2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)最新文献

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Corrosion Monitoring Of Sacrificial Anodes Based On Contour Plot Analysis Of Electro-Mechanical Impedance Spectra 基于机电阻抗谱等值线图分析的牺牲阳极腐蚀监测
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495493
Jeslin Thalapil, Durgesh U. Tamhane, Sauvik Banerjee, S. Tallur
{"title":"Corrosion Monitoring Of Sacrificial Anodes Based On Contour Plot Analysis Of Electro-Mechanical Impedance Spectra","authors":"Jeslin Thalapil, Durgesh U. Tamhane, Sauvik Banerjee, S. Tallur","doi":"10.1109/Transducers50396.2021.9495493","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495493","url":null,"abstract":"In this paper, we utilize a graphical technique originally proposed for damage assessment in beams, to determine the extent of corrosion of sacrificial zinc anode discs instrumented with piezoelectric transducers using Electro-Mechanical Impedance (EMI) measurements. The underlying parameters determining extent of corrosion (thicknesses of the zinc and zinc oxide films) are extracted from measured resonance frequencies of radial and transverse vibration modes by finding roots of the characteristic equations of these modes graphically through contour plot. This technique shows excellent agreement with experimental results, requires no calibration and is computationally inexpensive unlike optimization techniques.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"75 1","pages":"1182-1185"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86997675","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Bacterial Force on Nanopillars: Interaction at Single Cell 细菌对纳米柱的作用力:单细胞的相互作用
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495593
Jagriti Singh, Vaibhav Sharma, S. Chandorkar, P. Sen
{"title":"Bacterial Force on Nanopillars: Interaction at Single Cell","authors":"Jagriti Singh, Vaibhav Sharma, S. Chandorkar, P. Sen","doi":"10.1109/Transducers50396.2021.9495593","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495593","url":null,"abstract":"Despite extensive studies there are contradictory findings regarding effects of nano-topography on bacterial adherence and viability. Here, we report that bacteria have ability to locate nearest pillars, enabling itself to expand and attach, and pulling these pillars towards itself. Two types of nanopillars, namely, Straight pillars (SP) and Conical pillars (CP) were used to investigate the behavior of bacterial cell on surface nano topographies. We calculated that the force applied by the bacteria on these pillars is in the order of few hundred nano-newtons, and most importantly, the magnitude of the applied force depends on the pillar dimensions. Straight pillars are bent significantly compared to sharp-tipped conical pillars, suggesting higher overall mechanical stress in/throughout the bacterial membrane on straight pillars, leading to membrane rupture and ultimately cell death. In the case of bacterial membrane on conical pillars, severe localized stress generated in the membrane, near the regions where pillars contacted the membrane due to small cross-section of conical pillars, pierces the membrane (no bending of pillars) which causes cell death.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"73 1","pages":"1040-1043"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85744866","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Enhanced Formaldehyde Sensing Performance Based on SnO2 Nanosheets/Titanium Carbide (MXene) Composites 基于SnO2纳米片/碳化钛(MXene)复合材料的甲醛传感性能增强
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495402
Gaoqiang Niu, R. Ramachandran, Changhui Zhao, Fei Wang
{"title":"Enhanced Formaldehyde Sensing Performance Based on SnO2 Nanosheets/Titanium Carbide (MXene) Composites","authors":"Gaoqiang Niu, R. Ramachandran, Changhui Zhao, Fei Wang","doi":"10.1109/Transducers50396.2021.9495402","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495402","url":null,"abstract":"SnO<inf>2</inf>/MXene composites were synthesized by a facile hydrothermal method, where the SnO<inf>2</inf> nanosheets grew evenly on the surface of MXene flakes. Compared with the pure SnO<inf>2</inf>, the 5% MXene-SnO<inf>2</inf> based sensor displayed optimal formaldehyde sensing performance at a lower operating temperature of 160 °C. Furthermore, the sensor with 5% MXene-SnO<inf>2</inf> also showed high response, good selectivity, excellent reproducibility, and a good linearity over the concentration of 1–100 ppm.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"94 1","pages":"831-834"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83899660","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An L-Shaped 2-Dimensional Particle Velocity Sensor l型二维粒子速度传感器
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495596
Zhezheng Zhu, Lingmeng Yang, Wenhan Chang, Chengchen Gao, Y. Hao, Zhenchuan Yang
