2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)最新文献_第4页

Design and Fabrication of LAMB Wave Resonator Based on 15% Scandium-Doped Aluminum Nitride Thin Film 15%掺钪氮化铝薄膜LAMB波谐振器的设计与制造

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495603

Shuai Shao, Zhifang Luo, Tao Wu

{"title":"Design and Fabrication of LAMB Wave Resonator Based on 15% Scandium-Doped Aluminum Nitride Thin Film","authors":"Shuai Shao, Zhifang Luo, Tao Wu","doi":"10.1109/Transducers50396.2021.9495603","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495603","url":null,"abstract":"This work reports the Lamb wave resonator based on 15% Sc-doped (Al<inf>0.85</inf>Sc<inf>0.15</inf>N) thin films using magnetron co-sputtering. The dispersion characteristics of Lamb wave resonators are simulated for Al<inf>0.85</inf>Sc<inf>0.15</inf>N. The dispersion properties of Lamb waves on the coupling coefficient in Al<inf>0.85</inf>Sc<inf>0.15</inf>N thin films were simulated. An electromechanical coupling factor of nearly 4% can be obtained for S0 mode Lamb wave resonators. Optimized design using 3D finite element analysis (FEA) with perfectly matched layer (PML) to improve quality factor. The resonator fabrication process is discussed in detail. Al<inf>0.85</inf>Sc<inf>0.15</inf>N thin films with a 1.7° FWHM of (0002) rocking curve were obtained. Al<inf>0.85</inf>Sc<inf>0.15</inf>N Lamb wave resonators operating at approximately 310 MHz were fabricated. A high electromechanical coupling coefficient (k<inf>t</inf><sup>2</sup>) of 3.7 % is reported, with the loaded quality factor of 1165.7 and unloaded quality factor of 1253.2, respectively.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"14 1","pages":"1371-1374"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90179295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Flexible Piezoelectric and Piezoresistive Mechanisms Coupled Sensor for Highly Dynamic and Static Collaborative Detection 柔性压电与压阻机构耦合传感器的高动静态协同检测

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495395

Lijun Lu, Guosheng Hu, Yang Huang, Jingquan Liu, Bin Yang

引用次数: 0

Automotive Semiconductors in the Case Era Case时代的汽车半导体

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495539

N. Kawahara

引用次数: 0

Contactless Endpoint Detection of Gold Etching Using Quartz-Based Capacitive Detector 基于石英电容检测器的非接触式金蚀刻端点检测

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495749

Takuro Okuwaki, Takaaki Haino, M. Sohgawa, Takashi Abe

引用次数: 0

Single-Chip Dual-Band Filters Based on Spurious-Free Dual-Resonance Sc0.15Al0.85N Laterally Coupled Alternating Thickness (LCAT) Mode Resonators 基于无杂散双共振Sc0.15Al0.85N横向耦合交变厚度(LCAT)模式谐振器的单片双带滤波器

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495480

Chen Liu, Yao Zhu, Nan Wang, Bangtao Chen

{"title":"Single-Chip Dual-Band Filters Based on Spurious-Free Dual-Resonance Sc0.15Al0.85N Laterally Coupled Alternating Thickness (LCAT) Mode Resonators","authors":"Chen Liu, Yao Zhu, Nan Wang, Bangtao Chen","doi":"10.1109/Transducers50396.2021.9495480","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495480","url":null,"abstract":"Single-chip dual-band radio-frequency (RF) MEMS filters, as well as their constituting dual-resonance modified laterally coupled alternating thickness (LCAT) mode resonators based on Sc0.15Al0.85N are demonstrated. The dependence of the resonant frequency ($f_{s}$), the effective coupling coefficient (${k^{2}}_{eff}$) and the quality factor ($Q_{a}$) of both modes on the electrode pitches of the modified LCAT mode resonators are analyzed, and measurement results show that ${k^{2}}_{eff}$ and $Q_{a}$ of both modes can achieve over 5% and 700, respectively, with optimized pitch. The dual-band filter is designed to consist of modified LCAT resonators with 2 different pitches to achieve the low band around 3.3 GHz and high band over 4 GHz on a single chip. The measured bandwidths of the dual-band filter are 66 MHz and 33 MHz, respectively. The performance of the dual-band filter indicates that the presented resonators and filters are promising for the carrier aggregation (CA) technology in 5G applications.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"38 1","pages":"309-312"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87217877","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

