Micro and Nano Systems Letters最新文献

{"title":"Influence of electrode-sensing material contact area on MWCNT-based gas sensor performance","authors":"Min Seok Lee,&nbsp;Jin Yeoup Kim,&nbsp;Joon Hyub Kim","doi":"10.1186/s40486-026-00258-4","DOIUrl":"10.1186/s40486-026-00258-4","url":null,"abstract":"<div>\u0000 \u0000 <p>Multi-walled carbon nanotubes (MWCNTs) have emerged as promising sensing materials due to their advantages such as room-temperature operation, durability, large-area coating capability, and tunable electrical properties. While considerable research has focused on surface modification of CNTs, the influence of the contact area between the sensing material and the electrode has largely been overlooked. In this study, we systematically investigated the effect of contact area on the sensing performance of MWCNT-based ammonia gas sensors. Sensors with different contact areas were fabricated, and the resistance changes under ammonia gas exposure were measured. The results showed that the response characteristics increased sharply up to a contact area of 10 mm², followed by a gradual saturation trend. Analysis of the response rate per unit area revealed that the most efficient contact area was around 14 mm². This behavior can be attributed to the percolation threshold effect, which induces a steep resistance change at very small contact areas, and the dominance of parallel resistance behavior at larger areas, leading to a gradual decrease in slope.</p>\u0000 </div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00258-4.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147738720","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Airborne molecular contaminants sensors for high-yield and high-quality semiconductor manufacturing","authors":"Bum Shik Kim,&nbsp;Gi Baek Nam,&nbsp;Ho Won Jang","doi":"10.1186/s40486-026-00257-5","DOIUrl":"10.1186/s40486-026-00257-5","url":null,"abstract":"<div>\u0000 \u0000 <p>As semiconductor processes scale down to sub-10 nm nodes, airborne molecular contaminants (AMCs) have become critical factors affecting product yield and quality. Conventional analytical techniques face limitations in implementing real-time, multi-point monitoring across increasingly large cleanroom facilities due to high costs and spatial constraints. As an alternative, chemoresistive gas sensors have gained significant attention owing to their high sensitivity, cost-effective design, and facile electronic integration. This review highlights the impact of AMCs on device performance in semiconductor manufacturing environments and systematically summarizes the latest sensing strategies for each AMC group, including acidic, basic, and other species, such as volatile organic compounds (VOCs). By integrating research on chemoresistive sensors in environmental monitoring and safety applications, it also presents comprehensive strategies for developing high-performance sensors applicable to the semiconductor industry. Finally, the review discusses both the potential and the remaining technical challenges of implementing real-time AMC monitoring systems in future semiconductor manufacturing environments.</p>\u0000 </div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00257-5.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147606705","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Nanomaterial-enhanced sensors for trace heavy metal ion detection: a review of electrochemical and optical methods","authors":"Rafita Erli Adhawiyah,&nbsp;Jungchul Lee","doi":"10.1186/s40486-026-00256-6","DOIUrl":"10.1186/s40486-026-00256-6","url":null,"abstract":"<div><p>Heavy metal ions (HMIs), such as mercury (Hg), lead (Pb), cadmium (Cd), arsenic (As), and chromium (Cr), are a serious environmental issue due to their toxicity, bioaccumulation, and long-term persistence, making it necessary to develop sensitive and selective detection technologies. Laboratory-based methods, such as atomic absorption spectroscopy, provide high accuracy, but their point-of-need deployment is limited by their reliance on large equipment and complicated sample preparation. This review highlights the critical role of nanomaterial in sensing platforms in overcoming these limitations and advancements across electrochemical and optical detection techniques. The integration of nanomaterials-including carbon-based, metallic-based, silicon-based, and quantum dots-is shown to significantly enhance sensor performance through increased surface area, electron transfer efficiency, and plasmonic effects. Despite this progress, challenges such as matrix interference, ensuring signal reproducibility, and developing scalable fabrication methods remain. Future research will focus on developing hybrid, multiplexed, and antifouling sensor architectures integrated with digital technologies like the Internet of Things (IoT) to realize next-generation, ultra-sensitive HMIs monitoring platforms.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-02-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00256-6.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147339344","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Cost effective micromanufacturing with low power lasers: a review","authors":"S. Niranjana,&nbsp;Murukeshan Vadakke Matham,&nbsp;C. S. Suchand Sandeep","doi":"10.1186/s40486-025-00253-1","DOIUrl":"10.1186/s40486-025-00253-1","url":null,"abstract":"<div><p>Laser micromanufacturing is an emerging technique that holds significant implications in a variety of sectors, including biomedical engineering, additive manufacturing, sensors, industrial manufacturing, and microfabrication technologies. The key advantage is the precision as well as efficiency it provides when creating micro and nanostructures, which are becoming more and more important for modern-day applications. As laser microfabrication enables maskless processing, it lowers setup times and costs. It offers an easier alternative to fabricate complicated geometries and conduct rapid prototyping compared to conventional photolithography techniques. Several research works have been reported in this field in the last two decades. However, a major limitation of many of these research works is the fact that they use expensive laser sources such as ultrafast femtosecond lasers. Though femtosecond lasers provide several advantages, it is often not a cost effective method for micromanufacturing. In contrast, low power laser micromanufacturing platforms offer several economic advantages from an industrial point of view such as minimized capital investment, low maintenance costs, and sustainable production due to reduced energy consumption. In this review, we specifically examine cost effective, low power laser micromanufacturing techniques, recent advancements in this field, and future perspectives.