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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)最新文献

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Acoustoelectric Surface Acoustic Wave Switch in An Epitaxial Ingaas on Lithium Niobate Heterostructure 铌酸锂异质结构外延ingas的声电表面声波开关
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495622
M. Storey, L. Hackett, Sara DiGregorio, Michael R. Miller, G. Peake, M. Eichenfield, D. Weinstein
{"title":"Acoustoelectric Surface Acoustic Wave Switch in An Epitaxial Ingaas on Lithium Niobate Heterostructure","authors":"M. Storey, L. Hackett, Sara DiGregorio, Michael R. Miller, G. Peake, M. Eichenfield, D. Weinstein","doi":"10.1109/Transducers50396.2021.9495622","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495622","url":null,"abstract":"This work presents a 3-Port acoustoelectric switch design for surface acoustic wave signal processing. Using a multistrip coupler, the input acoustic wave at Port 1 is split into two parallel and electrically cross-linked acoustoelectric delay lines where an applied voltage can alter the gain and attenuation in each delay line based on the voltage polarity. The switch is demonstrated using a 270 MHz Leaky SAW mode on an InGaAs on 41° Y-cut lithium niobate heterostructure. Applying a +40 V voltage pulse results in an IL of -12.5 dB and -57.5 dB in the gain and isolation switch paths, respectively. This leads to a 45 dB difference in signal strength at the output ports.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"683 1","pages":"545-548"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77036427","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Machine Learning Augmented VOC Identification by Mid-Infrared Nanoantennas with Microfluidics Chambers 机器学习增强中红外微流控室纳米天线VOC识别
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495761
Zhihao Ren, Zixuan Zhang, Jingxuan Wei, Haibo Wang, B. Dong, Chengkuo Lee
{"title":"Machine Learning Augmented VOC Identification by Mid-Infrared Nanoantennas with Microfluidics Chambers","authors":"Zhihao Ren, Zixuan Zhang, Jingxuan Wei, Haibo Wang, B. Dong, Chengkuo Lee","doi":"10.1109/Transducers50396.2021.9495761","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495761","url":null,"abstract":"Infrared vibrational spectroscopy enhanced by plasmonic nanoantenna (PNA) become attractive sensing platforms for molecular recognition and characterization. With the rich information provided by IR fingerprint absorption and wavelength shift by broadband PNA, machine learning serves as a powerful tool to classify the complementary physical (refractive index) and chemical (chemical bond vibration) information and recognize the molecules. We propose an ultrasensitive broadband hook nanoantenna platform integrated with microfluidics channels and perform machine learning analysis to identify chemically similar alcoholic molecules in low concentrations. Our platform paves the way to advanced IR spectroscopic sensing for a wide range of chemical identification.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"131 1","pages":"389-392"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85400508","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Soft Microfluidic Wearable Sensors for Biomedical Applications 生物医学应用的软微流体可穿戴传感器
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495757
C. Lim
{"title":"Soft Microfluidic Wearable Sensors for Biomedical Applications","authors":"C. Lim","doi":"10.1109/Transducers50396.2021.9495757","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495757","url":null,"abstract":"The future of healthcare wearables lies in continual sensing in an unobtrusive manner. Tactile sensing is especially important to capture mechanotransduced signals arising from the body, or as a result of interactions with the external environment. However, conventional sensors are rigid, stiff and obstrusive. Therefore, one of the key objectives is to confer flexibility and stretchability to our sensing elements, while maintaining its sensitivity and robustness. Here, we develop a novel liquid-based microfluidic and microtubular sensors that possess high flexibility, durability, and sensitivity. The sensors comprise a soft elastomer-based microfluidic template encapsulating a conductive liquid which serves as the active sensing element of the device. This sensor is capable of distinguishing and quantifying the various user-applied mechanical forces it is subjected to. We demonstrated healthcare applications of our sensors in rehabilitation monitoring, artificial sensing and disease tracking such as that for diabetic patients. Overall, our work highlights the potential of the liquid-based microfluidic sensing platforms in a wide range of healthcare applications and further facilitates the exploration and realization of functional liquid-state device technology.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"40 1","pages":"614-614"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85531096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Benefactors 捐助者
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/transducers50396.2021.9495453
