2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)最新文献

筛选
英文 中文
Scaling Effect Induced Rapid Quenching Improves the Performance of Microfabricated Electrostatic Micromirrors 结垢效应诱导的快速淬火提高了微静电微镜的性能
Hao Ren, Weimin Wang, Haichao Cao, Sitao Fei, Yunping Niu, Zhihao Li
{"title":"Scaling Effect Induced Rapid Quenching Improves the Performance of Microfabricated Electrostatic Micromirrors","authors":"Hao Ren, Weimin Wang, Haichao Cao, Sitao Fei, Yunping Niu, Zhihao Li","doi":"10.1109/NEMS50311.2020.9265626","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265626","url":null,"abstract":"In this paper we study the scaling effect on the heat transfer of microfabricated electrostatic micromirrors with polysilicon and gold bimorph structure. Based on scaling effect study, it is found that as the characteristic length of micromirror reduces, rapid cooling occurs, and we implemented the scaling effect to perform thermal processing to cause rapid quenching and plastic deformation on microfabricated micromirrors to improve its performance, including the maximum out-of-plane displacement and bandwidth. Electrostatic micromirrors were fabricated by a two-layer polysilicon microfabrication process. Measurement results demonstrated that after the thermal processing, the maximum out-of-plane displacement increased by 60.8%, from 1.25 μm to 2.01 μm, and the 3dB bandwidth was increased by 40.7%, from 1.35 kHz to 1.90 kHz.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"38 1","pages":"545-548"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89703361","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Floating Gate Perimeter Gated Single Photon Avalanche Diodes 浮动门周边门控单光子雪崩二极管
M. A. Haque, N. Mcfarlane
{"title":"Floating Gate Perimeter Gated Single Photon Avalanche Diodes","authors":"M. A. Haque, N. Mcfarlane","doi":"10.1109/NEMS50311.2020.9265592","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265592","url":null,"abstract":"This paper explores the effect of floating gate structures on the electric field distribution of perimeter gate single photon avalanche diodes using TCAD Sentaurus simulations. Physical models used for the simulation have been discussed extensively to expedite reproduction of simulation results in other simulation platforms. The simulations estimate the I-V characteristics of single-input and multiple-input floating gate devices as a function of applied floating gate voltage and studies the effect of gate oxide and polysilicon thickness on the device.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"38 1","pages":"110-114"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73331861","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Highly Sensitive Non-Enzymatic Hydrogen Peroxide Sensor based on Palladium-Gold Nanoparticles 基于钯金纳米粒子的高灵敏度无酶过氧化氢传感器
Saikat Banerjee, Md. Faruk Hossain, G. Slaughter
{"title":"A Highly Sensitive Non-Enzymatic Hydrogen Peroxide Sensor based on Palladium-Gold Nanoparticles","authors":"Saikat Banerjee, Md. Faruk Hossain, G. Slaughter","doi":"10.1109/NEMS50311.2020.9265596","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265596","url":null,"abstract":"Here a simple strategy was employed to fabricate a hydrogen peroxide (H2O2) sensor based on gold nanoparticles and palladium nanoparticles onto a tungsten wire. The electrochemical activities of the bimetallic nanoparticles decorated electrode were characterized by the voltammetry and amperometry. The decorated electrode showed excellent catalytic activity towards the H2O2 reduction. The fabricated electrode demonstrated a good linear range, fast response time, good reproducibility, and a sensitivity of 0.317 mA mM-1 cm-2 for H2O2 detection. In addition, it also showed good antiinterference capability towards common interfering analytes. Thereby, the fabricated sensor has the potential to be used as a simple, rapid, and cost-effective non-enzymatic sensor.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"10 1","pages":"286-289"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84361449","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Flexural Rigidity of Microtubules Measured by Gold Stripe-Patterned Substrate 用金条纹衬底测量微管的弯曲刚度
Hang Zhou, N. Isozaki, Kazuki Ukita, Taviare L. Hawkins, J. Ross, R. Yokokawa
