Micro and Nano Systems Letters最新文献

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Extracting liquid thermophysical properties inside stainless-steel microtubes using the 3ω method 利用3ω法提取不锈钢微管内液体的热物理性质
IF 4
Micro and Nano Systems Letters Pub Date : 2025-12-22 DOI: 10.1186/s40486-025-00250-4
Jungchul Lee
{"title":"Extracting liquid thermophysical properties inside stainless-steel microtubes using the 3ω method","authors":"Jungchul Lee","doi":"10.1186/s40486-025-00250-4","DOIUrl":"10.1186/s40486-025-00250-4","url":null,"abstract":"<div><p>This paper examines the feasibility of using an AC Joule-heated stainless-steel (SS304) suspended microtube as a combined heater/thermometer to identify the thermal conductivity <span>(:{k}_{l})</span> and volumetric heat capacity <span>(:{left(rho:{c}_{p}right)}_{l})</span> of nanoliter-scale liquids, including electrically conducting liquid metals. The analysis builds on the 3<i>ω</i> technique, wherein a sinusoidal drive at frequency <i>f</i> produces temperature oscillations at 2<i>ω</i> and a third-harmonic voltage <i>V</i><sub>3ω</sub> carrying the sample’s thermal signature. A first-order axial heat-flow model is formulated for a circular microtube and extended to treat two electrical boundary conditions inside the tube: (A) a conformal inner insulator (no electrical shunting through the liquid) and (B) direct electrical contact to a conductive liquid, which creates a parallel electrical path and modifies both Joule power and effective temperature coefficient of resistance. This study outlines an identification workflow for {<span>(:{k}_{l})</span>, <span>(:{left(rho:{c}_{p}right)}_{l})</span>} from the complex <i>V</i><sub>3ω</sub>(<i>f</i>), discuss implementation constraints, and present representative spectra computed for real liquids and for a high-<i>k</i> liquid metal (NaK). The results indicate that, after calibration, the insulated case can recover {<span>(:{k}_{l})</span>, <span>(:{left(rho:{c}_{p}right)}_{l})</span>} from frequency response alone, and that even when the liquid is electrically conducting, the degradation in signal can be modeled and corrected if the parallel conduction is characterized.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-12-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00250-4.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145831150","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhanced operation of female reproductive microphysiological system (MPS) for rapid mechanistic study 增强女性生殖微生理系统(MPS)的运行,快速研究其机理
IF 4
Micro and Nano Systems Letters Pub Date : 2025-12-19 DOI: 10.1186/s40486-025-00246-0
Po Yi Lam, Sungjin Kim, Haemin Jung, Rahul Cherukuri, Ramkumar Menon, Arum Han
{"title":"Enhanced operation of female reproductive microphysiological system (MPS) for rapid mechanistic study","authors":"Po Yi Lam,&nbsp;Sungjin Kim,&nbsp;Haemin Jung,&nbsp;Rahul Cherukuri,&nbsp;Ramkumar Menon,&nbsp;Arum Han","doi":"10.1186/s40486-025-00246-0","DOIUrl":"10.1186/s40486-025-00246-0","url":null,"abstract":"<div><p>Microphysiological systems (MPS) have shown their capabilities in mimicking in vivo-like structural and functional complexity and are seeing significant increase in their utilization in the field of drug discovery and toxicology. However, the major time-consuming steps in the fabrication, utilization, and analyses of MPS devices limit the throughput for broader adoption. Here, we advanced the previously developed two-chamber MPS model of the female reproductive tracts from a single unit chip to an array type chip that is compatible with multi-channel pipettor or automated liquid handling robot for rapid and more efficient operation. To enable this array model, a new microfabrication method was developed, incorporating a microplate holder, bonding guide plate, and soft lithography cassette to minimize device-to-device variation. To validate its compatibility with multi-channel pipettors in chemical toxicity testing, cadmium, a chemical previously shown to elicit cytotoxicity in the two-chamber feto-maternal interface MPS model, was utilized to demonstrate highly uniform cell loading (variance &lt; 100 cells/mm<sup>2</sup>) and consistent dose-dependent cytotoxic response. Additionally, a liquid handling robotic system was also utilized, with no operational errors such as air bubble introduction (zero bubbles out of 100 devices) during cell/chemical loading process, and no unintended cytotoxic effects (&gt; 97% viability). These results highlight that this automation-compatible array type MPS device can provide highly consistent cell culture performance and significantly reduced chip-to-chip and operation-to-operation variations, overcoming the limitations of typical MPS devices.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00246-0.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145779234","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Scallop smoothing process for uniform gold coating on DRIE-etched surfaces in ion-trap chips 离子阱芯片中均匀镀金表面的扇贝平滑工艺
