Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474193

M. Asadnia, A. Kottapalli, Z. Shen, J. Miao, G. Barbastathis, M. Triantafyllou

引用次数: 16

Abstract

In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.

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柔性，零功率，压电MEMS压力传感器阵列，用于海洋车辆的鱼状被动水下传感

为了提高海上车辆的态势感知能力，开发了柔性MEMS压力传感器阵列，用于水下传感应用。本文概述了压电微膜片压力传感器阵列的发展，该阵列可以进行被动的鱼状水下传感。单个传感器具有1.8 × 1.8 mm2的低占地面积，并且不需要任何电源即可运行。一组2 × 5的传感器被制造、封装并测试用于船舶。所提出的阵列能够通过转换由刺激产生的压力变化来定位水下物体。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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