{"title":"An L-Shaped 2-Dimensional Particle Velocity Sensor","authors":"Zhezheng Zhu, Lingmeng Yang, Wenhan Chang, Chengchen Gao, Y. Hao, Zhenchuan Yang","doi":"10.1109/Transducers50396.2021.9495596","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495596","url":null,"abstract":"An L-shaped two-dimensional acoustic particle velocity sensor (APVS), which has integrated two best performing one-dimensional APVS on a single chip is presented. This structure keeps the two sensitive axes exactly orthogonal to each other, avoiding the alignment error. There are no silicon substrate blocking in both sensitive directions, so the flow directions nearby the wires have little differences. As a result, the two axes have equal sensitivity, thus requiring no correction. The measured velocity sensitivity at 1 kHz is 2.53 dB V/Pa, with relative direction sensitivity of 28 dB. Since the total size of the chip is only 4.4 × 4.4 mm, it can detect the 2-D particle velocity at one point.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"34 1","pages":"1255-1258"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82722386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An Energy Harvesting Scheme with Temperature Threshold Triggered Generation for Heat Event Autonomous Monitoring 基于温度阈值触发的热事件自主监测能量收集方案
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495484
Ruofeng Han, Nianying Wang, Qisheng He, Jiachou Wang, Xinxin Li
{"title":"An Energy Harvesting Scheme with Temperature Threshold Triggered Generation for Heat Event Autonomous Monitoring","authors":"Ruofeng Han, Nianying Wang, Qisheng He, Jiachou Wang, Xinxin Li","doi":"10.1109/Transducers50396.2021.9495484","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495484","url":null,"abstract":"This paper proposes a temperature threshold triggered energy harvesting scheme for potential monitoring thermal event. The demonstrated prototype comprises a generation cantilever and a bimetallic cantilever that magnetically attract together. When the structure is heated to a pre-set temperature threshold, heat absorption induced bimetallic effect of the bimetallic cantilever will cause sufficiently bend of the generation cantilever to get rid of the magnetic attraction and vibrate freely to generate electricity. After the heat in the bimetallic cantilever is dissipated, the two cantilevers attract together again to return to the original state. Under continual heating, the temperature threshold triggered cycle is repeated to intermittently generate electricity. In this paper, the temperature threshold of the harvester is modeled, and the harvester prototype is fabricated. When triggered at 71°C, the harvester is tested to generate Vpp of 1.14 V and power of 1.077 µW within one cycle.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"21 1","pages":"459-462"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82812201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability 演示36 ppt频率稳定性的硅MEMS磁盘谐振振荡器
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495722
Madan Parajuli, G. Sobreviela, Hemin Zhang, A. Seshia
{"title":"A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability","authors":"Madan Parajuli, G. Sobreviela, Hemin Zhang, A. Seshia","doi":"10.1109/Transducers50396.2021.9495722","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495722","url":null,"abstract":"This paper reports experimental results demonstrating excellent short-term frequency stability of 45.6 µLHz (36 ppt@0.4 s integration time) for a bulk acoustic wave (BAW) silicon disk resonator oscillator. The n=4 radial mode of a BAW disk resonator demonstrates an extremely high-quality factor of 1.8*106 at 1.25 MHz. The disk is designed with anchors aligned with nodal locations to minimize anchor damping. The results on the measured short-term frequency stability reported here benchmark favourably relative to the state-of-the-art.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"129 1","pages":"305-308"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82924594","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Metalized Soft Polymers for Electromechanical Transducers on Glass Substrates 玻璃基板机电换能器用金属化软聚合物
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495385
Boshen Liang, G. Keulemans, Dominika Wys o cka, Lei Zhang, V. Rochus, T. Stakenborg, P. Heremans, D. Cheyns
{"title":"Metalized Soft Polymers for Electromechanical Transducers on Glass Substrates","authors":"Boshen Liang, G. Keulemans, Dominika Wys o cka, Lei Zhang, V. Rochus, T. Stakenborg, P. Heremans, D. Cheyns","doi":"10.1109/Transducers50396.2021.9495385","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495385","url":null,"abstract":"In this study, two different semiconductor-grade polymers are utilized to build up membrane-based electromechanical transducers. With three to four orders of magnitude lower modulus in comparison with silicon, the use of polymers as the vibrating membrane improves the mechanical output characteristics where larger vibration amplitude is needed. Novel processing methods, including an excimer laser-aided wafer-to-water transferring technique, have been developed for the introduction of polymers into the standard cleanroom fabrication environment. Both piezoelectric and electrostatic transducers are fabricated on glass substrates and then characterized with laser dropper velocimetry. Comparison is made to exemplify the advantages and disadvantages of using polymers with varied dynamic specifications for different applications, where the compromise between fabrication robustness and device performance is needed.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"35 1","pages":"623-626"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90951059","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Lung Cancer On Chip for Testing Immunotherapy 用于检测免疫治疗的肺癌芯片
