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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)最新文献

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Micro Swimming Robots Powered by a Single-Axis Alternating Magnetic Field with Controllable Manipulation 可控单轴交变磁场驱动的微型游泳机器人
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495441
Fanping Sui, Yuanyuan Huang, Ruiqi Guo, Liwei Lin
{"title":"Micro Swimming Robots Powered by a Single-Axis Alternating Magnetic Field with Controllable Manipulation","authors":"Fanping Sui, Yuanyuan Huang, Ruiqi Guo, Liwei Lin","doi":"10.1109/Transducers50396.2021.9495441","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495441","url":null,"abstract":"We herein demonstrate micro swimming robots powered by a single-axis magnetic system with controllable mobility and stability. Five distinctive advancements have been achieved: (1) using a single-axis alternating magnetic field to remotely power propeller-style micro swimming robots; (2) controllable moving speed as well as direction for the swimming structure by regulating magnetic field magnitude, frequency, and direction; (3) ultrafast moving speed of 19.1 body length per second under a magnetic field of 1.5 mT; (4) several underwater maneuvering demos including upwards, downwards and stationary motions and movements towards a target location to carry out basic tasks; and (5) attitude stability achieved by the effect of center of pressure over center of mass.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"32 1","pages":"357-360"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88279098","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
An Ear-Inspired Sound Pressure Amplification Structure for Fabry-Perot Acoustic Sensor 一种用于Fabry-Perot声传感器的耳式声压放大结构
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495434
Xi Xiao, Cheng Li, Shangchun Fan, Xuefeng Song
{"title":"An Ear-Inspired Sound Pressure Amplification Structure for Fabry-Perot Acoustic Sensor","authors":"Xi Xiao, Cheng Li, Shangchun Fan, Xuefeng Song","doi":"10.1109/Transducers50396.2021.9495434","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495434","url":null,"abstract":"In this paper, inspired by the ossicular chain in human middle ear, a miniature sound pressure amplification structure (SPAS) based on double $10 mu mathrm{m}$-thickness E-shaped steel diaphragms with the corresponding diameters of 15 mm and 3 mm was developed to enhance the sensitivity of diaphragm-type Fabry-Perot (F-P) acoustic sensor. FEM simulation demonstrated the availability of the SPAS in terms of the achieved acoustic field response within a certain frequency range. Then acoustic test showed that the F-P acoustic sensor using a silver diaphragm, adapted with the developed SPAS, achieved a remarkable sensitivity amplification ratio of up to ∼7.6 in the range of 1.5∼2.1 kHz, which can be further widened by optimizing structure dimensions and membrane materials.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"88 1","pages":"1174-1177"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88398805","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Magnetically-Coupled Micromachined Electrostatic Energy Harvester Driven by Eye Blinking Motion 眨眼运动驱动的磁耦合微机械静电能量采集器
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495499
E. Pourshaban, M. Karkhanis, A. Deshpande, A. Banerjee, C. Ghosh, Hanseup Kim, C. Mastrangelo
{"title":"A Magnetically-Coupled Micromachined Electrostatic Energy Harvester Driven by Eye Blinking Motion","authors":"E. Pourshaban, M. Karkhanis, A. Deshpande, A. Banerjee, C. Ghosh, Hanseup Kim, C. Mastrangelo","doi":"10.1109/Transducers50396.2021.9495499","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495499","url":null,"abstract":"We present the fabrication and experimental results of a magnetically coupled body motion electrostatic energy harvester chip suitable for a smart contact lens application. The device is designed to be driven by the lateral motion of the eye blinking without any physical contact with the eyelid. The $4times 3 text{mm}^{2}$ harvester generates 486.54 nJ and $6.09 mu mathrm{J}$ of energy per blink and average power of 194.6 nW and $2.44 mu mathrm{W}$ when pre-charged at 3.18 V and 6.27 V, respectively when driven at typical blinking velocity conditions.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"9 1","pages":"960-963"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88834769","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Development of Weighing Systems with Improved Dynamic Range Using High-Resolution Resonant MEMS Strain Sensors 采用高分辨率谐振MEMS应变传感器开发具有改进动态范围的称重系统
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495570
L. Belsito, M. Ferri, L. Masini, A. Roncaglia
