M. Asadnia, A. Kottapalli, Z. Shen, J. Miao, G. Barbastathis, M. Triantafyllou
{"title":"柔性，零功率，压电MEMS压力传感器阵列，用于海洋车辆的鱼状被动水下传感","authors":"M. Asadnia, A. Kottapalli, Z. Shen, J. Miao, G. Barbastathis, M. Triantafyllou","doi":"10.1109/MEMSYS.2013.6474193","DOIUrl":null,"url":null,"abstract":"In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":"{\"title\":\"Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles\",\"authors\":\"M. Asadnia, A. Kottapalli, Z. Shen, J. Miao, G. Barbastathis, M. Triantafyllou\",\"doi\":\"10.1109/MEMSYS.2013.6474193\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.\",\"PeriodicalId\":92162,\"journal\":{\"name\":\"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-03-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"16\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2013.6474193\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2013.6474193","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles
In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
