Micro and Nano Systems Letters最新文献_第10页

Highly controllable and reliable ultra-thin Parylene deposition 高度可控、可靠的超薄聚苯乙烯沉积

IF 3.6

Micro and Nano Systems Letters Pub Date : 2018-10-10 DOI: 10.1186/s40486-018-0067-0

Yaoping Liu, Dongyang Kang, Wangzhi Dai, Haida Li, Wei Wang, Yu-Chong Tai

{"title":"Highly controllable and reliable ultra-thin Parylene deposition","authors":"Yaoping Liu, Dongyang Kang, Wangzhi Dai, Haida Li, Wei Wang, Yu-Chong Tai","doi":"10.1186/s40486-018-0067-0","DOIUrl":"https://doi.org/10.1186/s40486-018-0067-0","url":null,"abstract":"Thanks to the excellent barrier property and fabrication accessibility, Parylene has been actively used in the microelectromechanical system. An ultra-thin Parylene film with thickness smaller than 100?nm is usually required to precisely tune the surface property of substrate or protect the functional unit. The commercially available regular Parylene deposition is a dimer mass determined chemical vapor deposition process with a high output (i.e. a low deposition precision in term of thickness control), around 1.6?μm/g (the ratio of film thickness to the loaded dimer mass) for the machine in the author’s lab. Therefore, it is hard to controllably and reliably prepare a Parylene film with thickness smaller than 100?nm, which requires a dimer mass less than 62.5?mg. This paper reported a method to prepare ultra-thin Parylene films with the nominal thickness down to 1?nm. A home-made deposition chamber was put inside and connected with the regular machine chamber through a microfabricated orifice with feature size smaller than 1?mm. According to the free molecular flow theory, the pressure inside the deposition chamber can be predictably and controllably reduced, thereby an ultra-low output of Parylene deposition, as low as 0.08?nm/g, was successfully obtained. The deposition precision was increased by 4 orders of magnitude compared to that of a direct Parylene deposition. This highly controllable and reliable ultra-thin Parylene deposition technique will find promising applications in flexible electronics and biomedical microdevices.","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"6 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2018-10-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1186/s40486-018-0067-0","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"4437979","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern 用自对准预蚀刻模式测定Si{111}晶圆上的精确晶体学方向

IF 3.6

Micro and Nano Systems Letters Pub Date : 2018-06-29 DOI: 10.1186/s40486-018-0066-1

Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, Ashok Kumar Pandey, Prem Pal

{"title":"Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern","authors":"Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, Ashok Kumar Pandey, Prem Pal","doi":"10.1186/s40486-018-0066-1","DOIUrl":"https://doi.org/10.1186/s40486-018-0066-1","url":null,"abstract":"Silicon wet anisotropic etching based bulk micromachining technique is widely used for the fabrication of microelectromechanical systems components. In this technique of microfabrication, alignment of mask edges with crystallographic directions plays a crucial role to avoid unwanted undercutting to control the dimensions of fabricated structures. Various kinds of pre-etched designs have been reported to identify the crystallographic directions (e.g. 〈110〉 and 〈100〉) on Si{100} and Si{110} wafer surfaces. To the best of our knowledge, no pre-etched design has been reported to identify crystal directions on Si{111} wafer. In this work, a self-aligning technique based on pre-etched patterns has been investigated to precisely determine the 〈110〉 direction on Si{111} wafer surface. In this technique, a set of circular shape mask patterns close to wafer edge are etched for the identification of 〈110〉 direction. On wet anisotropic etching these patterns transform to hexagonal shapes. The notches of hexagonal patterns align precisely along a straight line only when they lie on exact 〈110〉 direction. The self-aligned notches can easily be identified by visual inspection using an optical microscope. The major advantages of this technique are simplicity, precision, and self-alignment. In addition, the pre-etched patterns at the wafer periphery occupy very less place.","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"6 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2018-06-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1186/s40486-018-0066-1","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"5124118","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 8

High-throughput magnetic particle washing in nanoliter droplets using serial injection and splitting 利用连续注射和分裂技术对纳米升液滴进行高通量磁颗粒洗涤

IF 3.6

Micro and Nano Systems Letters Pub Date : 2018-06-21 DOI: 10.1186/s40486-018-0065-2

