2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献_第8页

Active CMOS-MEMS dual probe array for STM based parallel imaging and nanopatterning 有源CMOS-MEMS双探头阵列用于STM并行成像和纳米图形

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474294

Y. Zhang, Y. Tang, L. Carley, G. Fedder

引用次数: 1

3D general photocurabel model of resin with various kinds of microparticles 具有各种微粒的树脂的三维一般光固化模型

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474276

M. Yasui, K. Ikuta

引用次数: 4

High kt2×Q, multi-frequency lithium niobate resonators 高kt2×Q，多频率铌酸锂谐振器

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474203

Renyuan Wang, S. Bhave, K. Bhattacharjee

引用次数: 41

A novel drug delivery method by using a microrobot incorporated with an acoustically oscillating bubble 一种新型的药物递送方法，利用一个微型机器人结合一个声振荡泡

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474456

J. Kwon, Ji Sun Yang, Jeong Byung Chae, Sang Kug Chung

{"title":"A novel drug delivery method by using a microrobot incorporated with an acoustically oscillating bubble","authors":"J. Kwon, Ji Sun Yang, Jeong Byung Chae, Sang Kug Chung","doi":"10.1109/MEMSYS.2013.6474456","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474456","url":null,"abstract":"This paper presents an untethered microrobot swimming in human blood vessels through electromagnetic actuation to manipulate bio/micro-objects using an acoustically oscillating bubble attached on the microrobot as a grasping tool. First, for the three-dimensional (3D) propulsion of the microrobot in arbitrary shaped blood vessels, an electromagnetic system consisting of the horizontal and vertical pairs of Helmholtz and Maxwell electric coils is designed and manufactured along with the verification of the magnetic flux density generated from the designed system with theory. Using the developed electromagnetic system, the propulsion of a spherical microrobot (800 μm dia.) made of a cylindrical magnet covered with clay is successfully demonstrated in x-y and x-z plains along with a T-shaped glass channel. Second, an acoustically oscillating bubble induced microstreaming is separately investigated by using a high speed camera integrated with a zoom lens and laser as a light source. When a bubble is acoustically excited by a piezoactuator around its natural frequency, it oscillates and simultaneously generates microstreaming and radiation forces, which can be used to manipulate (pull and push) neighboring objects. Finally, as the concept proof, the manipulation of a fish egg (800 μm dia.) in a microfabricated channel with tandem rectangular hills is experimentally achieved by the microrobot incorporated with an acoustically oscillating bubble.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76296653","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

Piezoresistive membrane-type surface stress sensor arranged in arrays for cancer diagnosis through breath analysis 压阻膜式表面应力传感器阵列布置，通过呼吸分析诊断癌症

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474318

F. Loizeau, Hans Peter Lang, Terunobu Akiyama, S. Gautsch, P. Vettiger, A. Tonin, Genki Yoshikawa, C. Gerber, N. D. Rooij

{"title":"Piezoresistive membrane-type surface stress sensor arranged in arrays for cancer diagnosis through breath analysis","authors":"F. Loizeau, Hans Peter Lang, Terunobu Akiyama, S. Gautsch, P. Vettiger, A. Tonin, Genki Yoshikawa, C. Gerber, N. D. Rooij","doi":"10.1109/MEMSYS.2013.6474318","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474318","url":null,"abstract":"We present the fabrication, characterization and successful medical application of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 500 μm and a thickness of 2.5 μm is suspended by four sensing beams with integrated p-type piezoresistors, composing a full Wheatstone bridge. The membrane is coated with a thin polymer layer, which reacts with volatile molecules and produces a deflection of the membrane. The membranes were functionalized with various polymers and characterized as humidity sensors with a sensitivity of 87 mV/%RH and a time constant (Tau63%) of 1.3 s. Finally, through breath analysis and the use of principal component analysis (PCA), we were able, in a double blind trial, to distinguish cancer patients and healthy persons.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84571513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 13

Patternable atmospheric-pressure plasma jets with gas discharge in microfluidic channel array 微流控通道阵列中气体放电的常压等离子体喷射器

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474213

H. Yamasaki, K. Terao, T. Suzuki, F. Simokawa, H. Takao

引用次数: 4

A microfabricated paper-based microbial fuel cell 一种微型纸基微生物燃料电池

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474366

A. Fraiwan, S. Mukherjee, S. Sundermier, S. Choi

引用次数: 7

Batch-fabricated MEMS retarding potential analyzer for high-accuracy ion energy measurements 用于高精度离子能量测量的批量制造MEMS延迟电位分析仪

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474328

E. Heubel, L. Velásquez-García

引用次数: 3

Attoliter order droplet formation using nanochannels and enzyme reaction inside a droplet 利用纳米通道和液滴内的酶反应形成四升级液滴

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474457

H. Wakioka, S. Yamamoto, K. Tabata, M. Sugiyama

引用次数: 1

Single-layer “domino” diodes via optofluidic lithography for ultra-low Reynolds number applications 单层“多米诺骨牌”二极管通过光流光刻超低雷诺数的应用

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474200

R. Sochol, C. Glick, K. Lee, T. Brubaker, A. Lu, M. Wah, S. Gao, E. Hicks, K. T. Wolf, K. Iwai, L. P. Lee, L. Lin

{"title":"Single-layer “domino” diodes via optofluidic lithography for ultra-low Reynolds number applications","authors":"R. Sochol, C. Glick, K. Lee, T. Brubaker, A. Lu, M. Wah, S. Gao, E. Hicks, K. T. Wolf, K. Iwai, L. P. Lee, L. Lin","doi":"10.1109/MEMSYS.2013.6474200","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474200","url":null,"abstract":"Autonomous fluidic components are critical to the advancement of integrated micro/nanofluidic circuitry for lab-on-a-chip applications, such as point-of-care (POC) molecular diagnostics and on-site chemical detection. Previously, a wide range of self-regulating microfluidic components, such as fluidic diodes, have been developed; however, achieving effective functionality at ultra-low Reynolds number (e.g., Re <; 0.05) has remained a significant challenge. To overcome this issue, here we introduce single-layer microfluidic “domino” diodes, which utilize free-standing rotational microstructures - constructed in situ via optofluidic lithography - in order to passively regulate the fluidic resistance based on the flow polarity, thereby enabling flow rectification under ultra-low Re conditions. COMSOL simulation results revealed a theoretical Diodicity (Di) of 31 for a singular domino diode component. Experimental results (for systems with four microstructures) revealed Di's ranging from 13.0±1.9 to 25.4±1.9 corresponding to 0.025 <; Re <; 0.030 and 0.010 <; Re <; 0.015 flow, respectively, which represent the largest Di's reported for Re <; 0.05 fluid flow.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87528240","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 7