Micro and Nano Systems Letters最新文献

{"title":"Highly stretchable multimodal sensor with split-line structural design for adaptive robotic grippers","authors":"Chan Hwa Hong,&nbsp;Sae Rom Seo,&nbsp;Min-Seok Kim,&nbsp;Young Kyu Hong,&nbsp;Min Hyung Kang,&nbsp;Hye Jin Kim","doi":"10.1186/s40486-026-00263-7","DOIUrl":"10.1186/s40486-026-00263-7","url":null,"abstract":"<div><p>A large-area multimodal sensor device integrating pressure, temperature, humidity, proximity, and bending sensors was developed on a stretchable and flexible substrate. The substrate combines rigid polyimide with a soft elastomer to enhance stretchability, achieving up to 127% elongation through split-line structural designs that effectively relieve stress concentration. After 1,000 stretch-release cycles at 30% strain, resistance variation remained below 0.48%, confirming excellent mechanical durability. The pressure sensors exhibited high sensitivities of 27.5 kPa⁻¹ (8-channel array) and 9.2 kPa⁻¹ (18-channel array) across a wide pressure range, demonstrating suitability for robotic gripper applications. The central sensing units accurately measured bending (R² = 0.998), environmental parameters, and object distance with verified functionality. Overall, the device exhibits robust, reliable, and highly stretchable multimodal sensing performance, offering strong potential for advanced robotic manipulation and environmental monitoring applications.</p><h3>Graphical Abstract</h3><div><figure><div><div><picture><source><img></source></picture></div></div></figure></div></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":8.0,"publicationDate":"2026-07-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00263-7.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148614130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Machine learning-assisted design acceleration framework for energy absorbing re-entrant honeycomb auxetic structures","authors":"Geonho Choi,&nbsp;Donghyun Lee,&nbsp;Minyoung Kim,&nbsp;Jungwook Choi","doi":"10.1186/s40486-026-00262-8","DOIUrl":"10.1186/s40486-026-00262-8","url":null,"abstract":"<div><p>The demand for lightweight energy-absorbing structures has rapidly increased. Auxetic structures, such as re-entrant honeycombs, exhibit negative Poisson’s ratio behavior and high impact stability; however, their compressive response is highly nonlinear and sensitive to geometric parameters, making them computationally expensive and design inefficient. In this study, we present an end-to-end machine learning design acceleration framework for a quasi-2D re-entrant honeycomb that integrates PyAnsys Geometry and PyMechanical. The proposed framework employs automated geometry generation and finite element analysis (FEA) to build a dataset (<i>n</i> = 40) for interpretable surrogate modeling and covariance matrix adaptation evolution strategy optimization. Experimental validation was conducted using printed digital light processing specimens. An ensemble surrogate model (combining polynomial regression and gradient boosting regression) achieved the best 5-fold cross-validated performance (R² = 0.729). Surrogate-based optimization yielded an optimal design that increased energy absorption density (EAD) in refined-mesh FEA by 63.6% relative to a baseline design (EAD: 90.015 to 147.304 kJ/m³). Also, compression tests confirm enhance in pre-fracture energy absorption. Evaluated under a strain limit of ε = 0.15 (due to premature fracture of the optimized specimen), EAD increased by 83.96% relative to a baseline design (EAD: 37.96 to 69.83 kJ/m³). The proposed framework provides a validated method for accelerating the optimization of porous structures under nonlinear responses.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":8.0,"publicationDate":"2026-07-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00262-8.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148465808","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microengineering glass substrates: techniques and applications","authors":"Trong Dang Huu,&nbsp;Truong Thi Kim Tuoi,&nbsp;Ravi Pratap Singh,&nbsp;Ngoc Dang Khoa Tran,&nbsp;Vien Quoc Nguyen,&nbsp;Thach Hong Pham,&nbsp;Julfekar Arab,&nbsp;Gaurav Kumar,&nbsp;Khairul Fadzli Samat,&nbsp;Jun Hieng Kiat,&nbsp;Nguyen Van Toan,&nbsp;Takahito Ono","doi":"10.1186/s40486-026-00261-9","DOIUrl":"10.1186/s40486-026-00261-9","url":null,"abstract":"<div><p>The rapid advancement of Micro-Electro-Mechanical Systems (MEMS) and microfluidic technologies has established glass as an indispensable substrate material, effectively overcoming the limitations of traditional silicon in applications requiring high optical transparency, chemical inertness, and superior electrical