IF 4
Micro and Nano Systems Letters Pub Date : 2025-12-19 DOI: 10.1186/s40486-025-00248-y
Kwangyeul Choi, Seungwoo Yu, Chiyoon Kim, Suhan Kim, Uihwan Jeong, Daun Chung, Hosung Shon, Yonghwan Cha, Minjae Kim, Taehyun Kim
{"title":"Scallop smoothing process for uniform gold coating on DRIE-etched surfaces in ion-trap chips","authors":"Kwangyeul Choi,&nbsp;Seungwoo Yu,&nbsp;Chiyoon Kim,&nbsp;Suhan Kim,&nbsp;Uihwan Jeong,&nbsp;Daun Chung,&nbsp;Hosung Shon,&nbsp;Yonghwan Cha,&nbsp;Minjae Kim,&nbsp;Taehyun Kim","doi":"10.1186/s40486-025-00248-y","DOIUrl":"10.1186/s40486-025-00248-y","url":null,"abstract":"<div><p>Semiconductor-based ion-trap chips are a leading platform for scalable quantum computing, but their performance is often limited by photogenerated charge carriers accumulating on exposed silicon surfaces. In this work, we present a comprehensive fabrication process for silicon-on-insulator (SOI) wafer–based ion-trap chips that addresses this challenge through optimized scallop smoothing and angled gold evaporation. We compare two scallop smoothing methods–frontside reactive ion etching (RIE) and backside RIE–and develop optimized process recipes for each using iterative test structures. Backside RIE smoothing achieves near-complete scallop removal with minimal undercut, while frontside RIE smoothing, although requiring tighter control to minimize undercut, remains viable when preservation of the buried oxide (BOX) layer is necessary. The use of SOI substrates ensures consistent device-layer thickness by leveraging the BOX as an etch-stop layer during backside deep RIE, further enhancing the reproducibility of smoothing. Finally, angled gold evaporation following the scallop smoothing process yields uniform gold coverage on vertical sidewalls without causing electrical shorts between electrode structures. Scanning electron microscopy confirms clean sidewalls and defect-free gold films. These process improvements suppress semiconductor charging, stabilize ion confinement, and enable reliable, high-fidelity quantum operations in quantum charge-coupled device architectures.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00248-y.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145779232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Micro- and nanoscale biomimetic scaffold systems for stem cell–mediated bone regeneration: an integrative review 用于干细胞介导骨再生的微纳米级仿生支架系统:综合综述
IF 4
Micro and Nano Systems Letters Pub Date : 2025-12-11 DOI: 10.1186/s40486-025-00245-1
Kamrun Nahar Fatema, Dong-Weon Lee
{"title":"Micro- and nanoscale biomimetic scaffold systems for stem cell–mediated bone regeneration: an integrative review","authors":"Kamrun Nahar Fatema,&nbsp;Dong-Weon Lee","doi":"10.1186/s40486-025-00245-1","DOIUrl":"10.1186/s40486-025-00245-1","url":null,"abstract":"<div><p>Bone regeneration remains a critical challenge, especially in complex defects where conventional pharmacological and surgical treatments are inadequate. This review critically evaluates recent progress in micro- and nanoscale biomimetic scaffold systems and stem cell technologies, highlighting how structural design at the micro/nano level directly influences stem cell fate and osteogenesis. We analyze advances in fabrication techniques including 3D bioprinting, electrospinning, and micro/nanofabrication that enable hierarchical porosity, controlled surface nano-topographies, and dynamic biochemical environments. Particular attention is given to structure–function relationships, where scaffold mechanics, biochemical cues, and spatial patterning govern mesenchymal stem cell (MSC) adhesion, proliferation, and differentiation. Unlike conventional descriptive accounts, this review emphasizes both the therapeutic potential and the unresolved limitations of current approaches, such as reproducibility, host integration, and immunomodulation. Finally, we outline future perspectives in AI-driven scaffold design, and smart biomaterials, providing a roadmap for the translation of biomimetic scaffold–stem cell systems into clinically effective bone regeneration strategies.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00245-1.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145729774","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Material, structural design, and post-processing strategies for strain-insensitive stretchable temperature sensors 应变不敏感可拉伸温度传感器的材料、结构设计和后处理策略
