A Novel Fabrication Platform for Acceleration Sensor Switch with Top Contacts

S. Merugu, J. Sharma, Sagnik Ghosh, Yul Koh, A. Lal, E. Ng
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引用次数: 2

Abstract

This report describes a novel microfabrication platform to realize an acceleration sensor switch with top contacts in the out-of-plane direction. The platform utilizes conventional micromachining processes on 8″ silicon wafers. The acceleration switch top contacts are realized with a composite structure of an Al bridge spring, hardened at the contact locations with TiN, in order to provide robustness while allowing some compliance for a prolonged contact time and minimal bouncing effects. The silicon proof mass is also hardened at the contact locations with TiN. The fabricated acceleration sensor switch is demonstrated to have a threshold of under 40g, which is well-suited for IoT applications.
一种新颖的顶部触点加速度传感器开关制造平台
本文介绍了一种新型的微加工平台,用于实现面外方向上触点的加速度传感器开关。该平台在8块″硅片上采用传统的微加工工艺。加速开关顶部触点采用Al桥弹簧的复合结构实现,在触点位置用TiN硬化,以提供鲁棒性,同时允许长时间接触和最小的弹跳效应。防硅质量在与TiN接触的位置也硬化。制造的加速度传感器开关被证明具有低于40g的阈值,非常适合物联网应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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