Micro and Nano Systems Letters最新文献

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Surrogate model for optimizing annealing duration of self-assembled membrane-cavity structures 自组装膜腔结构退火时间优化代理模型
IF 3.6
Micro and Nano Systems Letters Pub Date : 2022-06-06 DOI: 10.1186/s40486-022-00148-5
Mun Goung Jeong, Taeyeong Kim, Bong Jae Lee, Jungchul Lee
{"title":"Surrogate model for optimizing annealing duration of self-assembled membrane-cavity structures","authors":"Mun Goung Jeong,&nbsp;Taeyeong Kim,&nbsp;Bong Jae Lee,&nbsp;Jungchul Lee","doi":"10.1186/s40486-022-00148-5","DOIUrl":"10.1186/s40486-022-00148-5","url":null,"abstract":"<div><p>We propose a scheme to establish a surrogate model for optimizing the annealing duration of the self-assembled membrane-cavity structures from hole patterned silicon wafers. Although it has been reported that the design space of post-annealing shape can be extended by increasing the dimensions of hole arrays, the annealing duration for large hole arrays has not been well examined. A two-dimensional axisymmetric phase-field model in commercial FEM software is employed to establish the surrogate model with respect to three variables (i.e., radius, aspect ratio (AR), and normalized spacing). The established surrogate model based on the neural network indicates that the hole radius dominantly affects annealing duration and the temperature elevation (i.e., acceleration of diffusion speed) is necessary to achieve the practical annealing duration when the hole radius is larger than 1 μm.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00148-5","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"65886874","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Electrochemical activity of glassy carbon electrode modified with ZnO nanoparticles prepared Via Senna Alata L. leaf extract towards antiretroviral drug 泻泻叶提取物制备的ZnO纳米修饰玻碳电极对抗逆转录病毒药物的电化学活性研究
IF 3.6
Micro and Nano Systems Letters Pub Date : 2022-05-17 DOI: 10.1186/s40486-022-00147-6
Harits Atika Ariyanta, Fakhrur Roji, Dewangga Oky Bagus Apriandanu
{"title":"Electrochemical activity of glassy carbon electrode modified with ZnO nanoparticles prepared Via Senna Alata L. leaf extract towards antiretroviral drug","authors":"Harits Atika Ariyanta,&nbsp;Fakhrur Roji,&nbsp;Dewangga Oky Bagus Apriandanu","doi":"10.1186/s40486-022-00147-6","DOIUrl":"10.1186/s40486-022-00147-6","url":null,"abstract":"<div><p>The phytosynthesis method was used to prepare ZnO nanoparticles (ZnO NPs) via <i>Senna alata L.</i> leaf extract (SALE) by involving alkaloids, which play an essential role as a source of weak bases during the formation reaction of NPs. ZnO NPs on glassy carbon electrodes (GCE/ZnO NP) have been introduced to investigate its electrochemical activity towards the antiretroviral drug, lamivudine (3TC). Several characterization techniques, such as Fourier Transform Infra-Red (FTIR), X-Ray Diffraction (XRD), Scanning Electron Microscopy (SEM), Energy Dispersive X-Ray Spectroscopy (EDS), and Dynamic Light Scattering (DLS) techniques were employed to analyze the properties of GCE/ZnO NPs. As a result, ZnO NPs in spherical shape showed a high purity crystalline hexagonal wurtzite structure with a particle diameter of 40–60 nm. A Cyclic Voltammetry (CV) measurement confirmed that the electrochemical reduction of 3TC on GCE/ZnO NPs exhibited an excellent linear range of 10–300 µM with a detection limit of 1.902 µM, quantitation limit of 6.330 µM, and sensitivity of 0.0278 µA/µM. Thus, this research suggests a facile method for the preparation of material-based ZnO NPs as a promising antiretroviral drug sensors due to their excellent electrochemical properties.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00147-6","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134878349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Ethanol-sensing properties of cobalt porphyrin-functionalized titanium dioxide nanoparticles as chemiresistive materials that are integrated into a low power microheater 钴卟啉功能化二氧化钛纳米颗粒作为化学电阻材料集成到低功率微加热器中的乙醇传感性能
IF 3.6
Micro and Nano Systems Letters Pub Date : 2022-04-19 DOI: 10.1186/s40486-022-00146-7
