2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)最新文献_第9页

A Glass-Like Carbon MEMS Strain Sensor 一种类玻璃碳MEMS应变传感器

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495726

Jongmoon Jang, Giulia Panusa, G. Boero, J. Brugger

引用次数: 0

Pyroelectrically Rechargeable Electret for Continuous Vibration Energy Harvester 用于连续振动能量采集器的热释电可充电驻极体

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495485

Pedro González-Losada, F. Alves, M. Martins, Stephen Mundy, R. Dias, K. Vinayakumar

{"title":"Pyroelectrically Rechargeable Electret for Continuous Vibration Energy Harvester","authors":"Pedro González-Losada, F. Alves, M. Martins, Stephen Mundy, R. Dias, K. Vinayakumar","doi":"10.1109/Transducers50396.2021.9495485","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495485","url":null,"abstract":"In this manuscript, the first pyroelectric-based rechargeable electret for continuous energy harvester is reported. The proposed pyroelectric-based electret preparation provides two main advantages 1) Wafer-scale electret production with uniform surface charge density and 2) On-chip rechargeable option for the electret-based energy harvesters and sensors. Pyroelectrically generated surface charges are transferred to the dielectric material placed in contact with the polarized surface of the pyroelectric crystal. A 5 mm thick lithium niobate crystal is used as a pyroelectric material with a temperature gradient of 2.3°C/sec. A Teflon dielectric is used as an electret material with a surface area of 1 cm2 and thickness of $75mu m$. Obtained results from the pyroelectrically prepared electret showed a surface potential of ∼540V with a charging efficiency of 8.9% from the pyroelectric surface potential of 6060V. Obtained results were in good agreement with repeatability and charge stability for >15 days. Our preliminary experiment of energy harvester showed an average power of $1.29mu W$ at 4Hz.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"25 1","pages":"928-931"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80179032","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

An Energy Harvesting Scheme with Temperature Threshold Triggered Generation for Heat Event Autonomous Monitoring 基于温度阈值触发的热事件自主监测能量收集方案

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495484

Ruofeng Han, Nianying Wang, Qisheng He, Jiachou Wang, Xinxin Li

{"title":"An Energy Harvesting Scheme with Temperature Threshold Triggered Generation for Heat Event Autonomous Monitoring","authors":"Ruofeng Han, Nianying Wang, Qisheng He, Jiachou Wang, Xinxin Li","doi":"10.1109/Transducers50396.2021.9495484","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495484","url":null,"abstract":"This paper proposes a temperature threshold triggered energy harvesting scheme for potential monitoring thermal event. The demonstrated prototype comprises a generation cantilever and a bimetallic cantilever that magnetically attract together. When the structure is heated to a pre-set temperature threshold, heat absorption induced bimetallic effect of the bimetallic cantilever will cause sufficiently bend of the generation cantilever to get rid of the magnetic attraction and vibrate freely to generate electricity. After the heat in the bimetallic cantilever is dissipated, the two cantilevers attract together again to return to the original state. Under continual heating, the temperature threshold triggered cycle is repeated to intermittently generate electricity. In this paper, the temperature threshold of the harvester is modeled, and the harvester prototype is fabricated. When triggered at 71°C, the harvester is tested to generate Vpp of 1.14 V and power of 1.077 µW within one cycle.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"21 1","pages":"459-462"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82812201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability 演示36 ppt频率稳定性的硅MEMS磁盘谐振振荡器

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495722

Madan Parajuli, G. Sobreviela, Hemin Zhang, A. Seshia

引用次数: 1

Nanogenerators and Self-Powered Microdevices Applied to Wireless Electrical Stimulation at Cell Level 纳米发电机和自供电微设备应用于细胞水平的无线电刺激

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495419

G. Murillo

引用次数: 0

An L-Shaped 2-Dimensional Particle Velocity Sensor l型二维粒子速度传感器

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495596

Zhezheng Zhu, Lingmeng Yang, Wenhan Chang, Chengchen Gao, Y. Hao, Zhenchuan Yang

引用次数: 1

Heterogeneous LiNbO3/Si Direct Bonding for Wavelength-Dependent Mid-Infrared Imaging 非均相LiNbO3/Si直接键合用于波长相关的中红外成像

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495511

Jikai Xu, Zhihao Ren, Xinmiao Liu, Cheng Xu, Chenxi Wang, Yanhong Tian, Chengkuo Lee