IF 4
Micro and Nano Systems Letters Pub Date : 2025-12-11 DOI: 10.1186/s40486-025-00244-2
Minyoung Kim, Jungwook Choi
{"title":"Material, structural design, and post-processing strategies for strain-insensitive stretchable temperature sensors","authors":"Minyoung Kim,&nbsp;Jungwook Choi","doi":"10.1186/s40486-025-00244-2","DOIUrl":"10.1186/s40486-025-00244-2","url":null,"abstract":"<div><p>This review provides a comprehensive survey of contemporary strategies for minimizing signal crosstalk in resistive temperature sensors, with particular focus on engineering approaches that achieve strain insensitivity. The discussion is structured to parallel the central themes of material selection, geometric structural design, and post-fabrication processing. First, the review categorizes conductive materials, including carbon-based nanomaterials, metallic nanostructures, and conductive polymers, highlighting how their intrinsic properties and structural forms determine sensor performance in terms of conductivity, flexibility, and mechanical robustness. The role of geometry-inspired designs, such as serpentine, multipolygonal, and Kirigami architectures, in enhancing mechanical compliance and contributing to the decoupling of thermal and mechanical signals is examined. Additionally, recent advances in post-fabrication processes, including welding, soldering, and surface treatments, are evaluated for their roles in maintaining long-term electrical stability and device reliability. By systematically integrating these multidisciplinary engineering strategies, this review delineates practical design principles for the advancement of next-generation resistive temperature sensors and provides a foundation for the robust integration of flexible electronics into a broad spectrum of emerging application domains. These insights are expected to accelerate innovation in wearable technology and other emerging fields, paving the way for the development of reliable, high-performance, flexible sensing systems.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00244-2.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145729915","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The evolution of vibrating U-tube resonators: toward MEMS microchannels and the return to glass and metallic tubes 振动u管谐振器的演变:向MEMS微通道和向玻璃和金属管的回归
IF 4
Micro and Nano Systems Letters Pub Date : 2025-11-26 DOI: 10.1186/s40486-025-00243-3
Jungchul Lee
{"title":"The evolution of vibrating U-tube resonators: toward MEMS microchannels and the return to glass and metallic tubes","authors":"Jungchul Lee","doi":"10.1186/s40486-025-00243-3","DOIUrl":"10.1186/s40486-025-00243-3","url":null,"abstract":"<div>\u0000 \u0000 <p>For more than five decades, vibrating tube resonators have evolved from fragile laboratory devices into versatile platforms used in industrial metrology, biomedical research, and education. This technology originated with glass U-tube densitometers, which established the foundation for resonance-based density measurements. Later, metallic tubes extended operation to harsh conditions, including high pressure, elevated temperature, and cryogenic environments, enabling applications ranging from supercritical fluid studies to aerospace propulsion. The vibrating tube principle also inspired Coriolis flowmeters, which can monitor both density and mass flow. Miniaturization through microelectromechanical systems (MEMS) has led to microchannel resonators that can weigh biomolecules, nanoparticles, and cells with high sensitivity. Subsequent innovations improved readout using piezoresistive and piezoelectric schemes, increased throughput with array architectures, and integrated heaters for thermal property measurements. More recent advances include integrating capacitive electrodes, enabling access to electrical and dielectric properties of liquids. Meanwhile, renewed interest in glass and metallic tube resonators has highlighted their robustness, scalability, and utility for handling larger biological entities and for educational purposes. Macro- and micro-scale approaches complement each other, ensuring continuity across scales and pointing toward future integration with optical, magnetic, and quantum modalities.