{"title":"Benefactors","authors":"","doi":"10.1109/transducers50396.2021.9495453","DOIUrl":"https://doi.org/10.1109/transducers50396.2021.9495453","url":null,"abstract":"","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"559 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78034077","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polymer based Acoustic Wave Sensor Using Hot Embossing Technique 基于热压技术的聚合物声波传感器
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495735
Jungyoon Kim, Tianyi Zhang, Q. Guan, J. Sartori, Lauren E. Linderman, V. Mandic, T. Cui
{"title":"Polymer based Acoustic Wave Sensor Using Hot Embossing Technique","authors":"Jungyoon Kim, Tianyi Zhang, Q. Guan, J. Sartori, Lauren E. Linderman, V. Mandic, T. Cui","doi":"10.1109/Transducers50396.2021.9495735","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495735","url":null,"abstract":"The objective of this research is to develop a highly sensitive acoustic wave sensor using a tunneling current. The tunneling current device is fabricated with the hot embossing technology. Since polymethyl methacrylate (PMMA) is less expensive, has little stiffness, and is easier to work with micro-machining process compared to traditional silicon-based tunneling sensors, we fabricate the tip structure on the material using the hot embossing process. First, the frequency response of the tunneling device is measured by a piezoelectric transducer (PZT) and laser vibrometer to find the resonance frequency. Then the performance of the device is characterized by measuring the acoustic wave, which has the resonance frequency.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"1 1","pages":"1275-1278"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79916618","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Integrated On-Chip Cellular Exosome Isolation and RNA Analysis Microsystem 集成片上细胞外泌体分离和RNA分析微系统
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495727
Yunxing Lu, Xiaoyu Jian, Zhaoduo Tong, Zhenhua Wu, S. Qiu, Chuanjie Shen, Hao Yin, Hongju Mao
{"title":"Integrated On-Chip Cellular Exosome Isolation and RNA Analysis Microsystem","authors":"Yunxing Lu, Xiaoyu Jian, Zhaoduo Tong, Zhenhua Wu, S. Qiu, Chuanjie Shen, Hao Yin, Hongju Mao","doi":"10.1109/Transducers50396.2021.9495727","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495727","url":null,"abstract":"Exosomes have now received increasing focus as a promising biomarker for cancer diagnostics because of its specific biocomponents (including proteins, mRNA and lncRNA et al) acquired from parental cells. However, efficiently isolation and quantitative analysis of tumor-related exosomal nucleic acid is still in urgent need. Here, we present an integrated exosome processing microfluidic platform which combines exosome on-chip isolation and sensitive exosomal RNA analysis through droplet digital polymerase chain reaction (ddPCR). Utilizing our system, samples from cell line supernatant could be rapidly detected and demonstrated remarkable detection signals. Owning to advantages including highly sensitive, pollution-free, high-volume (~ 25 µl), low cost and easy handling, our microfluidic system offers a promising means for early cancer diagnosis and prognosis in the era of liquid biopsy.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"58 1","pages":"980-983"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76919193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A CMOS-MEMS Fluorescence Quenching Gas Sensor Encapsulated with Silicon-Based LED Reflector 硅基LED反射器封装的CMOS-MEMS荧光猝灭气体传感器
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495443
Ya-Chu Lee, Shihwei Lin, Chengshiun Liou, C. Tsou, W. Fang
{"title":"A CMOS-MEMS Fluorescence Quenching Gas Sensor Encapsulated with Silicon-Based LED Reflector","authors":"Ya-Chu Lee, Shihwei Lin, Chengshiun Liou, C. Tsou, W. Fang","doi":"10.1109/Transducers50396.2021.9495443","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495443","url":null,"abstract":"This study demonstrates a simple approach to enhance the sensitivity and reduce the power consumption of a fluorescence quenching based gas sensor using a silicon-based encapsulation as the optical reflector (Fig. 1). The design consists of a CMOS-MEMS gas sensor, a blue LED, and a silicon optical reflector integrated using the bonding technologies (Fig. 1a). Moreover, the gas sensor containing the vertically integrated photo sensor, resistive temperature detector (RTD), thermal isolation trenches, and cavities for gas sensing materials is implemented using the TSMC $0.35mumathrm{m}$ CMOS process (Fig. 1b). The gas concentration is detected on the basis of the fluorescence intensity measured by the photo sensor on the CMOS platform [1] [2]. This design has three merits: (1) simple approach to integrate the optical reflector to sensing chip to enhance the performances of gas sensor, and wafer level packaging can be achieved for future applications, (2) the reflector could reflect and redirect the high intensity emitting light from the top-side of LED to enhance the sensitivity of gas sensor (Fig. 1b), and (3) the power consumption of the LED as well as the gas sensor can be reduced. In applications, the concentration of O2 is measured. Measurement results show the sensitivity of gas concentration for the proposed design with reflector and the reference design without reflector are $0.26mumathrm{A}/%$ (O2/N2) and $0.019mumathrm{A}/%$ (O2/N2) respectively. Moreover, the LED driving current reduced from 100 mA to 20 mA by adding the reflector (reducing power consumption for blue-LED).","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"22 1","pages":"783-786"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82422000","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Machine Vision Based Method for Measuring Single-Cell Biophysical Properties Using Dielectrophoresis Mobility 基于机器视觉的单细胞生物物理特性测量方法