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-02-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00253-1.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147337381","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Reliability evaluation of MEMS scanning mirrors with an embedded mirror-monitoring sensor under external random vibrations","authors":"Dohyeon Jeong,&nbsp;Myeongseop Kim,&nbsp;Wonsang Jo,&nbsp;Jong-Hyun Lee","doi":"10.1186/s40486-026-00255-7","DOIUrl":"10.1186/s40486-026-00255-7","url":null,"abstract":"<div>\u0000 \u0000 <p>We propose a quantitative metric, the Index of Vibration Influence (<i>IVI</i>), to assess how external random vibrations affect resonant MEMS scanning mirrors that embed a mirror-angle sensor. The setup excites the mirror with PSD-specified random profiles while the mirror is driven near its resonant frequency. The <i>IVI</i>_<i>o</i>, which quantifies vibration‑induced scan‑angle perturbations, is defined at the operating frequency (<i>f</i>_<i>o</i>), as the ratio of the mirror-angle spectra influenced by external vibration to those without random vibration. We validate the linearity error of the embedded sensor as small as 1.25% compared with an external PSM. Using the validated sensor, <i>IVI</i>_<i>o</i> was evaluated at − 45 dB, corresponding to 0.17° angle perturbations at 30.18° OSA, when random vibration was applied at an acceleration level 30% higher in RMS than the IEC 62,498‑3 requirement.</p>\u0000 </div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-02-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00255-7.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147337384","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"SERS-enabled nanomaterials for PFAS detection: a review toward smart and sustainable micro/nano sensing systems","authors":"Thi Sinh Vo,&nbsp;Tran Thi Bich Chau Vo,&nbsp;Kyunghoon Kim","doi":"10.1186/s40486-025-00254-0","DOIUrl":"10.1186/s40486-025-00254-0","url":null,"abstract":"<div><p>Per- and polyfluoroalkyl substances (PFAS) are persistent organic pollutants whose remarkable chemical stability and bioaccumulative nature pose significant environmental and health concerns. Conventional analytical techniques such as liquid and gas chromatography–mass spectrometry (LC-MS and GC-MS) offer excellent sensitivity and specificity but remain costly, labor-intensive, and unsuitable for rapid field deployment. Surface-enhanced Raman spectroscopy (SERS) has recently emerged as a promising micro/nano-enabled technology for real-time, label-free, and ultrasensitive detection of PFAS in aqueous systems. This mini-review provides a critical overview of current advances in nanostructured SERS platforms, emphasizing the mechanisms of PFAS–surface interactions, rational design of metallic and hybrid substrates, and progress toward miniaturized and microfluidic detection schemes. Persistent challenges, including limited adsorption affinity, spectral interference, and substrate reproducibility, are analyzed alongside emerging strategies such as surface functionalization, hierarchical nano-structuring, and data-driven spectral interpretation. Finally, future perspectives highlight the integration of SERS with machine learning and scalable fabrication to enable portable, field-deployable environmental sensors. Therefore, the review underscores the potential of SERS as a next-generation analytical tool for sustainable PFAS monitoring and environmental protection.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00254-0.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146016133","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Performance and sensitivity analysis of dielectric engineered GAA-JL MOSFET for chloroform gas detection","authors":"Abhinav Gupta,&nbsp;Akanksha Gupta,&nbsp;Suman Lata Tripathi,&nbsp;Manish Kumar Rai","doi":"10.1186/s40486-025-00249-x","DOIUrl":"10.1186/s40486-025-00249-x","url":null,"abstract":"<div><p>This paper demonstrates a simulation-based analysis of highly sensitive gas sensor design to detect the Chloroform gas based on an advanced Gate All Around Junctionless MOSFET (GAA-JLMOS). In this design, traditional polysilicon gate is replaced with Iridium-Rhodium/Palladium nano-composite (Ir-Rh/Pd) which is responsible for a linear shift in gate work-function in presence of chloroform gas. The work-function modification results into the changes in drain current (I_d) and threshold voltage (V_th), showing a reliable detection from no gas to 50 ppm CHCl₃concentrations by MOS sensor. Additionally, the subthreshold swing optimization leads to faster switching and response times. The simulation results showa significant improvement in the sensitivity of proposed sensor compared to conventional MOS based designs. This manuscript proposes better selectivity towards the detection of chloroform vapors compared to the existing MOS based gas sensors. The simulation results meet a 2x times increase in threshold voltage and 100x times reduction in the leakage current from no gas to 50 ppm concentration of CHCl₃. The proposed GAA-JLMOS shows high sensitivity, low leakage current, and enhanced scalability, providing a possible pathway toward next-generation nanoscale gas sensors. An ATLAS 3D TCAD simulator is used for the sensor design and simulations.