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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)最新文献

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Fabrication of Bioinspired Artificial Bacterial Flagella Via Two Photon Lithography and Wet Metallization 双光子光刻和湿金属化制备仿生人工细菌鞭毛
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495505
R. Bernasconi, G. Prioglio, Carlos C. J. Alcântara, S. Pané, L. Magagnin
{"title":"Fabrication of Bioinspired Artificial Bacterial Flagella Via Two Photon Lithography and Wet Metallization","authors":"R. Bernasconi, G. Prioglio, Carlos C. J. Alcântara, S. Pané, L. Magagnin","doi":"10.1109/Transducers50396.2021.9495505","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495505","url":null,"abstract":"The present work describes for the first time the production of artificial bacterial flagella (ABFs) by combining laser direct writing and wet metallization. ABFs are helical shaped microrobots that can be remotely actuated using low-strength rotating magnetic fields. They can precisely navigate liquid environments, potentially allowing in-vivo cell and drug delivery or localized microsurgery. ABFs are printed via two photon lithography (2PL) and metallized via electroless deposition. The latter is optimized to yield a nanometric CoNiP layer without damaging the delicate structures. The swimming behavior of the CoNiP coated ABFs is then studied by actuating them inside an array of electromagnetic coils.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"52 1","pages":"369-372"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75965035","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Finger-Worn Dense Pressure-Sensor Array for Arterial Pulse Acquisition 用于动脉脉搏采集的指戴式密集压力传感器阵列
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495720
Jianzhong Chen, Yi Sun, Ke Sun, Rong Zheng, Heng Yang, Yifei Zhong, Xinxin Li
{"title":"Finger-Worn Dense Pressure-Sensor Array for Arterial Pulse Acquisition","authors":"Jianzhong Chen, Yi Sun, Ke Sun, Rong Zheng, Heng Yang, Yifei Zhong, Xinxin Li","doi":"10.1109/Transducers50396.2021.9495720","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495720","url":null,"abstract":"This paper reports a finger-worn dense pressure-sensor array, with which arterial pulse signal can be acquired simultaneously during pulse-taking, and rapid pulse positioning and dynamic pulse width measurement of the radial artery has been achieved for the first time. Because the width of a radial artery is only approximately 2.5-3 mm, very dense sensor arrays must be developed to distinguish changes in pulse width. An array of 18 ultra-small MEMS pressure sensors (0.4 × 0.4 mm each) with a pitch of 0.65 mm is packaged on a flexible printed circuit board. Because the array has an effective span of 11.6 mm, which is 3–5 times the diameter of the human radial artery, the search for the radial artery during pulse-taking is facilitated naturally. Furthermore, a measuring scheme for dynamic pulse width is developed in this study. The pulses of three volunteers are measured using the system, and the results of the dynamic pulse width measurement are consistent with those obtained by color Doppler ultrasound.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"14 1","pages":"1468-1471"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87467726","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Formaldehyde Sensor with Pentagram-Shaped Core-Shell Nanostructure as Catalyst 五角形核壳纳米结构甲醛传感器
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495612
Xuefeng Wang, Yarong Cheng, Li Su, P. Xu, Xinxin Li
{"title":"Formaldehyde Sensor with Pentagram-Shaped Core-Shell Nanostructure as Catalyst","authors":"Xuefeng Wang, Yarong Cheng, Li Su, P. Xu, Xinxin Li","doi":"10.1109/Transducers50396.2021.9495612","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495612","url":null,"abstract":"Rapid, disposable, low-cost and simple-to-use formaldehyde (FA) sensor is favorable for on-site food safety detection. Herein, a batch-printed chip based FA electrochemical sensor is developed with bimetallic Ag-Pt nanoparticles as highly active catalyst. The prepared nanoparticles exhibit a regular Ag@Pt core-shell nanostructure with pentagram shape. Combined with reduced graphene oxide (rGO) to improve conductivity, the disposable sensor can determine FA in the range of 1 to 100 µM with a LOD of 1 µM. This sensor also shows high selectivity and reproducibility and is able to detect FA in real food samples.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"120 1","pages":"537-540"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87847627","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Low Power 4-Channel Single-Cantilever Metal-Oxide Gas Sensor Cell with Gas Identification Capability 具有气体识别能力的低功耗4通道单悬臂金属氧化物气体传感器单元
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495548
Dongcheng Xie, Ruicheng Liu, G. Adedokun, Feng Wu, Qiang Rong, Lei Xu
