演示36 ppt频率稳定性的硅MEMS磁盘谐振振荡器

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI:10.1109/Transducers50396.2021.9495722

Madan Parajuli, G. Sobreviela, Hemin Zhang, A. Seshia

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引用次数: 1

摘要

本文报告的实验结果表明，体声波(BAW)硅盘谐振振荡器具有良好的短期频率稳定性，为45.6 μ LHz (36 ppt@0.4 s积分时间)。BAW圆盘谐振器的n=4径向模式在1.25 MHz下具有1.8*106的高质量因数。该盘的锚锚设计与节点位置对齐，以最大限度地减少锚锚阻尼。这里报告的测量短期频率稳定性的结果相对于最先进的基准来说是有利的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability

This paper reports experimental results demonstrating excellent short-term frequency stability of 45.6 µLHz (36 ppt@0.4 s integration time) for a bulk acoustic wave (BAW) silicon disk resonator oscillator. The n=4 radial mode of a BAW disk resonator demonstrates an extremely high-quality factor of 1.8*106 at 1.25 MHz. The disk is designed with anchors aligned with nodal locations to minimize anchor damping. The results on the measured short-term frequency stability reported here benchmark favourably relative to the state-of-the-art.

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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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