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-12-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00249-x.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145831329","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Water-based triboelectric nanogenerators: a review","authors":"Karthikeyan Munirathinam,&nbsp;Arunkumar Shanmugasundaram,&nbsp;Dong-Weon Lee","doi":"10.1186/s40486-025-00252-2","DOIUrl":"10.1186/s40486-025-00252-2","url":null,"abstract":"<div><p>Water-based triboelectric nanogenerators (TENGs) have recently attracted attention as promising solutions for distributed micro energy harvesting. These devices provide a way to provide sustainable power to low-power electronics and self-driving sensors by converting the kinetic energy of water droplets, flowing water, and sea waves into electricity through contact electrification and electrostatic induction. This review provides a comprehensive overview of recent progress focused on the working mechanisms, structural design, and performance improvements in various water environments of water-based TENGs. Key mechanisms such as bulk-effect water droplet-based electricity generation and electrode ground capacitance are summarized. Finally, we discuss current challenges and prospects for scalable and durable self-driving systems, along with their potential applications in environmental monitoring, wearable electronics, and marine sensing.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-12-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00252-2.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145831373","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Low-cost domestic microwave synthesis of SnO2/CuO nanostructure for ethanol detection","authors":"Pitchanunt Chaiyo,&nbsp;Mohamed Ahmed Belal,&nbsp;Sugato Hajra,&nbsp;Swati Panda,&nbsp;Premkumar Sharad Bhosale,&nbsp;Hohyun Keum,&nbsp;Hoe Joon Kim","doi":"10.1186/s40486-025-00247-z","DOIUrl":"10.1186/s40486-025-00247-z","url":null,"abstract":"<div><p>Low-cost preparation of nanostructured materials is one of the important factors for the commercialization of sensors. This study reports the sustainable and low-cost synthesis of pure SnO₂ and SnO₂-CuO nanostructures using a domestic microwave annealing approach. The material obtained was structurally examined using X-ray diffraction and a scanning electron microscope. The pure SnO₂ and SnO₂-CuO inks were deposited over laser-induced graphene interdigitated electrodes. Towards the volatile organic compounds, the pure SnO₂ and SnO₂-CuO went through ethanol sensing. The SnO₂-CuO-based sensor demonstrated strong response and selectivity for detecting ethanol at room temperature with a response of 11%, a response time of 53 s, and a recovery time of 64 s at 100 ppm of ethanol. The high response and selectivity of the sensor towards ethanol make it ideal for continuous tracking in both environmental and industrial settings.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-12-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00247-z.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145831371","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Energy harvesting and storage in an optical Micro-Electro-Mechanical System based on a wireless actuation","authors":"Abi Sejaan Georgina,&nbsp; El Hakim Wiaam,&nbsp; Al Hajjar Hani,&nbsp; El Hajj Nemr,&nbsp;Lamarque Frédéric,&nbsp; El Assad Joseph","doi":"10.1186/s40486-025-00251-3","DOIUrl":"10.1186/s40486-025-00251-3","url":null,"abstract":"<div><p>This paper presents the design and performance evaluation of an optical energy harvesting system for a wireless actuated micro-electro-mechanical system (MEMS) The latter consists of an antagonistic double beam and two active shape memory alloy elements (SMA: <span>(:{3*1*0.1:mm}^{3})</span>) responsible for actuating the beams among the two stable positions, when heated by a laser diode. The research focuses on harvesting the unused laser energy using a vertical multi-junction photovoltaic cell (PV cell: <span>(:{3*3*0.4:mm}^{3})</span>). To extract the maximum efficiency, the energy harvesting system is optimized by homogenizing the laser beam using an N-BK7 light pipe homogenizing rod. The uniformity test is validated experimentally by using an optoelectronic system able to move along the output and measure the power on different zone of the surface; resulting a percentage of uniformity ( across a surface of <span>(:3.5*3:{mm}^{2})</span>, with a standard deviation of ± 3%. The Current/Voltage (IV) curve of the PV cell is extracted under direct illumination of irradiance of 0.93 <span>(:{W/cm}^{2})</span>, resulting a maximum power of 25.2 mW with a fill factor of 84%. To enhance energy utilization, a MEMS active mirror is being introduced to the system to steer the pseudo-uniform laser rays onto the SMA elements alternately (period = 5 s). The IV curve of the PV cell for each position is extracted resulting a fill factor of 92.3% for position 1 and 93% for position 2. While cycling, the unused energy from the laser is being captured by the PV cell resulting to harvest <span>(:37.4:mJ)</span> for the first cycle. This cycle is repeated 50 times to calculate the cumulative amount of energy harvested then 300 times to charge 90% of the capacity of a solid-state thin film micro-battery with initial state of charge (SOC) of 48%. Finally, the decrease in the efficiency of the PV cell is calculated after introducing the bistable beams resulting in a drop of 5%. This research introduces an advances approach to energy harvesting for MEMS, offering valuable insights into efficiency optimization and potential applications in autonomous systems.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"13 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2025-12-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00251-3.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145831151","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}