insulation. However, the amorphous network structure and inherent brittleness of glass pose significant barriers to the high-precision fabrication of deep microstructures. This review provides a systematic and rigorous overview of contemporary subtractive microengineering techniques. Fabrication methods are systematically categorized into five primary groups: mechanical (micro-grinding, sandblasting, and ultrasonic machining), thermal (reflow, microwave, and laser ablation), chemical/electrochemical (wet etching and electrochemical discharge machining), plasma-based (Reactive Ion Etching), and hybrid strategies such as Laser and Ultrasonic Assisted Electrochemical Discharge Machining. We analyze the critical relationships between material properties and removal mechanisms, emphasizing the brittle-to-ductile transition in mechanical machining and the pivotal role of gas film stabilization in discharge-based processes. Through representative demonstrations of chip-level hermetic packaging, through-glass via (TGV) arrays, and high-resolution bio-analytical platforms, this paper highlights the transformative role of microengineered glass in enhancing device performance and reliability. Finally, the core challenges regarding precision-throughput-cost trade-offs and emerging trends are discussed to provide a foundational roadmap for next-generation glass-based microsystems. This review offers a comprehensive framework for navigating the selection and innovation of glass materials and fabrication strategies, ensuring application-oriented precision and throughput for advanced MEMS and microfluidic platforms.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":8.0,"publicationDate":"2026-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00261-9.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148465551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Immobilized microalgae-driven triboelectric nanogenerators for sustainable bioelectricity production","authors":"Kushal Ruthvik Kaja,&nbsp;Chalampol Janpum,&nbsp;Tanakit Komkhum,&nbsp;Sugato Hajra,&nbsp;Venkateswaran Vivekananthan,&nbsp;Naratip Vittayakorn,&nbsp;Kamon Thinsurat,&nbsp;Chawalit Ngamcharussrivichai,&nbsp;Hoe Joon Kim,&nbsp;Pichaya In-na","doi":"10.1186/s40486-026-00259-3","DOIUrl":"10.1186/s40486-026-00259-3","url":null,"abstract":"<div><p>Triboelectric nanogenerators (TENG) are emerging as promising solutions for decentralised energy generation due to the growing need for sustainable power sources. These devices convert wasted mechanical energy into electricity under ambient conditions, offering advantages such as eco-friendly operation, material versatility, and effective energy scavenging. Despite these benefits, their relatively low electrical output compared to conventional sources like batteries and fuel cells remains a limitation. Microalgae have attracted attention for their ability to produce bioelectricity through photosynthesis and respiration while simultaneously capturing carbon dioxide. Immobilising microalgal cells on conductive substrates improves electron transfer and metabolic activity. In this context, living <i>Chlorella vulgaris</i> TISTR 8580 with varied cell densities was immobilised on aluminium electrodes and incorporated into a TENG platform to explore energy harvesting from solid-solid and solid-liquid interactions. The highest output of 110 V and 330 nA was generated, confirming the microalgae as a promising tribolayer and extending the conventional triboelectric series. However, sustaining cell viability over extended periods remains a challenge, highlighting the need for optimised light and nutrient conditions in future developments.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":8.0,"publicationDate":"2026-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00259-3.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148380236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Homogeneous solidification strategy for freeze-casting-assisted direct ink writing investigated by computational fluid dynamics modeling","authors":"Younghoon Son,&nbsp;Gyeongwan Lee,&nbsp;Jungwook Choi","doi":"10.1186/s40486-026-00260-w","DOIUrl":"10.1186/s40486-026-00260-w","url":null,"abstract":"<div><p>Freeze-casting-assisted direct ink writing (DIW) enables the fabrication of three-dimensional (3D) aerogel architectures with improved geometric versatility. However, multilayer deposition often produces inter-layer microstructural nonuniformity because the pre-frozen underlying layers introduce additional thermal resistance. To address this challenge, we investigated a homogeneous solidification strategy using a computational fluid dynamics (CFD) model. The framework incorporates a moving substrate