{"title":"A Low Power 4-Channel Single-Cantilever Metal-Oxide Gas Sensor Cell with Gas Identification Capability","authors":"Dongcheng Xie, Ruicheng Liu, G. Adedokun, Feng Wu, Qiang Rong, Lei Xu","doi":"10.1109/Transducers50396.2021.9495548","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495548","url":null,"abstract":"This paper presents a low power 4-channel metal-oxide (MOx) gas sensor cell based on a single cantilever, which shows gas identification capability. The cantilever sensor cell was designed and fabricated using MEMS technology, and SnO2 was deposited by sputtering as the sensing layer. Based on the temperature distribution of the cantilever, the four channels have different operating temperatures under a common input heating voltage. All channels show responses to 50 ppm C2H5OH, H2, and NH3 with a total power consumption of 8.55 mW. The response characteristics of the four channels are different under the same input heating voltage, and the response change trend of each channel is also different with different target gas as the input heating voltage changes.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"10 1","pages":"160-163"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87937530","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Robust Autoparametrically Excited Angular Rate Sensor 鲁棒自参数激励角速率传感器
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495549
Bhargav Gadhvi, F. Golnaraghi, B. Bahreyni
{"title":"A Robust Autoparametrically Excited Angular Rate Sensor","authors":"Bhargav Gadhvi, F. Golnaraghi, B. Bahreyni","doi":"10.1109/Transducers50396.2021.9495549","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495549","url":null,"abstract":"We report, for the first time, a robust angular rate sensor that is operated at 2:1 Autoparametric Resonance (AR) with a wide frequency bandwidth at 3dB amplitude drop of 320.7 Hz. The sensor utilizes inherent forcing and inertial or elastic nonlinearities arising from electrostatic forces and fabrication imperfections respectively, to excite the sense mode via 2:1 AR causing a wider frequency response of the sense mode. The sensor is actuated electrostatically, and its output is sensed using variable gap capacitive electrodes. The sensor is tested on a rate table and a maximum scale factor of $38.99 mu mathrm{V}/^{circ}/mathrm{s}$ with a full-scale nonlinearity of 1.2%, dynamic range of ±270 °/s, and noise density of 0.042 °/s/√Hz are measured.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"15 1","pages":"1327-1330"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87994971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Stimuli-Responsive Structural-Color Hydrogel Chemical Sensor Microarray with Separated Functional Structures 具有分离功能结构的刺激响应结构-彩色水凝胶化学传感器微阵列
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495691
R. Ueno, Shota Yamawaki, H. Onoe
{"title":"Stimuli-Responsive Structural-Color Hydrogel Chemical Sensor Microarray with Separated Functional Structures","authors":"R. Ueno, Shota Yamawaki, H. Onoe","doi":"10.1109/Transducers50396.2021.9495691","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495691","url":null,"abstract":"This paper describes an eye-recognizable stimuli-responsive structural-color hydrogel chemical sensor microarray having independent functional structures. Single unit of this microarrayed sensor is separated into two functional parts: a stimuli-responsive part and a structural-color part, enabling visible color sensing for various types of target molecules. In order to demonstrate our concept, we fabricated ethanol and Ag+ ions responsive microarrayed sensors with l00-µm-scale units and observed their color change in response to these chemical targets. We believe that our sensor could be applied to continuous environmental monitoring such as water quality, and widen the range of materials for stimuli responsive structural color hydrogel sensors.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"211 1","pages":"835-838"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88057997","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
SUB-$mumathrm{W}$ Wireless Infrared Sensor with above-Threshold Measurement Function Based on a Bistable Micromechanical Switch SUB-$mumathrm{W}$基于双稳态微机械开关的阈值以上测量功能无线红外传感器
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495495
Vageeswar Rajaram, S. Calisgan, Sungho Kang, Antea Risso, Z. Qian, M. Rinaldi
{"title":"SUB-$mumathrm{W}$ Wireless Infrared Sensor with above-Threshold Measurement Function Based on a Bistable Micromechanical Switch","authors":"Vageeswar Rajaram, S. Calisgan, Sungho Kang, Antea Risso, Z. Qian, M. Rinaldi","doi":"10.1109/Transducers50396.2021.9495495","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495495","url":null,"abstract":"This work reports on the first ultra-low power infrared (IR) wireless sensor based on an IR micromechanical photoswitch (MP) and a microcontroller capable of quantifying the above-threshold input IR radiation and transmitting the measured value wirelessly. The entire sensor node remains asleep (standby power ∼811 nW) until awakened by the always-alert IR digitizer (i.e., the MP) upon exposure to targeted IR radiation. Unlike existing switch-based zero power sensors that only provide a binary output (i.e., indicate the presence of an IR source), the awakened sensor exploits a thermally-modulated electromechanical pull-in mechanism to measure the incident IR power using the same MP, the value of which is then transmitted wirelessly to a remote gateway. The prototype demonstrated here paves the way for maintenance-free coin battery-powered sensors for longterm and high-granularity remote deployment.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"34 1","pages":"573-576"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88065055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Hybrid Fabrication Method for Microfluidic Channels Within a Polymer Nanocomposite for Neural Interfacing Applications 应用于神经界面的聚合物纳米复合材料微流控通道的混合制造方法