{"title":"Development of Weighing Systems with Improved Dynamic Range Using High-Resolution Resonant MEMS Strain Sensors","authors":"L. Belsito, M. Ferri, L. Masini, A. Roncaglia","doi":"10.1109/Transducers50396.2021.9495570","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495570","url":null,"abstract":"The application of high-resolution MEMS strain sensors based on micromechanical resonators fabricated with wafer-level vacuum packaging to the construction of large dynamic range weighing systems is explored. Resonant sensors with sub-nano strain resolution are adopted to build a load cell prototype using a standard aluminum structure normally utilized in commercial weighing systems. A differential strain measurement configuration is implemented with two sensors oriented at 90° between them and fabricated on the same chip for temperature compensation. The load cell equipped with the resonant MEMS sensors shows an excellent dynamic range of 108 dB, effective temperature compensation and good weight measurement reproducibility.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"52 1","pages":"1331-1334"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77270123","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An Integrated Microfluidic Platform for Detecting BRCA1/BRCA2 Gene Mutation and Risk Assessment of Ovarian Cancer BRCA1/BRCA2基因突变检测及卵巢癌风险评估的集成微流控平台
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495503
Yuen Cheng, Chih-Hung Wang, K. Hsu, Gwo-Bin Lee
{"title":"An Integrated Microfluidic Platform for Detecting BRCA1/BRCA2 Gene Mutation and Risk Assessment of Ovarian Cancer","authors":"Yuen Cheng, Chih-Hung Wang, K. Hsu, Gwo-Bin Lee","doi":"10.1109/Transducers50396.2021.9495503","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495503","url":null,"abstract":"Ovarian cancer is known as a “silent killer” for women because it is difficult to be diagnosed at early stages. The five-year survival rate of early-stage ovarian cancer is 92%, but at the late stages, drops to only 17%. Several tools have been used for ovarian cancer screening; however, the outcome is still not satisfactory. Therefore, there is a great need to develop a new method to screen ovarian cancer precisely. Recently, BRCA1/2 gene mutations were confirmed to be highly associate with the occurrence of ovarian cancer. Patients with these gene mutations are risky of developing it in their lifetime. Liquid biopsy such as cell-free DNA (cfDNA) is an emerging non-invasive technology that brings information about tumors from the blood. Previous studies have found BRCA1/2 gene mutations in cfDNA could serve a potential tool for the screening and risk assessment of ovarian cancer. Therefore, an integrated microfluidic system was developed in this work to extract cfDNA from patients' plasma and BRCA1/2 gene mutations were verified automatically, which can provide clinicians a convenient way for risk assessment.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"69 1","pages":"1024-1027"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91278227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
In-House Fabrication of Solenoid Inductor and Multilayer Metal Core Using 3D Printing, Selective Electroless Plating, Electroplating, and Pressing 内部制造电磁电感和多层金属芯使用3D打印，选择性化学镀，电镀和压制
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495524
Jun Ying Tan, A. Ahmed, J. Kim
{"title":"In-House Fabrication of Solenoid Inductor and Multilayer Metal Core Using 3D Printing, Selective Electroless Plating, Electroplating, and Pressing","authors":"Jun Ying Tan, A. Ahmed, J. Kim","doi":"10.1109/Transducers50396.2021.9495524","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495524","url":null,"abstract":"This paper presents a simple in-house fabrication of a solenoid inductor using 3D printing, selective electroless plating, and electroplating for the inductor, and pressing for a highly laminated metal core. The frame of the solenoid inductor was 3D printed, where the design of the frame has a solenoid trench and ridge for wiring and insulator, respectively. The ridge of the frame was selectively coated with a novolac resin by dipping and rolling. The unique selective electroless plating showed the direct patterning to form a solenoid conductive path that came from the different surface activation. Electroplating to thicken the solenoid wire completes the inductor fabrication. A pressing and stacking of a nickel film form the highly laminated magnetic core for the inductor. A 10-turn solenoid inductor with a wire thickness of was successfully fabricated. An average inductance of 133 nH was measured in air-core condition. A 120 nickel layer cores were integrated into the inductor and showed the boosted inductance of 252 nH. The proposed simple fabrication has a great potential for various RF passive 3D devices including antennas, filters, and waveguides.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"28 1","pages":"1379-1382"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87110480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design, Modeling and Validation of a Flexible Strain Sensor Based on Moire Patterns and Image Processing 基于云纹图案和图像处理的柔性应变传感器的设计、建模和验证
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495456
Xiaoke Ding, L. Que