Kwanhun Kim, Yunsung Kang, Kyubin Bae, Jongbaeg Kim
{"title":"Ethanol-sensing properties of cobalt porphyrin-functionalized titanium dioxide nanoparticles as chemiresistive materials that are integrated into a low power microheater","authors":"Kwanhun Kim,&nbsp;Yunsung Kang,&nbsp;Kyubin Bae,&nbsp;Jongbaeg Kim","doi":"10.1186/s40486-022-00146-7","DOIUrl":"10.1186/s40486-022-00146-7","url":null,"abstract":"<div><p>Gaseous ethanol detection has attracted significant interest owing to its practical applications such as in breath analysis, chemical process monitoring, and safety evaluations of food packaging. In this study, titanium dioxide (TiO<sub>2</sub>) nanoparticles functionalized with cobalt porphyrin (CoPP) are utilized as resistive ethanol-sensing materials, and are integrated with a suspended micro-heater for low power consumption. The micro-heater with the suspended structure inhibits substrate heat transfer, resulting in power consumption as low as 18 mW when the operating temperature is approximately 300 °C. CoPP functionalization allows an enhanced response (197.8%) to 10 ppm ethanol compared to that of pristine TiO<sub>2</sub> nanoparticles. It is confirmed that the sensor response is reliable upon exposure to 10 ppm ethanol for three cycles. In addition, responses of different magnitude are obtained under exposure to ethanol at various concentrations from 9 to 1 ppm, indicating that the resistance change originates from a charge transfer between the sensing materials and target gas. The sensing mechanism of CoPP-functionalized TiO<sub>2</sub> in relation to charge transfer is analyzed, and the performance of the proposed sensor with previously reported TiO<sub>2</sub>-based ethanol sensors is compared. Considering that it is processed by batch fabrication, consumes low power, and offers high sensitivity, the proposed sensor is promising for use as a portable sensor in the distributed monitoring of gaseous ethanol.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00146-7","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"4743008","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Toluene sensing characteristics of tin oxide-based gas sensor deposited with various amounts of metalloporphyrin 不同量金属卟啉沉积的氧化锡基气体传感器的甲苯传感特性
IF 3.6
Micro and Nano Systems Letters Pub Date : 2022-03-08 DOI: 10.1186/s40486-022-00145-8
Byeonghwa Cho, Jongbaeg Kim
{"title":"Toluene sensing characteristics of tin oxide-based gas sensor deposited with various amounts of metalloporphyrin","authors":"Byeonghwa Cho,&nbsp;Jongbaeg Kim","doi":"10.1186/s40486-022-00145-8","DOIUrl":"10.1186/s40486-022-00145-8","url":null,"abstract":"<div><p>In this study, the sensing characteristics of tin oxide-based gas sensors deposit with different amounts of metalloporphyrin, which is a functionalization substance, are evaluated. The mass of metalloporphyrin deposited is 3, 10, 20, 30, and 40 mg for 5 different sensors prepared. The deposition of 3 mg of metalloporphyrin result in an island form of functionalization instead of a thin film; meanwhile, thin films with thicknesses of 25, 35, 74, and 92 nm are formed for the other four cases. As the deposition amount of metalloporphyrin increase, the performance of the sensor deteriorate. The samples are prepared by subdividing the amount of metalloporphyrin source to determine the optimized deposition amount. A sample is prepared with deposition amounts ranging between 1 to 10 mg. The sensors deposit with 3–5 mg metalloporphyrin has excellent response, response, and recovery time characteristics.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-03-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00145-8","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"4346790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Green synthesis of silver nanoparticles and its antibacterial activity using fungus Talaromyces purpureogenus isolated from Taxus baccata Linn. 绿色合成纳米银及其抑菌活性研究。
IF 3.6
Micro and Nano Systems Letters Pub Date : 2022-01-20 DOI: 10.1186/s40486-022-00144-9
Ankush Sharma, Anand Sagar, Jagriti Rana, Reena Rani