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495617
Youjoung Kim, Natalie N Mueller, William E. Schwartzman, V. Aluri, Amanda Herried, J. Capadona, A. Hess-Dunning
{"title":"Hybrid Fabrication Method for Microfluidic Channels Within a Polymer Nanocomposite for Neural Interfacing Applications","authors":"Youjoung Kim, Natalie N Mueller, William E. Schwartzman, V. Aluri, Amanda Herried, J. Capadona, A. Hess-Dunning","doi":"10.1109/Transducers50396.2021.9495617","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495617","url":null,"abstract":"Microfluidic intracortical neural probes were developed using a mechanically-adaptive polymer nanocomposite. Three different microfluidic channel fabrication methods were explored: Emboss-only, Mold-only, and a hybrid Mold/Emboss method. Films produced from each method were inspected and characterized using microscopy and profilometry. Further, we studied the ability of each approach to produce probes with functional microfluidic channels. The results indicate that the hybrid Mold/Emboss method had the highest fidelity transfer of the channel pattern to the polymer nanocomposite and was most successful in producing functional microfluidic probes. This process will help to increase the functionality and long-term viability and reliability of NC neural probes.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"25 1","pages":"900-903"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88441154","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A Novel Fabrication Platform for Acceleration Sensor Switch with Top Contacts 一种新颖的顶部触点加速度传感器开关制造平台
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495431
S. Merugu, J. Sharma, Sagnik Ghosh, Yul Koh, A. Lal, E. Ng
{"title":"A Novel Fabrication Platform for Acceleration Sensor Switch with Top Contacts","authors":"S. Merugu, J. Sharma, Sagnik Ghosh, Yul Koh, A. Lal, E. Ng","doi":"10.1109/Transducers50396.2021.9495431","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495431","url":null,"abstract":"This report describes a novel microfabrication platform to realize an acceleration sensor switch with top contacts in the out-of-plane direction. The platform utilizes conventional micromachining processes on 8″ silicon wafers. The acceleration switch top contacts are realized with a composite structure of an Al bridge spring, hardened at the contact locations with TiN, in order to provide robustness while allowing some compliance for a prolonged contact time and minimal bouncing effects. The silicon proof mass is also hardened at the contact locations with TiN. The fabricated acceleration sensor switch is demonstrated to have a threshold of under 40g, which is well-suited for IoT applications.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"24 1","pages":"124-127"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86403601","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Fabrication and Characterization of Hollow Microneedle Array Using Diffraction UV Lithography 用衍射紫外光刻技术制备空心微针阵列及表征
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495599
Jun Ying Tan, Albert Kim, J. Kim
{"title":"Fabrication and Characterization of Hollow Microneedle Array Using Diffraction UV Lithography","authors":"Jun Ying Tan, Albert Kim, J. Kim","doi":"10.1109/Transducers50396.2021.9495599","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495599","url":null,"abstract":"Hollow microneedles are extremely attractive to drug delivery domains with high demands from clinics and industry. However, its complicated fabrication processes have impeded its wide adoption. This paper presents a simple one-step fabrication method for hollow microneedles based on diffraction UV lithography and solid-liquid light propagation. The fabrication process utilizes bottom-up exposure of a liquid photosensitive resin through photomask patterns comprising a plurality of apertures. Hollow microneedles with various heights were fabricated in a range of 400 µm to 600 µm from a few minutes of UV exposure. The fabricated hollow microneedles were characterized with force-displacement tests showing a good tip strength of 0.35 N per single unit. A hollow fluidic test on a pig cadaver skin showed great potential for drug delivery. Also, batch fabrication with multiple height microneedles on a single substrate has demonstrated compatibility with the manufacturing process.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"54 1","pages":"1150-1153"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86730473","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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