High Throughput Size Controlled Microdroplet Generation 高通量尺寸控制微滴生成

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495486

S. Shoji, D. Yoon, D. Tanaka, T. Sekiguchi

引用次数: 0

Using Advanced 2D Materials to Closely Mimic Vestibular Hair Cell Sensors 使用先进的二维材料紧密模拟前庭毛细胞传感器

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495755

S. A. Moshizi, Shohreh Azadi, Andrew Belford, Shuying Wu, Z. J. Han, M. Asadnia

引用次数: 2

Double-Coffee Ring Nanoplasmonic Effects with Convolutional Neural Learning for Sars-Cov-2 Detection 基于卷积神经学习的双咖啡环纳米等离子体效应检测Sars-Cov-2

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495602

Kamyar Behrouzi, Liwei Lin

{"title":"Double-Coffee Ring Nanoplasmonic Effects with Convolutional Neural Learning for Sars-Cov-2 Detection","authors":"Kamyar Behrouzi, Liwei Lin","doi":"10.1109/Transducers50396.2021.9495602","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495602","url":null,"abstract":"We develop a sensing method based on the double-coffee ring phenomenon for the first time using localized surface plasmon resonance (LSPR) effect in gold nanoparticles (GNPs) to detect SARS-CoV-2 Nucleocapsid proteins with high sensitivity. Testing images are further analyzed via the convolutional neural learning for enhanced accuracy. The circular-shape hydrophilic PTFE porous membrane with a hydrophobic ring barrier is utilized as the sensing platform. When the virus proteins are interacting with antibody coated GNPs solution on the platform, a double-coffee ring image is observed and the convolutional neural network helps the differentiation for the first small protein-GNPs ring at the center and a second non-specific ring at the hydrophobic barrier. We use this double-coffee ring to detect viral infection and quantify the concentration of COVID-19 viruses in 5 ng/ml (LOD), similar to Abbott BinaxNOW® testing kit, to 1000 ng/ml. As such this detection scheme could open up a new class of biomolecular research in the field of micro/nano fluidics.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"19 1","pages":"381-384"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90927839","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Fabrication and Characterization of Evaporated ZINC Anodes for Small-Scale ZINC-Air Batteries 小型锌-空气电池用蒸发锌阳极的制备与表征

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495470

V. Venkatesh, Qi Yang, Jingwen Zhang, J. Pikul, M. Allen

{"title":"Fabrication and Characterization of Evaporated ZINC Anodes for Small-Scale ZINC-Air Batteries","authors":"V. Venkatesh, Qi Yang, Jingwen Zhang, J. Pikul, M. Allen","doi":"10.1109/Transducers50396.2021.9495470","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495470","url":null,"abstract":"Miniaturization of modern devices, including the advent of highly distributed Internet of Things nodes, has created a need for miniaturization in energy systems. Air batteries can be an attractive power source for such small-scale devices. This paper investigates fabrication of thin zinc anodes for zinc-air batteries using a thermal evaporation technique. Zinc anodes produced by thermal evaporation are found to be of high purity, approximately 96% dense, and smooth (roughness less than 0.1 micron). Anodes up to 8 microns in thickness are demonstrated. The structural characterization of the evaporated zinc films was performed by profilometry and scanning electron microscopy. The purity of the evaporated film was determined by the energy dispersive X-ray spectroscopy. Thin zinc anodes fabricated by evaporation exhibited utilization of 96.5% at 10 mA (5C rate) discharge. Specific capacity was 791mAh/g, approaching the theoretical limit of zinc-air batteries (820mAh/g). The anodes produced by evaporation offer the potential to fabricate high energy density thin film microbatteries.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"8 1","pages":"1134-1137"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73490444","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Real-Time in Vivo Imaging of Intra-Stem Ion Distribution Using Insertable CMOS Sensor for Plants 植物茎内离子分布的可插入式CMOS传感器实时体内成像

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495450

Kenta Sembo, Taichi Yoshida, S. Toda, T. Horio, Yasuyuki Kimura, Yong-Joon Choi, Kazuhiro Takahashi, K. Takayama, K. Sawada, T. Noda

引用次数: 2