2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)最新文献_第5页

Acoustic Structural Coupling In A Silicon Based Vibrating Mesh Nebulizer 硅基振动网状雾化器的声结构耦合

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495473

R. Houlihan, M. Timothy, Conor Duffy, R. Macloughlin, O. Olszewski

{"title":"Acoustic Structural Coupling In A Silicon Based Vibrating Mesh Nebulizer","authors":"R. Houlihan, M. Timothy, Conor Duffy, R. Macloughlin, O. Olszewski","doi":"10.1109/Transducers50396.2021.9495473","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495473","url":null,"abstract":"We present results from a vibrating mesh nebulizer for which the mesh is a micro-machined silicon membrane perforated with up to a thousand micron-sized, pyramidal holes. Finite element modelling is used to better understand the measured results of the nebulizer when tested in the dry state as well as when loaded with a liquid. In particular, we found that the frequency response of the system is well represented by the superposition of the frequency response of its two main subcomponents: the piezo driving unit and the silicon membrane. As such, the system is found to have resonance peaks for which the complete assembly flexes in addition to peaks that correspond to the flexural resonance modes of the silicon membrane on its own. Similarly, finite element modelling was used to understand differences observed between the frequency response measured on the nebulizer in the dry condition compared to its wet or liquid loaded operation. It was found that coupling between the structural and the acoustic domains shifts the resonance peaks significantly to the left of the frequency plot. In fact, it was found that at the operating frequency of the nebulizer, the system resonates in a (0,3) when the membrane is loaded with a liquid compared with a (0,2) resonance mode when it is operating in the dry state.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"24 1","pages":"615-618"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78210100","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Classification of White Blood Cells Based on Cell Diameter, Specific Membrane Capacitance and Cytoplasmic Conductivity Leveraging Microfluidic Constriction Channel 基于细胞直径、比膜电容和利用微流体收缩通道的细胞质电导率的白细胞分类

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495490

Huiwen Tan, Minruihong Wang, Yi Zhang, Xukun Huang, Deyong Chen, Min-Hsien Wu, Junbo Wang, Jian Chen

{"title":"Classification of White Blood Cells Based on Cell Diameter, Specific Membrane Capacitance and Cytoplasmic Conductivity Leveraging Microfluidic Constriction Channel","authors":"Huiwen Tan, Minruihong Wang, Yi Zhang, Xukun Huang, Deyong Chen, Min-Hsien Wu, Junbo Wang, Jian Chen","doi":"10.1109/Transducers50396.2021.9495490","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495490","url":null,"abstract":"This paper reports the classification of white blood cells based on cell diameter D<inf>c</inf>, specific membrane capacitance C<inf>sm</inf> and cytoplasmic conductivity <tex>$sigma_{text{cy}}$</tex> leveraging a double T-type constriction channel based microfluidic platform. As a demonstration, D<inf>c</inf>, C<inf>sm</inf> and <tex>$sigma_{text{cy}}$</tex> of granulocytes (<tex>$mathrm{n}_{text{cell}}=683$</tex>), monocytes (<tex>$mathrm{n}_{text{cell}}=203$</tex>) and lymphocytes (<tex>$mathrm{n}_{text{cell}}=856$</tex>) were quantified as <tex>$9.23pm 0.60$</tex> vs. <tex>$9.40pm 0.54$</tex> vs. <tex>$6.64pm 0.41 mu mathrm{m}, 1.22pm 0.20$</tex> vs. <tex>$1.55pm 0.40$</tex> vs. <tex>$1.54pm 0.27 mu mathrm{F}/text{cm}^{2}, 0.35pm 0.06$</tex> vs. <tex>$0.53pm 0.06$</tex> vs. <tex>$0.46 pm 0.06 mathrm{S}/mathrm{m}$</tex>. Successful classification rates of white blood cells were quantified as 71.6% (D<inf>c</inf>), 60.4% (C<inf>sm</inf>), 73.6% (<tex>$sigma_{text{cy}}$</tex>) and 95.2% (D<inf>c</inf> & C<inf>sm</inf> & <tex>$sigma_{text{cy}}$</tex>).","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"11 1","pages":"1028-1031"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78363937","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Plasmonic-Enhanced Floating Electrode Optoelectronic Tweezers (FEOET) for Effective Optical Droplet Manipulation 等离子体增强浮动电极光电镊子(FEOET)用于有效的光学液滴操作

