{"title":"用于按钮能量收集器的全聚合物软x射线充电压电体","authors":"Jia Lu, Yuji Suzuki","doi":"10.1109/Transducers50396.2021.9495733","DOIUrl":null,"url":null,"abstract":"Piezoelectret using space-charged porous polymers attracts much attention due to its high piezoelectric coefficient. In the present study, a novel all-polymer soft-X-ray-charged multilayer piezoelectret is proposed for push-button energy harvesting. The prototype is microfabricated using a parylene-C structural layer with patterned gap-control protrusions, dip-coated PEDOT:PSS electrode, and a dip-coated polymer electret layer. With the current prototype, up to 24.6 µJ electrical energy has been obtained with a single pushing force of only 1.3 N, corresponding to a record-high piezoelectric coefficient d33 of 105 nC/N, 30 times higher than conventional MEMS-based piezoelectrets.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"55 1","pages":"920-923"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"All-Polymer Soft-X-Ray-Charged Piezoelectret for Push-Button Energy Harvester\",\"authors\":\"Jia Lu, Yuji Suzuki\",\"doi\":\"10.1109/Transducers50396.2021.9495733\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Piezoelectret using space-charged porous polymers attracts much attention due to its high piezoelectric coefficient. In the present study, a novel all-polymer soft-X-ray-charged multilayer piezoelectret is proposed for push-button energy harvesting. The prototype is microfabricated using a parylene-C structural layer with patterned gap-control protrusions, dip-coated PEDOT:PSS electrode, and a dip-coated polymer electret layer. With the current prototype, up to 24.6 µJ electrical energy has been obtained with a single pushing force of only 1.3 N, corresponding to a record-high piezoelectric coefficient d33 of 105 nC/N, 30 times higher than conventional MEMS-based piezoelectrets.\",\"PeriodicalId\":6814,\"journal\":{\"name\":\"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)\",\"volume\":\"55 1\",\"pages\":\"920-923\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-06-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/Transducers50396.2021.9495733\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/Transducers50396.2021.9495733","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
All-Polymer Soft-X-Ray-Charged Piezoelectret for Push-Button Energy Harvester
Piezoelectret using space-charged porous polymers attracts much attention due to its high piezoelectric coefficient. In the present study, a novel all-polymer soft-X-ray-charged multilayer piezoelectret is proposed for push-button energy harvesting. The prototype is microfabricated using a parylene-C structural layer with patterned gap-control protrusions, dip-coated PEDOT:PSS electrode, and a dip-coated polymer electret layer. With the current prototype, up to 24.6 µJ electrical energy has been obtained with a single pushing force of only 1.3 N, corresponding to a record-high piezoelectric coefficient d33 of 105 nC/N, 30 times higher than conventional MEMS-based piezoelectrets.