{"title":"Design, Modeling and Validation of a Flexible Strain Sensor Based on Moire Patterns and Image Processing","authors":"Xiaoke Ding, L. Que","doi":"10.1109/Transducers50396.2021.9495456","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495456","url":null,"abstract":"This paper reports a new flexible strain sensor using the moiré pattern as the transducing signal, which can be used to map the strain/stress on a planar surface or a curved surface. Different from our previously reported flexible strain sensor based on the nanopore thin film, which uses the reflected optical signal as the transducing signal. This type of strain sensor has the following unique features: one grating (G1) is fabricated on a flexible substrate, the other grating (G2), which has a slightly different pitch, is simply stored in a computer. Images of G1 under different strains/stresses are taken using a smartphone camera. Then moiré patterns are formed by superimposing the images of the two gratings (G1 and G2) in a computer. Finally, the strain/stress is determined by feature extraction of the moiré patterns using image processing.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"11 1","pages":"1303-1306"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78660402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fine Patterning on 3D Sample with Curvature and Depth Using Resist Sheet with Latent Image 利用具有隐影的抗蚀片对具有曲率和深度的三维样品进行精细图像化
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495743
Takayuki Kuroyanagi, Shigenori Saito, M. Sasaki
{"title":"Fine Patterning on 3D Sample with Curvature and Depth Using Resist Sheet with Latent Image","authors":"Takayuki Kuroyanagi, Shigenori Saito, M. Sasaki","doi":"10.1109/Transducers50396.2021.9495743","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495743","url":null,"abstract":"A new patterning technique for applying the photolithography to the 3D sample is described. A sheet is newly introduced. This sheet has water-soluble polymer of polyvinyl alcohol. On this the photoresist can be spin-coated and patterned using the standard resist spin-coater and the mask aligner. The photoresist with the latent image is pasted on 3D samples. By patterning the resist film before pasting, the limit of Fresnel diffraction can be solved enabling the patterning at the close distance with the photomask. The fine patterns are demonstrated both on convex and concave samples.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"23 1","pages":"521-524"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85566737","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nonlinear Wind Energy Harvesting Based on Mechanical Synchronous Switch Harvesting on Inductor 基于电感器机械同步开关采集的非线性风能采集
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495514
Mayue Shi, A. Holmes, E. Yeatman
{"title":"Nonlinear Wind Energy Harvesting Based on Mechanical Synchronous Switch Harvesting on Inductor","authors":"Mayue Shi, A. Holmes, E. Yeatman","doi":"10.1109/Transducers50396.2021.9495514","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495514","url":null,"abstract":"We present for the first time a miniature flexible galloping piezoelectric energy harvester that combines a nonlinear aeroelastic energy harvesting structure with an energy extraction circuit employing mechanical synchronous switch harvesting on inductor (mechanical SSHI). Extra stoppers protect the harvester from overload at high wind speed, thus extending the highest working speed from 10 m/s to 13.5 m/s based on wind tunnel tests. The conductive contact on the bluff body and the conductive stoppers further forms a mechanical synchronous switch, used in the SSHI circuit for energy extraction. The maximum power enhancement reaches 221% compared to the design without SSHI, at a low wind speed of 3.6 m/s.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"56 1","pages":"964-967"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85942555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Nanogenerators and Self-Powered Microdevices Applied to Wireless Electrical Stimulation at Cell Level 纳米发电机和自供电微设备应用于细胞水平的无线电刺激
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495419
G. Murillo
{"title":"Nanogenerators and Self-Powered Microdevices Applied to Wireless Electrical Stimulation at Cell Level","authors":"G. Murillo","doi":"10.1109/Transducers50396.2021.9495419","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495419","url":null,"abstract":"An overview on nanogenerators and energy harvesting systems applied to electrical stimulation of electroactive cells is introduced in this paper. We have already demonstrated the use of ZnO nanostructures and other piezoelectric materials to stimulate osteoblast-like and muscle cells, by means of the local modulation of their membrane potentials with submicron spatial resolution. This stimulation improved proliferation and accelerated differentiation, and seem to be a great tool for the future bioelectronic nanomedicines. Our research is now focused on the development of biocompatible microdevices that integrate smart materials for wireless stimulation of excitable cells, by means of ultrasound or electromagnetic signals.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"45 1","pages":"97-100"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81244408","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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