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495660

Si Kuan Thio, Sungwoo Bae, Y. Koh, Sung-Yang Park

{"title":"Plasmonic-Enhanced Floating Electrode Optoelectronic Tweezers (FEOET) for Effective Optical Droplet Manipulation","authors":"Si Kuan Thio, Sungwoo Bae, Y. Koh, Sung-Yang Park","doi":"10.1109/Transducers50396.2021.9495660","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495660","url":null,"abstract":"A plasmonic-enhanced floating electrode optoelectronic tweezers (FEOET) device is presented for effective optical droplet manipulation. Due to the importance of having a high-quality photoconductive layer, conventional FEOET devices face the issue between ineffective dielectrophoretic (DEP) performance and cost-ineffective fabrication. In this study, the use of metallic nanoparticles enables plasmonic light scattering to significantly enhance light absorption onto a photoconductive layer of the device, resulting in a largely improved DEP performance. Two numerical simulation studies have demonstrated the working principle of plasmonic-enhanced DEP and were further validated experimentally by an improved spectrophotometric light absorbance of the TiOPc layer, as well as demonstrating an 11-fold increase in light-actuated droplet speed. With much-improved DEP performance, this plasmonic-enhanced FEOET technology can provide a low-cost solution for various digital microfluidic (DMF) applications with the benefits of device simplicity.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"112 1","pages":"1016-1019"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75029516","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Modelling and Experimental Validation of Piezoelectrically Driven Micro-Lens Actuator 压电驱动微透镜作动器建模与实验验证

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495618

S. M. Rasid, A. Michael, H. Pota, Ssu-Han Chen, C. Kwok

引用次数: 1

A Novel CMOS-MEMS Tri-Axial Tactile Force Sensor Using Capacitive and Piezoresistive Sensing Mechanisms 采用电容式和压阻式传感机构的新型CMOS-MEMS三轴触觉力传感器

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495459

Yen-Lin Chen, Yu-Cheng Huang, Meng-Lin Hsieh, Sheng-Kai Yeh, W. Fang

{"title":"A Novel CMOS-MEMS Tri-Axial Tactile Force Sensor Using Capacitive and Piezoresistive Sensing Mechanisms","authors":"Yen-Lin Chen, Yu-Cheng Huang, Meng-Lin Hsieh, Sheng-Kai Yeh, W. Fang","doi":"10.1109/Transducers50396.2021.9495459","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495459","url":null,"abstract":"This study proposes a novel design to implement a triaxial tactile force sensor, as shown in Fig. 1. The tactile force sensor is fabricated by TSMC standard CMOS process. The normal and shear forces sensing capabilities are achieved by three independent sensing components monolithically integrated on a single chip. Capacitive sensing membrane forms the normal force detection element and piezo-resistive bridges form the shear force detection elements. Merits of the design include (Fig. 2): (1) fully-clamped square-diaphragm array as the capacitive-type normal force sensing element: flexible only in out-of-plane direction (z-axis) to detect the normal load and avoid the cross-talk from shear forces; (2) clamped-clamped beam with Wheatstone bridge circuits as the piezo-resistive shear force sensing elements: flexible only in one in-plane direction (x-axis or y-axis) to detect the single axis share load, and the cross-talk from normal load is removed by the Wheatstone bridge circuits. Measurement results show the sensitivities of the proposed tri-axial tactile force sensor are 1.26 fF/N in z-axis, 2.043 mV/N in x-axis, 2.248 mV/N in y-axis and have less than 10% overall crosstalk.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"8 1","pages":"210-213"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73272748","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 7

Optimization of Motor-Based Rotational Triboelectric Nanogenerators (RoTENGs) for Neural Stimulation 基于电机的旋转摩擦电纳米发电机(RoTENGs)的神经刺激优化

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495433

Mi-Gyeong Kang, Heejae Shin, Youngjun Cho, Jaeu Park, Jinwoong Jeong, Sanghoon Lee

引用次数: 0

Flexible Film Loudspeaker Based on Piezoelectric PZT/Si Ultra-Thin MEMS Chips 基于压电PZT/Si超薄MEMS芯片的柔性薄膜扬声器

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495747

T. Yamashita, T. Takeshita, Atsushi Oouchi, Takeshi Kobayashi

引用次数: 1

Numerical Study and Experimental Investigation of an Electrohydrodynamic Device for Inertial Sensing 惯性传感电液动力装置的数值研究与实验研究

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495410

T. Nguyen, Ngoc Van Tran, T. X. Dinh, C. Tran, V. Dau, T. D. Chu, Ha Nguyen Hoang, T. Bui

引用次数: 0

Mid-IR Metamaterial Absorber with Polyvinylamine as a Sensitive Layer for On-Chip Sensing of Carbon Dioxide 以聚乙烯胺为敏感层的中红外超材料吸收器用于片上二氧化碳传感

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495629

Hong Zhou, Dongxiao Li, Xindan Hui, Xianming He, He Huang, X. Mu

引用次数: 1

Full Silicon Capacitive Force Sensors with Low Temperature Drift and High Temperature Range 具有低温漂移和高温范围的全硅电容式力传感器

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495478

Muhannad Ghanam, Thomas Bilger, F. Goldschmidtboeing, P. Woias

引用次数: 2