Piezoresistive membrane-type surface stress sensor arranged in arrays for cancer diagnosis through breath analysis

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474318

F. Loizeau, Hans Peter Lang, Terunobu Akiyama, S. Gautsch, P. Vettiger, A. Tonin, Genki Yoshikawa, C. Gerber, N. D. Rooij

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引用次数: 13

Abstract

We present the fabrication, characterization and successful medical application of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 500 μm and a thickness of 2.5 μm is suspended by four sensing beams with integrated p-type piezoresistors, composing a full Wheatstone bridge. The membrane is coated with a thin polymer layer, which reacts with volatile molecules and produces a deflection of the membrane. The membranes were functionalized with various polymers and characterized as humidity sensors with a sensitivity of 87 mV/%RH and a time constant (Tau63%) of 1.3 s. Finally, through breath analysis and the use of principal component analysis (PCA), we were able, in a double blind trial, to distinguish cancer patients and healthy persons.

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压阻膜式表面应力传感器阵列布置，通过呼吸分析诊断癌症

我们介绍了一种膜型表面应力传感器(MSS)的制造，表征和成功的医学应用，该传感器排列在阵列中用于气相分子检测。由SOI衬底制成直径为500 μm，厚度为2.5 μm的圆形薄膜，由四个集成p型压敏电阻的传感梁悬挂，构成一个完整的惠斯通电桥。膜上涂有一层薄薄的聚合物层，该聚合物层与挥发性分子反应并产生膜的偏转。该膜被各种聚合物功能化，具有87 mV/%RH的灵敏度和1.3 s的时间常数(Tau63%)的湿度传感器特性。最后，通过呼吸分析和主成分分析(PCA)的使用，我们能够在双盲试验中区分癌症患者和健康人。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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