Piezoelectric parametric amplifiers with integrated actuation and sensing capabilities

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474310

O. Thomas, F. Mathieu, W. Mansfield, C. Huang, S. Trolier-McKinstry, L. Nicu

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引用次数: 1

Abstract

We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.

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具有集成驱动和传感能力的压电参数放大器

在这项工作中，我们报告了具有集成压电驱动和传感能力的微机电系统(MEMS)谐振器中前所未有的参数放大水平。这里提出的方法依赖于精确的分析建模，考虑到所使用的谐振器的桥状结构固有的几何非线性。该模型首次提供了质量因子(Q)增强随所检测的谐振模式的精确解析公式。实验验证了在非线性驱动下，谐振模式分别表现出硬弹簧效应和软弹簧效应;在空气中，Q的放大倍数可达14倍。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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