High kt2×Q, multi-frequency lithium niobate resonators

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474203

Renyuan Wang, S. Bhave, K. Bhattacharjee

引用次数: 41

Abstract

This paper presents design and vacuum measurements of lithium niobate (LN) contour-mode resonators (CMR). By carefully positioning the interdigital transducer (IDT), we achieved CMRs with k_t²×Q of 7%*2150=148 (IDT @ node) or resonators with very high k_t² of 12.3% and spur-attenuated response (IDT @ anti-node). In addition, we demonstrated resonators with frequencies ranging from 400MHz to 800MHz on a single chip.

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高kt2×Q，多频率铌酸锂谐振器

本文介绍了铌酸锂(LN)轮廓模谐振器(CMR)的设计和真空测量。通过仔细定位数字间换能器(IDT)，我们实现了kt2×Q为7%*2150=148 (IDT @节点)的cmr或具有12.3%的极高kt2和脉冲衰减响应(IDT @反节点)的谐振器。此外，我们还在单个芯片上演示了频率范围从400MHz到800MHz的谐振器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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