{"title":"Flexural Rigidity of Microtubules Measured by Gold Stripe-Patterned Substrate","authors":"Hang Zhou, N. Isozaki, Kazuki Ukita, Taviare L. Hawkins, J. Ross, R. Yokokawa","doi":"10.1109/NEMS50311.2020.9265570","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265570","url":null,"abstract":"Microtubules (MTs) are highly dynamic tubular biopolymers, involving in many cellular processes such as intracellular transport, cellular structure maintenance, and cell division. All the processes require that MTs have adequate and adjustable flexural rigidity to cope with different functions. Despite the importance of MT mechanics, previously reported values of MTs’ flexural rigidity vary significantly. Here we provide an explanation for such a longstanding discrepancy. Moreover, with the localization precision optimized to the nanometer-level, we find that the flexural rigidity of MTs is dependent on growth rate. Not only do our results show the importance of localization precision on flexural rigidity studies, but also highlight the significance of the MT growth rate.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"12 5 1","pages":"325-328"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83703266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Hysteresis Modeling of Magnetic Shape Memory Alloy using a NARMAX Structure Model 基于NARMAX结构模型的磁形状记忆合金磁滞建模
Yewei Yu, Chen Zhang, Jingwen Xu, Zhiwu Han, Miaolei Zhou
{"title":"Hysteresis Modeling of Magnetic Shape Memory Alloy using a NARMAX Structure Model","authors":"Yewei Yu, Chen Zhang, Jingwen Xu, Zhiwu Han, Miaolei Zhou","doi":"10.1109/NEMS50311.2020.9265625","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265625","url":null,"abstract":"As a kind of smart material-based product, the magnetic shape memory alloy based actuator (MSMABA) is widely used in nano-positioning applications. However, the serious hysteresis in the MSMABA severely impacts its application in the field of micro/nanotechnology. To model the hysteresis of the MSMABA which possesses the multi-valued mapping characteristics and the rate-dependent behavior, a nonlinear auto-regressive moving average with exogenous inputs structure (NARMAXS) model is developed. In this method, the Bouc-Wen (BW) model as an exogenous variable function (EVF) is used to construct the NARMAXS model, and the proposed model can be applied to describe the behavior of hysteresis with multi-valued mapping. Based on the powerful function approaching capability, a wavelet neural network (WNN) is used to replace the nonlinear function of the NARAMXS model. To verify the effectiveness of the proposed method, the NARAMX model based on the radial basis function neural network (RBFNN) is used for comparison. The experiment results illustrate that the proposed NARMAXS model presents excellent modeling ability for hysteresis of the MSMABA.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"28 1","pages":"437-441"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73242469","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Classification and Concentration Prediction of VOC Gases Based on Sensor Array with Machine Learning Algorithms 基于传感器阵列和机器学习算法的VOC气体分类与浓度预测
Yingming Liu, Changhui Zhao, Junqi Lin, Huimin Gong, Fei Wang
{"title":"Classification and Concentration Prediction of VOC Gases Based on Sensor Array with Machine Learning Algorithms","authors":"Yingming Liu, Changhui Zhao, Junqi Lin, Huimin Gong, Fei Wang","doi":"10.1109/NEMS50311.2020.9265606","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265606","url":null,"abstract":"In this work, a facile method is proposed to monitor the freshness of meat and fruits by combining a gas sensor array with machine learning algorithms, where the sensor array consists of four commercial metal oxide-based gas sensors. Back-propagation neural network (BPNN) is used for gas classification, and the average accuracy can reach 98.8%. To obtain more effective prediction of VOC gas concentration (ethanol, trimethylamine, and ammonia), four algorithms including BPNN, radial basis function neural network (RBFNN), support vector machine (SVM), and hybrid LDA-SVM, which is a combination of SVM and linear discriminant analysis (LDA) are implemented, which are