{"title":"Green synthesis of silver nanoparticles and its antibacterial activity using fungus Talaromyces purpureogenus isolated from Taxus baccata Linn.","authors":"Ankush Sharma,&nbsp;Anand Sagar,&nbsp;Jagriti Rana,&nbsp;Reena Rani","doi":"10.1186/s40486-022-00144-9","DOIUrl":"10.1186/s40486-022-00144-9","url":null,"abstract":"<div><p>The present study is focused on the synthesis of silver nanoparticles (AgNPs) utilizing endophytic fungus <i>Talaromyces purpureogenus</i>, isolated from <i>Taxus baccata</i> Linn. Extracellular extract of <i>Talaromyces purpureogenus</i> has shown occurrence of secondary metabolites viz. terpenoids and phenols. Gas chromatography-mass spectroscopy analysis showed the presence of 16 compounds. Techniques like Ultraviolet–visible spectroscopy, Fourier transform infrared spectroscopy, dynamic light scattering, field emission gun scanning electron microscopy, high-resolution transmission electron microscopy, energy-dispersive X-ray spectroscopy and X-ray diffraction were employed to characterize the synthesized AgNPs. UV–Vis spectroscopy showed sharp peaks at 380–470 nm which indicates the presence of metallic silver. FTIR analysis showed the presence of various functional groups like phenols, hydroxyl groups, and primary amines. In DLS, Z-average size and PdI of synthesized AgNPs were 240.2 r.nm and 0.720 respectively, with zeta potential − 19.6 mV. In FEG-SEM and HRTEM the spherical AgNPs showed diameter in the range of 30–60 nm. In EDS analysis the weight percent of Ag is 67.26% and atomic percent is 43.13%. From XRD analysis the size of AgNPs was found to be 49.3 nm with face-centered cubic crystalline nature of fungal synthesized AgNPs. These nanoparticles have shown significant antibacterial activity against tested strains viz. <i>Listeria monocytogenes</i> (13 ± 0.29 mm), <i>Escherichia coli</i> (17 ± 0.14 mm), <i>Shigella dysenteriae</i> (18 ± 0.21 mm) and <i>Salmonella typhi</i> (14 ± 0.13 mm). These synthesized AgNPs have shown effective free radical scavenging activity against 2,2′-diphenyl-1-picrylhydrazyl. The present study showed that the endophytic fungus <i>Talaromyces purpureogenus</i> can be used as a prominent source to synthesize AgNPs by using biological, ecofriendly, and in a non-toxic way accompanied by antibacterial and antioxidant properties which further can reduce the harvesting pressure faced by <i>Taxus baccata.</i></p><h3>Graphical Abstract</h3>\u0000 <figure><div><div><div><picture><source><img></source></picture></div></div></div></figure>\u0000 </div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-01-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00144-9","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"5087555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Multiple ratiometric nanothermometry using semiconductor BiFeO3 nanowires and quantitative validation of thermal sensitivity 采用半导体BiFeO3纳米线的多重比率纳米热测量及热敏度的定量验证
IF 3.6
Micro and Nano Systems Letters Pub Date : 2022-01-10 DOI: 10.1186/s40486-022-00143-w
K. Prashanthi, K. Krishna Mohan, Željka Antić, Kaveh Ahadi, Miroslav D. Dramicanin
{"title":"Multiple ratiometric nanothermometry using semiconductor BiFeO3 nanowires and quantitative validation of thermal sensitivity","authors":"K. Prashanthi,&nbsp;K. Krishna Mohan,&nbsp;Željka Antić,&nbsp;Kaveh Ahadi,&nbsp;Miroslav D. Dramicanin","doi":"10.1186/s40486-022-00143-w","DOIUrl":"10.1186/s40486-022-00143-w","url":null,"abstract":"<div><p>Here, we report a very sensitive, non-contact, ratio-metric, and robust luminescence-based temperature sensing using a combination of conventional photoluminescence (PL) and negative thermal quenching (NTQ) mechanisms of semiconductor BiFeO<sub>3</sub> (BFO) nanowires. Using this approach, we have demonstrated the absolute thermal sensitivity of ~ 10 mK<sup>−1</sup> over the 300–438 K temperature range and the relative sensitivity of 0.75% K<sup>−1</sup> at 300 K. Further, we have validated thermal sensitivity of BFO nanowires quantitatively using linear regression and analytical hierarchy process (AHP) and found close match with the experimental results. These results indicated that BFO nanowires are excellent candidates for developing high‐performance luminescence-based temperature sensors.</p><h3>Graphical abstract</h3>\u0000 <figure><div><div><div><picture><source><img></source></picture></div></div></div></figure>\u0000 </div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-01-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00143-w","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"4726482","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Two-step hybrid process of movable part inside glass substrate using ultrafast laser 利用超快激光对玻璃基板内的可移动部件进行两步混合加工