</p>\u0000 </div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-11-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00243-3.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145612338","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Review of natural and synthetic nanofiller-enhanced natural fibre reinforced polymer composite (NFRPC): materials, properties, and biomedical applications 综述天然和合成纳米填料增强天然纤维增强聚合物复合材料(NFRPC):材料、性能和生物医学应用
IF 4
Micro and Nano Systems Letters Pub Date : 2025-11-19 DOI: 10.1186/s40486-025-00240-6
Sakshi Shantharam Kamath, Ravi Kumar Chandrappa, Santhosh Nagaraja, Basavaraju Bennehalli, Ashwin C. Gowda, Dhanunjay Munthala, Soodkhet Pojprapai, Abdulfatah Abdu Yusuf, Muhammad Imam Ammarullah
{"title":"Review of natural and synthetic nanofiller-enhanced natural fibre reinforced polymer composite (NFRPC): materials, properties, and biomedical applications","authors":"Sakshi Shantharam Kamath,&nbsp;Ravi Kumar Chandrappa,&nbsp;Santhosh Nagaraja,&nbsp;Basavaraju Bennehalli,&nbsp;Ashwin C. Gowda,&nbsp;Dhanunjay Munthala,&nbsp;Soodkhet Pojprapai,&nbsp;Abdulfatah Abdu Yusuf,&nbsp;Muhammad Imam Ammarullah","doi":"10.1186/s40486-025-00240-6","DOIUrl":"10.1186/s40486-025-00240-6","url":null,"abstract":"<div><p>Nanofillers are one of the most important additives in the creation of natural fibre reinforced polymer composite (NFRPC), as they greatly improve the properties of the material even at low doses. Such Nanofillers enhance the bonding of fibers and matrix that result in an increase of the mechanical and functional properties of composite. Clays, nanomaterials of carbon, metal and metal oxide nanoparticles, cellulose nanocrystals are some of the most prevalent Nano fillers. NFRPC, with the current advantages of low cost, renewability, biodegradability, and desirable specific properties, have taken off as an alternative to synthetic composites in biomedical applications. Although such composites present the advantage of desirable mechanical strength, thermal stability, and acoustic performance, the addition of Nanofillers enhances the performance further by increasing structure-property associations and processing. Also, Nano filler-enhanced composites have a promising biomedical future, especially when used in tissue engineering, wound healing, antimicrobial systems, and load bearing implants. The review is a compilation of recent developments of natural and synthetic nano filler applications in combination of natural fibers and is therefore a complete reference to any researcher or scientist who will be interested in designing high-performance composites by the synergistic combination of fibers, polymer matrices, and Nanofillers.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-025-00240-6","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145561176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Freeze-casted aerogel-based piezoresistive pressure sensors: materials, structures, and applications 冻铸气凝胶压阻式压力传感器:材料、结构和应用
IF 4
Micro and Nano Systems Letters Pub Date : 2025-11-07 DOI: 10.1186/s40486-025-00242-4
Donghyun Lee, Jungwook Choi
{"title":"Freeze-casted aerogel-based piezoresistive pressure sensors: materials, structures, and applications","authors":"Donghyun Lee,&nbsp;Jungwook Choi","doi":"10.1186/s40486-025-00242-4","DOIUrl":"10.1186/s40486-025-00242-4","url":null,"abstract":"<div>\u0000 \u0000 <p>Flexible piezoresistive pressure sensors have emerged as vital components for wearable electronics, soft robotics, and biomedical monitoring. However, simultaneously achieving high sensitivity, a wide detection range, and long-term durability for these sensors remains challenging. Among the various approaches, freeze-casted aerogel-based sensors have garnered significant attention owing to their exceptional properties, such as ultralow density, high porosity, and customizable microstructures. This review summarizes the recent advances in such sensors, with emphasis on material selection, structural design, and practical applications. The integration of one-dimensional, two-dimensional, and hybrid nanomaterials offers synergistic enhancements in electrical conductivity, mechanical robustness, and sensing performance. Advanced structural engineering strategies, including anisotropic pore alignment, gradient architecture, and biomimetic designs, have enabled improved sensitivity, a broader detection range, and enhanced durability. Representative applications in real-time physiological monitoring and human–machine interfaces demonstrate the potential of these sensors in real-world scenarios. This review provides insight into rational design strategies that harness both materials and architecture to improve the performance and applicability of next-generation aerogel-based pressure sensors.