William Stephenson

{"title":"High-throughput magnetic particle washing in nanoliter droplets using serial injection and splitting","authors":"William Stephenson","doi":"10.1186/s40486-018-0065-2","DOIUrl":"https://doi.org/10.1186/s40486-018-0065-2","url":null,"abstract":"Droplet microfluidics has emerged as a promising technique to perform high-throughput, massively-parallel chemical and molecular biological reactions. Droplet microfluidic operations such as droplet generation, sorting, and fluid addition are well established; however, fluid exchange (i.e. washing) at high-throughput is challenging to implement. Here we present a microfluidic device architecture that utilizes wash buffer injection preceding a splitting junction in proximity to a magnetic field to transfer paramagnetic microparticles across a concentration gradient within a single droplet. The device can operate at high throughput (50?Hz) while preserving input droplet volume at the collection outlet as verified using high speed imaging. Using a two-stage device, combined microparticle retention rates (up to 97.5%) and high wash efficiency (92.9%) is demonstrated using dye absorbance and fluorescence. This method can be performed in a serial array to obtain an arbitrary degree of wash efficiency and integrated into lab-on-a-chip systems for use in multi-step microfluidic bioassays or single-cell genomic applications requiring high-fidelity washing steps within droplets.","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"6 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2018-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1186/s40486-018-0065-2","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"4825463","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6

Sorting and manipulation of biological cells and the prospects for using optical forces 生物细胞的分选和操作以及使用光力的前景

IF 3.6

Micro and Nano Systems Letters Pub Date : 2018-05-23 DOI: 10.1186/s40486-018-0064-3

Arslan Atajanov, Alexander Zhbanov, Sung Yang

{"title":"Sorting and manipulation of biological cells and the prospects for using optical forces","authors":"Arslan Atajanov, Alexander Zhbanov, Sung Yang","doi":"10.1186/s40486-018-0064-3","DOIUrl":"https://doi.org/10.1186/s40486-018-0064-3","url":null,"abstract":"Contemporary biomedical research requires development of novel techniques for sorting and manipulation of cells within the framework of a microfluidic chip. The desired functions of a microfluidic chip are achieved by combining and integrating passive methods that utilize the channel geometry and structure, as well as active methods that include magnetic, electrical, acoustic and optical forces. Application of magnetic, electric and acoustics-based methods for sorting and manipulation have been and are under continuous scrutiny. Optics-based methods, in contrast, have not been explored to the same extent as other methods, since they attracted insufficient attention. This is due to the complicated, expensive and bulky setup required for carrying out such studies. However, advances in optical beam shaping and computer hardware, and software have opened up new opportunities for application of light to development of advanced sorting and manipulation techniques. This review outlines contemporary techniques for cell sorting and manipulation, and provides an in-depth view into the existing and prospective uses of light for cell sorting and manipulation.","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"6 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2018-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1186/s40486-018-0064-3","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"4901148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 35

Finger-triggered portable PDMS suction cup for equipment-free microfluidic pumping 手指触发便携式PDMS吸盘，用于无设备的微流体泵送

IF 3.6

Micro and Nano Systems Letters Pub Date : 2018-03-05 DOI: 10.1186/s40486-018-0063-4

Sanghyun Lee, Hojin Kim, Wonhyung Lee, Joonwon Kim

引用次数: 17

An SU-8-based microprobe with a nanostructured surface enhances neuronal cell attachment and growth 一种基于su -8的微探针，具有纳米结构的表面，可以增强神经元细胞的附着和生长

IF 3.6

Micro and Nano Systems Letters Pub Date : 2017-12-06 DOI: 10.1186/s40486-017-0062-x

Eunhee Kim, Jin-Young Kim, Hongsoo Choi

{"title":"An SU-8-based microprobe with a nanostructured surface enhances neuronal cell attachment and growth","authors":"Eunhee Kim, Jin-Young Kim, Hongsoo Choi","doi":"10.1186/s40486-017-0062-x","DOIUrl":"https://doi.org/10.1186/s40486-017-0062-x","url":null,"abstract":"Microprobes are used to repair neuronal injury by recording electrical signals from neuronal cells around the surface of the device. Following implantation into the brain, the immune response results in formation of scar tissue around the microprobe. However, neurons must be in close proximity to the microprobe to enable signal recording. A common reason for failure of microprobes is impaired signal recording due to scar tissue, which is not related to the microprobe itself. Therefore, the device–cell interface must be improved to increase the number of neurons in contact with the surface. In this study, we developed nanostructured SU-8 microprobes to support neuronal growth. Nanostructures of 200?nm diameter and depth were applied to the surface of microprobes, and the attachment and neurite outgrowth of PC12 cells on the microprobes were evaluated. Neuronal attachment and neurite outgrowth on the nanostructured microprobes were significantly greater than those on non-nanostructured microprobes. The enhanced neuronal attachment and neurite outgrowth on the nanostructured microprobes occurred in the absence of an adhesive coating, such as poly-l-lysine, and so may be useful for implantable devices for long-term use. Therefore, nanostructured microprobes can be implanted without adhesive coating, which can cause problems in vivo over the long term.","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"5 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2017-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1186/s40486-017-0062-x","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"4244436","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 9