{"title":"Heterogeneous LiNbO3/Si Direct Bonding for Wavelength-Dependent Mid-Infrared Imaging","authors":"Jikai Xu, Zhihao Ren, Xinmiao Liu, Cheng Xu, Chenxi Wang, Yanhong Tian, Chengkuo Lee","doi":"10.1109/Transducers50396.2021.9495511","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495511","url":null,"abstract":"Lithium niobate (LiNbO3) is one of the most important multifunctional materials, which possesses excellent electro-optic and piezoelectric properties, as well as high transmittance in the mid-infrared (mid-IR) wavelength range. In this work, we developed a wet sequential plasma activated method for the heterogeneous direct bonding of single-crystal LiNbO3 and Si with a nanometer-scale (∼6.4 nm) interface. Both surface and interface characterizations are used for the exploration of the bonding mechanism. For the first time, atomic structures of the LiNbO3/Si direct bonding interface have been disclosed. Leveraging this direct bonding method, we creatively integrate the metasurface into the LiNbO3-based nanofluidics for wavelength-dependent imaging. Because of the accurate nanogap control between the nanoantenna and metal reflector, the quadrupole resonance can be well excited. Therefore, the mid-IR imaging with ultrahigh contrast has been achieved in the wavelength of $2.68 mu mathrm{m}, 3.16 mu mathrm{m}$, and $3.61 mumathrm{m}$. Moreover, since the hot spots are completely exposed in the nanochamber, which can be filled with various types of liquids. More images can be designed and presented based on the light-matter interaction and changes of refractive index. Therefore, this hybrid LiNbO3-based nanofluidics has great potential in the applications of switchable optical devices and information encryption.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"120 1","pages":"585-588"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87793171","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Bacterial Force on Nanopillars: Interaction at Single Cell 细菌对纳米柱的作用力:单细胞的相互作用

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495593

Jagriti Singh, Vaibhav Sharma, S. Chandorkar, P. Sen

{"title":"Bacterial Force on Nanopillars: Interaction at Single Cell","authors":"Jagriti Singh, Vaibhav Sharma, S. Chandorkar, P. Sen","doi":"10.1109/Transducers50396.2021.9495593","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495593","url":null,"abstract":"Despite extensive studies there are contradictory findings regarding effects of nano-topography on bacterial adherence and viability. Here, we report that bacteria have ability to locate nearest pillars, enabling itself to expand and attach, and pulling these pillars towards itself. Two types of nanopillars, namely, Straight pillars (SP) and Conical pillars (CP) were used to investigate the behavior of bacterial cell on surface nano topographies. We calculated that the force applied by the bacteria on these pillars is in the order of few hundred nano-newtons, and most importantly, the magnitude of the applied force depends on the pillar dimensions. Straight pillars are bent significantly compared to sharp-tipped conical pillars, suggesting higher overall mechanical stress in/throughout the bacterial membrane on straight pillars, leading to membrane rupture and ultimately cell death. In the case of bacterial membrane on conical pillars, severe localized stress generated in the membrane, near the regions where pillars contacted the membrane due to small cross-section of conical pillars, pierces the membrane (no bending of pillars) which causes cell death.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"73 1","pages":"1040-1043"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85744866","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Development of a Thermo-Computing Platform 热计算平台的开发

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495663

V. Shirmohammadli, B. Bahreyni

{"title":"Development of a Thermo-Computing Platform","authors":"V. Shirmohammadli, B. Bahreyni","doi":"10.1109/Transducers50396.2021.9495663","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495663","url":null,"abstract":"There is an increasing demand for the recognition of context from sensor data. This is presently achieved through running complicated statistical signal processing algorithms with significant computing and memory requirements. In order to reduce the complexity and power requirements, unconventional computing platforms are being considered, which rely on the responses of the materials or devices instead of digitizing information and processing them. Herein, for the first time to the best of our knowledge, we propose a thermo-computing platform, which can shift much of the complex computations to the sensors. The proposed platform employs an entirely passive network of thermistors for processing temporal data. We present results that confirm the capability of the thermo-computer in processing data. A thermo-computer was then used for processing benchmark data, and its results are compared against algorithmic programming. The proposed platform, in addition to its use as a thermal computer, can lay the foundation for the development of cognizant sensor that utilize thermistor-like devices, such as MOX multi-gas sensors.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"141 1","pages":"1307-1310"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89216987","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Biofunctional and Self-Contractable Silk-Based Sensing Threads 生物功能和自收缩丝绸传感线

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495408

Yating Xie, Keyin Liu, T. Tao

引用次数: 0