with adjusted magnetic anisotropy 调节磁各向异性的超顺磁游泳微型机器人

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474304

C. Peters, O. Ergeneman, B. Nelson, C. Hierold

引用次数: 24

High sensitive 3D tactile sensor with the structure of elastic pyramids on piezoresistive cantilevers 采用压阻悬臂梁弹性金字塔结构的高灵敏度三维触觉传感器

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474171

N. Thanh-Vinh, N. Binh-Khiem, K. Matsumoto, I. Shimoyama

{"title":"High sensitive 3D tactile sensor with the structure of elastic pyramids on piezoresistive cantilevers","authors":"N. Thanh-Vinh, N. Binh-Khiem, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2013.6474171","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474171","url":null,"abstract":"We propose a highly sensitive three-dimensional tactile sensor using the structure of elastic micro pyramids pressing on piezoresistive cantilevers. In the structure of the sensor we proposed, the forces acting on the surface of the elastomer were transmitted to the cantilevers through the pyramids. The key point of our sensor was that the cantilevers were not completely embedded inside the elastomer: a cavity under each cantilever enabled the larger deformation and thus the larger resistance change of the cantilever. Therefore the high sensitivity of the sensor could be obtained. Moreover, by using four cantilevers aligned with four pyramids, the three-dimensional force sensor was realized. The sensitivities of our sensor to forces in normal and lateral directions were about 50 times and 2.4 times higher, respectively, compared to those of a tactile sensor with the ultrathin cantilevers embedded inside an elastomer [1].","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78936821","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 7

Analysis of linearity degradation in multi-stage RF MEMS circuits 多级RF MEMS电路的线性退化分析

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474351

U. Shah, M. Sterner, J. Oberhammer

引用次数: 1

Magnetic valves with programmable timing capability for fluid control in paper-based microfluidics 具有可编程定时能力的磁阀，用于纸基微流体的流体控制

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474225

Philip Zwanenburg, Xiao Li, Xinyu Liu

{"title":"Magnetic valves with programmable timing capability for fluid control in paper-based microfluidics","authors":"Philip Zwanenburg, Xiao Li, Xinyu Liu","doi":"10.1109/MEMSYS.2013.6474225","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474225","url":null,"abstract":"Multi-step analytical tests such as enzyme-linked immunosorbent assay (ELISA) require delivery of multiple fluids into a reaction zone and counting of incubation time at different steps. This paper presents a new type of paper-based magnetic valves that can count the time and turn on or off a fluidic flow accordingly, enabling timed fluid control in paper-based microfluidics. The timing function of these valves is realized using a paper timing channel with an ionic resistor, which can detect the event of a solution flowing through the resistor and trigger an electromagnet (through a simple circuit) to open or close a paper cantilever valve. Based on this principle, we developed normally-open and normally-closed valves with a timing period up to 30.3±2.1 minutes (sufficient for ELISA on paper-based platforms). Using the normally-open valve, we performed an enzyme-based colorimetric reaction commonly used for signal amplification of ELISAs, which requires a timed delivery of enzyme substrate to a reaction zone. This design adds a new fluid-control component to the tool set for developing paper-based microfluidic devices, and has the potential to improve the user-friendliness of these devices.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77898402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Robust silicon carbide (SiC) nanoelectromechanical switches with long cycles in ambient and high temperature conditions 在环境和高温条件下具有长周期的坚固碳化硅(SiC)纳米机电开关

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474292

Tina He, Rui Yang, S. Rajgopal, M. A. Tupta, S. Bhunia, M. Mehregany, P. Feng

{"title":"Robust silicon carbide (SiC) nanoelectromechanical switches with long cycles in ambient and high temperature conditions","authors":"Tina He, Rui Yang, S. Rajgopal, M. A. Tupta, S. Bhunia, M. Mehregany, P. Feng","doi":"10.1109/MEMSYS.2013.6474292","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474292","url":null,"abstract":"We report experimental demonstration of nanoscale electromechanical contact-mode switches with clearly high comparative performance, enabled by polycrystalline silicon carbide (poly-SiC) nanomechanical cantilevers, in a three-terminal, gate-controlled, lateral configuration. We have recorded the complete time evolution of the measured switching events in ambient air, by switching devices on and off for ≥105-106 cycles without failure (i.e., devices still alive; special accelerated tests are needed to properly `exhaust' the device and approach its intrinsic lifetime). These SiC nanoelectromechanical systems (NEMS) based switches have all dimensions but length in nanometer scale, and demonstrate on/off ratios of ~104 or higher, with repeatable performance over days in air. We have also demonstrated SiC NEMS switches operating at high temperature (T≈500°C) in air. With a typical motional volume of only ~1μm3 and long `hot' switching cycles in air, these SiC devices exhibit strong potential toward realizing robust NEMS switches and logic circuits.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73974130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 21