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495530
Han-Jung Liao, Jean-An Chieh, Yu-Chen Chen, Kang-Yun Lee, Y. Chan, S. Ho, Wei-Lun Sun, Yu-Shiuan Wang, Wan-Chen Huang, Wei-Chiao Chang, Cheng-Hsien Liu
{"title":"Lung Cancer On Chip for Testing Immunotherapy","authors":"Han-Jung Liao, Jean-An Chieh, Yu-Chen Chen, Kang-Yun Lee, Y. Chan, S. Ho, Wei-Lun Sun, Yu-Shiuan Wang, Wan-Chen Huang, Wei-Chiao Chang, Cheng-Hsien Liu","doi":"10.1109/Transducers50396.2021.9495530","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495530","url":null,"abstract":"Immunotherapy is a cancer therapy by enhancing T cell activity. Immune checkpoint, like PD-1/PD-L1, is a key mechanism to regulate T cell activity. The drugs for disrupting the PD-1-PD-L1 interaction are the present promising cancer therapy strategy. Current immunotherapy results in clinical trials show significant improvement in the survival rate in melanoma and lung cancer. However, Due to the high price of immunotherapy reagents, it is challenging to use preclinical experiments to find the appropriate drug dosage. Therefore, here we developed a microfluidic device combined with the following features. The first is highly biocompatible porous photo-initiated cross-linked hydrogel (GelMA) as a 3D culture model to mimic tumor tissue environment. The second is the peripheral channels to stimulate the immune cell environment in blood vessels. The third is the concentration gradient generator to achieve high-throughput multiple drug concentration testing. The results verified that cells could survive in GelMA, and the T cells could infiltrate into GelMA containing cancer cells. Furthermore, this Labchip can simultaneously detect the effects of three doses of drug counterparts on immune cells.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"873 ","pages":"1032-1035"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91461268","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Highly Deformable and Stable Gas Sensor Based on Anti-Drying Ionic Organohydrogel for O2 Gas Detection 基于抗干燥离子有机水凝胶的高变形稳定气体传感器用于O2气体检测
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495705
Yuanqing Lin, Zixuan Wu, Yaoming Wei, Yuning Liang, Kankan Zhai, K. Tao, Chunwei Li, Xi Xie, Jin Wu
{"title":"Highly Deformable and Stable Gas Sensor Based on Anti-Drying Ionic Organohydrogel for O2 Gas Detection","authors":"Yuanqing Lin, Zixuan Wu, Yaoming Wei, Yuning Liang, Kankan Zhai, K. Tao, Chunwei Li, Xi Xie, Jin Wu","doi":"10.1109/Transducers50396.2021.9495705","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495705","url":null,"abstract":"This paper presented a novel method to prepare organohydrogel-based stretchable O2 sensor with high performance, including good linearity, anti-drying property, low limit of detection (LOD) and long-term stability. A facile solvent replacement approach was devised to partially exchange water with xylitol molecules, generating the stable organohydrogel. Compared with gas sensor based on pristine hydrogel, this organohydrogel-based sensor displayed high water retention, leading to the prolonged life time (>30 days) therefore. In addition, LOD was lowered by 2.45 times to 0.56 ppm. Furthermore, the sensing mechanism was investigated, revealing an electrochemical reaction mechanism occurred at the electrode-hydrogel interface. This work provided a facile method for enhancing the performance of hydrogel-based gas sensor.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"20 1","pages":"799-802"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84900514","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Untethered Soft Crawling Robots Driven by Magnetic Anisotropy 磁各向异性驱动的无系绳软爬行机器人
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495674
Fanping Sui, Dongkai Wang, Ruiqi Guo, Renxiao Xu, Liwei Lin
{"title":"Untethered Soft Crawling Robots Driven by Magnetic Anisotropy","authors":"Fanping Sui, Dongkai Wang, Ruiqi Guo, Renxiao Xu, Liwei Lin","doi":"10.1109/Transducers50396.2021.9495674","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495674","url":null,"abstract":"We herein present a soft crawling robot based on the design of the magnetic anisotropic actuation to realize untethered crawling movements. With the self-assembled iron filing mesh tuned magnetically and sealed in silicone rubber matrix, we are able to fabricate a large quantity of crawling robots in parallel by a molding process. The magnetic anisotropy is established in the body of the robot to induce the magnetic actuation. Under an alternating magnetic field near the resonant frequency of the robot, the legs of the robot can bend and release repeatedly to achieve a forward moving velocity of ~0.19 cm/s at 2.5 Hz and 46 mT. In addition, the soft crawling robot is robust enough such that even crushed by a 1.8-ton automobile, it can still be fully functional. We envision the magnetic soft robot design and working principle can be further studied for the advancements of micro-robotics research.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"1 1","pages":"361-364"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89164409","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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