IF 4.7
Micro and Nano Systems Letters Pub Date : 2021-12-17 DOI: 10.1186/s40486-021-00142-3
Jeongtae Kim, Sung-Il Kim, Yeun-Ho Joung, Jiyeon Choi, Chiwan Koo
{"title":"Two-step hybrid process of movable part inside glass substrate using ultrafast laser","authors":"Jeongtae Kim,&nbsp;Sung-Il Kim,&nbsp;Yeun-Ho Joung,&nbsp;Jiyeon Choi,&nbsp;Chiwan Koo","doi":"10.1186/s40486-021-00142-3","DOIUrl":"10.1186/s40486-021-00142-3","url":null,"abstract":"<div><p>We demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical etching. To obtain an influence by the optical characteristics of a glass substrate when fabricating a 3D microstructure using the SLE, we analyzed the relationship of their dimensions between the designed and the fabricated devices. Two 3D microfluidic devices are designed and fabricated on glass substrates as the demonstrations of the hybrid process: a 3D microfluidic valve device with a movable plug and a 3D microfluidic mixer with a rotatable impeller and multilayer microchannels. The valving plug and the impeller of each device are successfully moved and rotated. The smallest structure is a pillar of the impeller device, and its size is 29 μm (diameter) × 277 μm (height). We expect this study to be extended to potential applications in 3D glass microfabrication and microfluidic systems.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"9 1","pages":""},"PeriodicalIF":4.7,"publicationDate":"2021-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-021-00142-3","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"65886856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Micro multi-nozzle jet coating of organic thin film for organic light-emitting diode lighting devices 用于有机发光二极管照明器件的有机薄膜微多喷嘴喷射涂层
IF 4.7
Micro and Nano Systems Letters Pub Date : 2021-12-17 DOI: 10.1186/s40486-021-00137-0
Kwon-Yong Shin, Mingyu Kang, Kwan Hyun Cho, Kyung-Tae Kang, Sang-Ho Lee
{"title":"Micro multi-nozzle jet coating of organic thin film for organic light-emitting diode lighting devices","authors":"Kwon-Yong Shin,&nbsp;Mingyu Kang,&nbsp;Kwan Hyun Cho,&nbsp;Kyung-Tae Kang,&nbsp;Sang-Ho Lee","doi":"10.1186/s40486-021-00137-0","DOIUrl":"10.1186/s40486-021-00137-0","url":null,"abstract":"<div><p>Uniform deposition across large areas of an organic layer is one of the challenges for the industrial application of solution-based organic light‐emitting diode (OLED). In this paper, we propose an organic thin film deposition method for OLED using a micro multi-nozzle jet coating process. The developed micro multi-nozzle jet head consists of eighteen nozzles (100 μm diameter), a side suction line, inlets, and a nozzle protection outer hole. To demonstrate organic thin film deposition for OLED lighting device fabrication, a poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) solution was used as a hole injection layer (HIL). Thickness uniformity of the PEDOT:PSS thin film was analyzed by regulating the jetting pressure. Through single-path coating of twelve successive stable column-jet flows, PEDOT:PSS organic film of 26 mm width was coated on an ITO substrate at 1 m/s head speed. The PEDOT:PSS thin film of 24.25 ± 1.55 nm (CV = 6.39%) thickness was obtained by the proposed coating method. For the feasibility test, OLED lighting devices with emission areas of 20 mm × 20 mm and 70 mm × 70 mm were successfully fabricated using PEDOT:PSS films deposited by a micro multi-nozzle jet coating method.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"9 1","pages":""},"PeriodicalIF":4.7,"publicationDate":"2021-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-021-00137-0","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"138520601","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Synthesis of metallic aluminum particles by electrolysis in aqueous solution 水溶液中电解合成金属铝颗粒的研究