boundary condition, constant-temperature thermal boundary, and interface tracking, while the nanocomposite ink properties are explicitly modeled as functions of temperature and shear rate. Using the CFD results and a custom digital image-processing algorithm, the freezing time required for the extruded filaments to fully solidify on a cold substrate is quantified. Based on the extracted freezing-time data, we determined the substrate-temperature pairs that yield identical freezing times across sequential layers. The resulting process map provides practical guidelines for mitigating layer-to-layer thermal variations and enables the reliable printing of aerogels with uniform inter-layer microstructures.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00260-w.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148237121","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Influence of electrode-sensing material contact area on MWCNT-based gas sensor performance","authors":"Min Seok Lee,&nbsp;Jin Yeoup Kim,&nbsp;Joon Hyub Kim","doi":"10.1186/s40486-026-00258-4","DOIUrl":"10.1186/s40486-026-00258-4","url":null,"abstract":"<div>\u0000 \u0000 <p>Multi-walled carbon nanotubes (MWCNTs) have emerged as promising sensing materials due to their advantages such as room-temperature operation, durability, large-area coating capability, and tunable electrical properties. While considerable research has focused on surface modification of CNTs, the influence of the contact area between the sensing material and the electrode has largely been overlooked. In this study, we systematically investigated the effect of contact area on the sensing performance of MWCNT-based ammonia gas sensors. Sensors with different contact areas were fabricated, and the resistance changes under ammonia gas exposure were measured. The results showed that the response characteristics increased sharply up to a contact area of 10 mm², followed by a gradual saturation trend. Analysis of the response rate per unit area revealed that the most efficient contact area was around 14 mm². This behavior can be attributed to the percolation threshold effect, which induces a steep resistance change at very small contact areas, and the dominance of parallel resistance behavior at larger areas, leading to a gradual decrease in slope.</p>\u0000 </div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00258-4.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147738720","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Airborne molecular contaminants sensors for high-yield and high-quality semiconductor manufacturing","authors":"Bum Shik Kim,&nbsp;Gi Baek Nam,&nbsp;Ho Won Jang","doi":"10.1186/s40486-026-00257-5","DOIUrl":"10.1186/s40486-026-00257-5","url":null,"abstract":"<div>\u0000 \u0000 <p>As semiconductor processes scale down to sub-10 nm nodes, airborne molecular contaminants (AMCs) have become critical factors affecting product yield and quality. Conventional analytical techniques face limitations in implementing real-time, multi-point monitoring across increasingly large cleanroom facilities due to high costs and spatial constraints. As an alternative, chemoresistive gas sensors have gained significant attention owing to their high sensitivity, cost-effective design, and facile electronic integration. This review highlights the impact of AMCs on device performance in semiconductor manufacturing environments and systematically summarizes the latest sensing strategies for each AMC group, including acidic, basic, and other species, such as volatile organic compounds (VOCs). By integrating research on chemoresistive sensors in environmental monitoring and safety applications, it also presents comprehensive strategies for developing high-performance sensors applicable to the semiconductor industry. Finally, the review discusses both the potential and the remaining technical challenges of implementing real-time AMC monitoring systems in future semiconductor manufacturing environments.</p>\u0000 </div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00257-5.