Modelling and Experimental Validation of Piezoelectrically Driven Micro-Lens Actuator

Abstract

This paper presents the development of a dynamic analytical model for piezoelectrically driven micro-lens actuator for micro-optics applications. The model uniquely considers the effect of residual stress in the thin films constituting the micro-actuator and the actuating DC offset voltage of the micro-lens actuator. Euler-Bernoulli beam theory is used to formulate the dynamic model. Experiments were performed on the fabricated piezoelectric micro-lens actuator to validate the dynamic analytical model. The results show that the measured resonance frequency of 927 Hz and change in resonance frequency of 4 Hz/V for actuating DC voltage are in good agreement with the analytical dynamic model prediction of resonance frequency 948 Hz and shift in resonance frequency 4.5 Hz/V. This model allows one to predict the dynamic behavior of the micro-lens actuator under the residual stress and actuating DC voltage.