{"title":"Active CMOS-MEMS dual probe array for STM based parallel imaging and nanopatterning","authors":"Y. Zhang, Y. Tang, L. Carley, G. Fedder","doi":"10.1109/MEMSYS.2013.6474294","DOIUrl":null,"url":null,"abstract":"This paper reports on development of a dual-probe scanning tunneling microscopy (STM) system suitable for scaling to 1D array parallel imaging and batch nanofabrication. The 1-D probe array is fabricated using thin-film post CMOS micromachining. Each probe is individually addressable, with its own respective microactuator and on-chip tunneling current sensing electronics. A corresponding external servo-loop array is built for separate control of probe scanning. A macro-goniometer is introduced for probe chip-sample alignment. Using the dual-probe array system, two STM images on a gold calibration sample are obtained simultaneously, and TiO2 nanowires are written on a Ti surface.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2013.6474294","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper reports on development of a dual-probe scanning tunneling microscopy (STM) system suitable for scaling to 1D array parallel imaging and batch nanofabrication. The 1-D probe array is fabricated using thin-film post CMOS micromachining. Each probe is individually addressable, with its own respective microactuator and on-chip tunneling current sensing electronics. A corresponding external servo-loop array is built for separate control of probe scanning. A macro-goniometer is introduced for probe chip-sample alignment. Using the dual-probe array system, two STM images on a gold calibration sample are obtained simultaneously, and TiO2 nanowires are written on a Ti surface.