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147606705","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Nanomaterial-enhanced sensors for trace heavy metal ion detection: a review of electrochemical and optical methods","authors":"Rafita Erli Adhawiyah,&nbsp;Jungchul Lee","doi":"10.1186/s40486-026-00256-6","DOIUrl":"10.1186/s40486-026-00256-6","url":null,"abstract":"<div><p>Heavy metal ions (HMIs), such as mercury (Hg), lead (Pb), cadmium (Cd), arsenic (As), and chromium (Cr), are a serious environmental issue due to their toxicity, bioaccumulation, and long-term persistence, making it necessary to develop sensitive and selective detection technologies. Laboratory-based methods, such as atomic absorption spectroscopy, provide high accuracy, but their point-of-need deployment is limited by their reliance on large equipment and complicated sample preparation. This review highlights the critical role of nanomaterial in sensing platforms in overcoming these limitations and advancements across electrochemical and optical detection techniques. The integration of nanomaterials-including carbon-based, metallic-based, silicon-based, and quantum dots-is shown to significantly enhance sensor performance through increased surface area, electron transfer efficiency, and plasmonic effects. Despite this progress, challenges such as matrix interference, ensuring signal reproducibility, and developing scalable fabrication methods remain. Future research will focus on developing hybrid, multiplexed, and antifouling sensor architectures integrated with digital technologies like the Internet of Things (IoT) to realize next-generation, ultra-sensitive HMIs monitoring platforms.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-02-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00256-6.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147339344","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Cost effective micromanufacturing with low power lasers: a review","authors":"S. Niranjana,&nbsp;Murukeshan Vadakke Matham,&nbsp;C. S. Suchand Sandeep","doi":"10.1186/s40486-025-00253-1","DOIUrl":"10.1186/s40486-025-00253-1","url":null,"abstract":"<div><p>Laser micromanufacturing is an emerging technique that holds significant implications in a variety of sectors, including biomedical engineering, additive manufacturing, sensors, industrial manufacturing, and microfabrication technologies. The key advantage is the precision as well as efficiency it provides when creating micro and nanostructures, which are becoming more and more important for modern-day applications. As laser microfabrication enables maskless processing, it lowers setup times and costs. It offers an easier alternative to fabricate complicated geometries and conduct rapid prototyping compared to conventional photolithography techniques. Several research works have been reported in this field in the last two decades. However, a major limitation of many of these research works is the fact that they use expensive laser sources such as ultrafast femtosecond lasers. Though femtosecond lasers provide several advantages, it is often not a cost effective method for micromanufacturing. In contrast, low power laser micromanufacturing platforms offer several economic advantages from an industrial point of view such as minimized capital investment, low maintenance costs, and sustainable production due to reduced energy consumption. In this review, we specifically examine cost effective, low power laser micromanufacturing techniques, recent advancements in this field, and future perspectives.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-02-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-025-00253-1.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147337381","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Reliability evaluation of MEMS scanning mirrors with an embedded mirror-monitoring sensor under external random vibrations","authors":"Dohyeon Jeong,&nbsp;Myeongseop Kim,&nbsp;Wonsang Jo,&nbsp;Jong-Hyun Lee","doi":"10.1186/s40486-026-00255-7","DOIUrl":"10.1186/s40486-026-00255-7","url":null,"abstract":"<div>\u0000 \u0000 <p>We propose a quantitative metric, the Index of Vibration Influence (<i>IVI</i>), to assess how external random vibrations affect resonant MEMS scanning mirrors that embed a mirror-angle sensor. The setup excites the mirror with PSD-specified random profiles while the mirror is driven near its resonant frequency. The <i>IVI</i>_<i>o</i>, which quantifies vibration‑induced scan‑angle perturbations, is defined at the operating frequency (<i>f</i>_<i>o</i>), as the ratio of the mirror-angle spectra influenced by external vibration to those without random vibration. We validate the linearity error of the embedded sensor as small as 1.25% compared with an external PSM. Using the validated sensor, <i>IVI</i>_<i>o</i> was evaluated at − 45 dB, corresponding to 0.17° angle perturbations at 30.18° OSA, when random vibration was applied at an acceleration level 30% higher in RMS than the IEC 62,498‑3 requirement.</p>\u0000 </div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"14 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-02-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s40486-026-00255-7.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147337384","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}