2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) - 最新文献

Pub Date : 2013-10-20 DOI: 10.1109/MEMSYS.2013.6474277 David Castro, P. Ingram, R. Kodzius, D. Conchouso, E. Yoon, I. Foulds

Pub Date : 2013-04-02 DOI: 10.1109/MEMSYS.2013.6474214 H. Kuriki, Y. Yamanishi, S. Sakuma, S. Akagi, F. Arai

Pub Date : 2013-04-02 DOI: 10.1109/MEMSYS.2013.6474217 K. Okita, M. Kato‐Negishi, H. Onoe, S. Takeuchi

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