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/transducers50396.2021.9495379
Sheng-Zong Chen, Zhizhong Zhang, Rong Zhu
{"title":"Machine Vision Based Method for Measuring Single-Cell Biophysical Properties Using Dielectrophoresis Mobility","authors":"Sheng-Zong Chen, Zhizhong Zhang, Rong Zhu","doi":"10.1109/transducers50396.2021.9495379","DOIUrl":"https://doi.org/10.1109/transducers50396.2021.9495379","url":null,"abstract":"Measurement on single-cell biophysical properties is of great significance for cell sorting, cytopathology tracking, etc. Dielectrophoresis (DEP) based single-cell measurement has attracted increasingly interests because of its non-invasive, label-free, and easy integration with other functional structures. However, the measurement accuracy and efficiency of DEP-based method highly depends on cell motion tracking. Here, we propose a machine vision-based DEP motion tracking method to realize accurate and fast measurements on single-cell biophysical properties.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"34 1","pages":"687-690"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81743911","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Highly Sensitive Point-of-Care Covid-19 Serological Test using Immuno-PCR in 35 Mins 一种35分钟内使用免疫pcr的高灵敏度护理点Covid-19血清学检测方法
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495696
Pengfei Zhang, Liben Chen, Jiumei Hu, Alexander Y. Trick, Fan-En Chen, K. Hsieh, Yang Zhao, Tza-Huei Wang
{"title":"A Highly Sensitive Point-of-Care Covid-19 Serological Test using Immuno-PCR in 35 Mins","authors":"Pengfei Zhang, Liben Chen, Jiumei Hu, Alexander Y. Trick, Fan-En Chen, K. Hsieh, Yang Zhao, Tza-Huei Wang","doi":"10.1109/Transducers50396.2021.9495696","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495696","url":null,"abstract":"Serological tests play important roles in the fight against the Coronavirus Disease 2019 (COVID-19). The most commonly used methods, enzyme-linked immunosorbent assays (ELISA), provide reliable and sensitive antibody measurement though they require bulky laboratory infrastructure as well as lengthy turnaround time. Conversely, lateral flow immunoassays (LFIA) are suitable for rapid point-of-care tests but with limited sensitivity. To combine the best attributes of ELISA and LFIA, we developed a novel streamlined immuno-PCR assay and applied it to a portable magnetofluidic instrument for point-of-care serological tests. In testing 107 clinical samples, our point-of-care serological test showed 98.3% (58/59) specificity and 93.8% (45/48) agreement with benchtop immunoassays. Moreover, 100% agreement was achieved by only slightly increasing the total assay time to 45 min, demonstrating its potential as a new point-of-care serological test for COVID-19 and beyond.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"46 1","pages":"743-746"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78733534","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Redox-Type Label-Free ATP Image Sensor for Highly Sensitive in Vitro Imaging of Extracellular ATP 用于细胞外ATP高灵敏度体外成像的氧化还原型无标签ATP图像传感器
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495500
H. Doi, T. Horio, Y. Choi, Kazuhiro Takahashi, T. Noda, K. Sawada
{"title":"Redox-Type Label-Free ATP Image Sensor for Highly Sensitive in Vitro Imaging of Extracellular ATP","authors":"H. Doi, T. Horio, Y. Choi, Kazuhiro Takahashi, T. Noda, K. Sawada","doi":"10.1109/Transducers50396.2021.9495500","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495500","url":null,"abstract":"To decrease the limit of detection of imaging of extracellular ATP dynamics in the brain, we developed a redox-type, highly sensitive, label-free ATP image sensor with a reasonable spatial resolution ($37.3 mumathrm{m}$-pitch) effective utilization in in-vitro experiments. The lowest detectable concentration achieved in our sensor, which is based on hydrogen peroxide detection techniques using redox enzymes, was $3 mu mathrm{M}$. Further, according to the results of the in-vitro biological experiment conducted using a 10 mM-HEPES buffer, our sensor demonstrated a 100 times superior performance compared to the existing imaging devices that were also based on hydrogen ion (H+) detection techniques. It is expected that our novel ATP image sensor can be successfully applied for highly sensitive imaging of ATP released from brain nerve tissues and cells. It also has potential application in the spatiotemporal analysis of ATP.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"66 1","pages":"711-714"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78821388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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