基于MEMS热线传感器芯片的小型声粒子速度梯度传感器

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI:10.1109/Transducers50396.2021.9495574

Lingmeng Yang, Zhezheng Zhu, Wenhan Chang, Fanrui Meng, Chengchen Gao, Y. Hao, Zhenchuan Yang

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引用次数: 2

摘要

提出了一种基于两个MEMS热线声粒子速度传感器(APVS)芯片的紧凑超定向粒子速度梯度(PVG)传感器。直接测量声场二阶方向性的能力使PVG传感器比目前使用的声矢量传感器或传声器阵列更具竞争力，而紧凑的设计可以拓宽其工作频率。当APVS间距为3.6mm时，测量到的方向图在5 kHz范围内均为余弦平方形状，证明了直接获取二阶方向性的可行性。该传感器可以单片集成，进一步缩短速度传感器的间距，并在高频率和窄空间定向声传感应用中更具竞争力。

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A Compact Acoustic Particle Velocity Gradient Sensor Based on MEMS Hot-Wire Sensor Chips

A compact and superdirective particle velocity gradient (PVG) sensor based on two MEMS hot-wire acoustic particle velocity sensor (APVS) chips is proposed. The capability of directly measurement of second-order directionality of acoustic field makes the PVG sensors are more competitive than currently used acoustic vector sensors or microphone arrays, while the compact design can broaden their working frequency. With the APVS spacing of 3.6mm, the measured directional patterns are all cosine squared shape up to 5 kHz, which demonstrated the feasibility for directly acquirement of second-ordered directionality. The sensor could be monolithic integrated to further shorten the spacing of velocity sensors, and to be more competitive for high-sound-frequency and narrow-space directional acoustic sensing applications.

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来源期刊

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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