IF 4.7
Micro and Nano Systems Letters Pub Date : 2021-12-08 DOI: 10.1186/s40486-021-00141-4
Takefumi Hosoya, Takehiro Yonezawa, Noriko Yamauchi, Kouichi Nakashima, Yoshio Kobayashi
{"title":"Synthesis of metallic aluminum particles by electrolysis in aqueous solution","authors":"Takefumi Hosoya,&nbsp;Takehiro Yonezawa,&nbsp;Noriko Yamauchi,&nbsp;Kouichi Nakashima,&nbsp;Yoshio Kobayashi","doi":"10.1186/s40486-021-00141-4","DOIUrl":"10.1186/s40486-021-00141-4","url":null,"abstract":"<div><p>The present work proposes a method for fabricating metallic Al particles in aqueous solution. An aqueous colloidal solution was prepared from an aqueous aluminum nitrate nonahydrate solution by electrolysis using metallic Al plates as the anode and cathode under ultrasonic irradiation in water at 25–45 °C. The sizes of the particles in the colloidal solutions prepared at 25, 35, and 45 °C were 76.3, 77.0, and 84.7 nm, respectively. The powder obtained from the colloidal solution prepared at 25 °C was not crystalline. By contrast, the powders obtained from the colloidal solutions prepared at 35 and 45 °C had a crystal structure of cubic Al and crystal sizes of 55.7 and 59.3 nm, respectively. Thus, elevated temperatures promoted both particle growth and crystal growth, which was explained by higher temperatures increasing the frequency and energy of particle collisions. The metallic Al particles were chemically stable in both an aqueous solution and the ambient atmosphere. The chemically stable metallic Al particles are expected to be used as sources for fabricating materials related to fuels, energy storage, and pigments.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"9 1","pages":""},"PeriodicalIF":4.7,"publicationDate":"2021-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-021-00141-4","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"138520614","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor 具有高性能MEMS可调谐电感的CMOS压控振荡器
IF 4.7
Micro and Nano Systems Letters Pub Date : 2021-11-26 DOI: 10.1186/s40486-021-00140-5
Uikyu Chae, Jeongsoo Park, Jeong-Geun Kim, Hyun-Yong Yu, Il-Joo Cho
{"title":"CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor","authors":"Uikyu Chae,&nbsp;Jeongsoo Park,&nbsp;Jeong-Geun Kim,&nbsp;Hyun-Yong Yu,&nbsp;Il-Joo Cho","doi":"10.1186/s40486-021-00140-5","DOIUrl":"10.1186/s40486-021-00140-5","url":null,"abstract":"<div><p>LC CMOS voltage-controlled oscillators (VCOs) with tunable inductors are essential for high-performance, multi-band communication systems, such as IoT applications and 5G communication. However, VCOs that use CMOS tunable inductors have difficulty in achieving high RF performance due to the low Q-factor of the inductor. In addition, previously reported CMOS VCOs integrated with MEMS inductors have used CMOS switches for tuning frequency bands, but they also had large signal losses on the switch. Herein, we propose a CMOS VCO that is integrated with a MEMS tunable inductor that tunes the frequency band with three MEMS switches. The proposed MEMS tunable inductor enables us to achieve high RF performance due to the suspended structure, and RF MEMS switches enable lower signal loss than CMOS switches. In this work, we successfully fabricated the proposed CMOS VCO integrated with a MEMS tunable inductor using the flip-chip bonding process, and we measured oscillation frequencies according to the actuation of the three switches. The oscillation powers were measured as − 3.03 dBm @ 1.39 GHz, − 5.80 @ 1.98 GHz, − 7.44 dBm @ 2.81 GHz, and − 8.77 dBm @ 3.68 GHz.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"9 1","pages":""},"PeriodicalIF":4.7,"publicationDate":"2021-11-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-021-00140-5","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"138520594","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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