</p>\u0000 </div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-025-00242-4","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145456218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A highly sensitive and stretchable PVA-based hydrogel strain sensor with facile acrylic elastomer encapsulation 高灵敏度和可拉伸的聚乙烯醇为基础的水凝胶应变传感器易丙烯酸弹性体封装
IF 4
Micro and Nano Systems Letters Pub Date : 2025-11-03 DOI: 10.1186/s40486-025-00239-z
Jong-An Choi, Mingyu Kang, Jingu Jeong, Soonjae Pyo
{"title":"A highly sensitive and stretchable PVA-based hydrogel strain sensor with facile acrylic elastomer encapsulation","authors":"Jong-An Choi,&nbsp;Mingyu Kang,&nbsp;Jingu Jeong,&nbsp;Soonjae Pyo","doi":"10.1186/s40486-025-00239-z","DOIUrl":"10.1186/s40486-025-00239-z","url":null,"abstract":"<div>\u0000 \u0000 <p>Hydrogel-based strain sensors are highly promising for wearable electronics; however, their practical application is often limited by their low sensitivity and tendency to dehydrate. This paper reports on the development of a high-performance strain sensor that addresses these limitations simultaneously through a synergistic material and structural design. A conductive hydrogel composed of a polyvinyl alcohol matrix, multiwalled carbon nanotube filler, and borax cross-linker is encapsulated using a simple and effective lamination process with a self-adhesive, transparent acrylic elastomer film. This facile encapsulation method provides a robust hermetic seal that ensures environmental stability without compromising device flexibility. The resulting device exhibits a remarkable gauge factor of approximately 172 in the high-strain regime (30–100%), negligible signal drift, and stable performance over prolonged cyclic loading. Furthermore, the encapsulated sensor maintains durability and reliable adhesion under humid or saline conditions, validating its suitability for wearable use. The combination of superior sensitivity, long-term stability, and a scalable, low-temperature fabrication process establishes this work as a practical route toward robust hydrogel-based sensors for soft robotics and human-motion monitoring.</p>\u0000 </div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-11-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-025-00239-z","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145456621","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication and electro-thermo-mechanical characterization of a hot arm actuator 热臂致动器的制造及电-热-机械特性
IF 4
Micro and Nano Systems Letters Pub Date : 2025-10-31 DOI: 10.1186/s40486-025-00241-5
Kibum Jung, Juhee Ko, Taeyeong Kim, Jungchul Lee
{"title":"Fabrication and electro-thermo-mechanical characterization of a hot arm actuator","authors":"Kibum Jung,&nbsp;Juhee Ko,&nbsp;Taeyeong Kim,&nbsp;Jungchul Lee","doi":"10.1186/s40486-025-00241-5","DOIUrl":"10.1186/s40486-025-00241-5","url":null,"abstract":"<div><p>This study presents the fabrication and characterization of a MEMS-based hot arm actuator that utilizes Joule heating-induced thermal expansion for lateral displacement. The actuator was fabricated through a series of micro-fabrication processes including photolithography, e-beam evaporation, and plasma ashing. Electro-thermal and electro-thermo-mechanical characteristics were experimentally analyzed and compared with finite element analysis (FEA) simulations. The actuator demonstrated fast thermal response (~100 μs), high repeatability, and effective displacement (&gt; 10 μm) under low-voltage operation (&lt; 0.6 V). These findings highlight its potential application in fast-switching optical MEMS systems.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-025-00241-5","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145406274","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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