Feasibility study of a biocompatible pneumatic dispensing system using mouse 3T3-J2 fibroblasts 小鼠3T3-J2成纤维细胞生物相容性气动点胶系统的可行性研究

IF 3.6

Micro and Nano Systems Letters Pub Date : 2017-11-24 DOI: 10.1186/s40486-017-0061-y

Sangmin Lee, Hojin Kim, Joonwon Kim

引用次数: 1

Temperature control of micro heater using Pt thin film temperature sensor embedded in micro gas sensor 用铂薄膜温度传感器嵌入微气体传感器控制微加热器的温度

IF 3.6

Micro and Nano Systems Letters Pub Date : 2017-09-12 DOI: 10.1186/s40486-017-0060-z

Jun-gu Kang, Joon-Shik Park, Kwang-Bum Park, Junho Shin, Eung-An Lee, Sangsoo Noh, Hoo-Jeong Lee

{"title":"Temperature control of micro heater using Pt thin film temperature sensor embedded in micro gas sensor","authors":"Jun-gu Kang, Joon-Shik Park, Kwang-Bum Park, Junho Shin, Eung-An Lee, Sangsoo Noh, Hoo-Jeong Lee","doi":"10.1186/s40486-017-0060-z","DOIUrl":"https://doi.org/10.1186/s40486-017-0060-z","url":null,"abstract":"Pt thin film temperature sensors (Pt T sensors) are embedded in micro gas sensors to measure and control the working temperature. We characterized electrical resistances of Pt T sensors and micro heaters with temperature changing in the oven and by Joule heating. In order to enhance the accuracy of temperature measurement by the Pt T sensors, we investigated the correlation among the Pt T sensor, micro heater, and the working temperature, which was linear proportional relation expressed as the equation: T2?=?6.466R1–642.8, where T2?=?temperature of the Pt micro heater and R1?=?the electrical resistance of the Pt T sensor. As the error by physically separated gap between Pt T sensor and micro heater calibrated, measuring and controlling temperature of micro heater in micro gas sensors were possible through the Pt T sensors. For the practical use of Pt T sensor in micro gas sensor, the gas sensing properties of fabricated micro gas sensors to 25?ppm CO and 1?ppm HCHO gases were characterized.","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"5 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2017-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1186/s40486-017-0060-z","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"4517893","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 22

Linear frequency tuning in an LC-resonant system using a C–V response controllable MEMS varactor 利用C-V响应可控MEMS变容器进行lc谐振系统的线性频率调谐

IF 3.6

Micro and Nano Systems Letters Pub Date : 2017-09-04 DOI: 10.1186/s40486-017-0059-5

Chang-Hoon Han, Yong-Hoon Yoon, Seung-Deok Ko, Min-Ho Seo, Jun-Bo Yoon

{"title":"Linear frequency tuning in an LC-resonant system using a C–V response controllable MEMS varactor","authors":"Chang-Hoon Han, Yong-Hoon Yoon, Seung-Deok Ko, Min-Ho Seo, Jun-Bo Yoon","doi":"10.1186/s40486-017-0059-5","DOIUrl":"https://doi.org/10.1186/s40486-017-0059-5","url":null,"abstract":"This paper proposes a device level solution to achieve linear frequency tuning with respect to a tuning voltage (V\u0000 \u0000 tune\u0000 ) sweep in an inductor (L)–capacitor (C) resonant system. Since the linearity of the resonant frequency vs. tuning voltage (f–V) relationship in an LC-resonant system is closely related to the C–V response characteristic of the varactor, we propose a C–V response tunable varactor to realize the linear frequency tuning. The proposed varactor was fabricated using microelectromechanical system (MEMS) surface micromachining. The fabricated MEMS varactor has the ability to dynamically change the C–V response characteristic according to a curve control voltage (V\u0000 \u0000 curve-control\u0000 ). When V\u0000 \u0000 curve-control\u0000 was increased from zero to 9?V, the C–V response curve was changed from a linear to a concave form (i.e., the capacitance decreased quickly in the low tuning voltage region and slowly in the high tuning voltage region). This change in the C–V response characteristic resulted in a change in the f–V relationship, and we successfully demonstrated almost perfectly linear frequency tuning in the LC-resonant system, with a linearity factor of 99.95%.","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"5 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2017-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1186/s40486-017-0059-5","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"4188400","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Accurate, consistent, and fast droplet splitting and dispensing in electrowetting on dielectric digital microfluidics 电介质数字微流体电润湿中准确，一致，快速的液滴分裂和分配

IF 3.6

Micro and Nano Systems Letters Pub Date : 2017-06-16 DOI: 10.1186/s40486-017-0058-6

N. Y. Jagath B. Nikapitiya, Mun Mun Nahar, Hyejin Moon

引用次数: 31