trained with the same training set. By analyzing and comparing the prediction results of these four algorithm models, the RBFNN achieves the peak performance for the concentration predictions of ethanol and ammonia, and the average relative errors are less than 5% and 6.5%, respectively. For trimethylamine (TMA) concentration prediction, the average relative error of RBFNN is equal to 4.41%, which is better than 5.11% of SVM, while the mean absolute error of RBFNN is slightly inferior to SVM. Therefore, the classification accuracy of the gas type by BPNN and the prediction accuracy of gas concentration by RBFNN can meet the requirement of distinguishing the freshness of food.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"30 1","pages":"295-300"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73656570","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Accelerated, Reactive Aging Tests of Parylene C, SiO2, and Si3N4 Packages for Chronic Neural Implants 用于慢性神经植入物的聚对二甲苯C, SiO2和Si3N4包装的加速,反应老化试验
Yan Gong, Matthew Harris Brauer, Kristine Zheng, Wen Li
{"title":"Accelerated, Reactive Aging Tests of Parylene C, SiO2, and Si3N4 Packages for Chronic Neural Implants","authors":"Yan Gong, Matthew Harris Brauer, Kristine Zheng, Wen Li","doi":"10.1109/NEMS50311.2020.9265554","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265554","url":null,"abstract":"Reliable packaging for implantable neural prosthetic devices in body fluids is a long-standing challenge for device’s chronic applications. This work studied the stability of Parylene C (PA), SiO2, and Si3N4 packages on tungsten wires using accelerated, reactive aging tests in three solutions: pH 7.4 phosphate-buffered saline (PBS), PBS+30 mM H2O2, and PBS+150 mM H2O2. Different combinations of coating thicknesses and deposition methods were studied at 67 °C. Analysis of the preliminary data shows that the pinholes/defects, cracks, and interface delamination are the main attributes of metal erosion and degradation in reactive aging solutions. Failure at the interface of package and metal is the dominating factor in the wire samples with open tips.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"2013 1","pages":"394-397"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86459705","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Many-body Interactions in Halide-assisted CVD Grown WSe2 for High Performance Photodetectors 用于高性能光电探测器的卤化物辅助CVD生长WSe2的多体相互作用
A. S. Bandyopadhyay, K. Jayanand, A. Kaul
{"title":"Many-body Interactions in Halide-assisted CVD Grown WSe2 for High Performance Photodetectors","authors":"A. S. Bandyopadhyay, K. Jayanand, A. Kaul","doi":"10.1109/NEMS50311.2020.9265522","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265522","url":null,"abstract":"Practical device applications of semiconducting two-dimensional (2D) materials based devices rely on their large area growth using Chemical Vapor Deposition (CVD) method. Controlled CVD growth of tungsten diselenide (WSe<inf>2</inf>) is often challenging because of the high sublimation point of tungsten. In this work, we used NaCl with tungsten oxide to allow the growth of monolayer (1L) WSe<inf>2</inf> at a temperature (T) of ~ 750°C. Additionally, we utilized T-dependent PL spectroscopy to analyse the dynamics of excitons, trions and localized excitons states in 1L WSe<inf>2</inf>. Moreover, we fabricated Al/WSe<inf>2</inf> based photodetector (PD) which show a high responsivity of ~ 502 A/W. The frequency-dependent capacitance response of the PD was also analyzed from which an interface trap density D<inf>it</inf> was computed to be ~ 3.45 × 10<sup>12</sup> cm<sup>-2</sup> eV<sup>-1</sup>; this is the lowest D<inf>it</inf> value reported for WSe<inf>2</inf>-based devices to date. The results obtained in this work reveals great potential of WSe<inf>2</inf> for electronic, opto-electronic device applications.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"37 1","pages":"22-25"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88946629","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Microfluidic Enzymatic Glucose Biofuel Cell with MWCNT patterned Printed Circuit Board Electrodes 微流控酶促葡萄糖生物燃料电池与MWCNT图案印刷电路板电极
Prakash Rewatkar, S. Goel
{"title":"Microfluidic Enzymatic Glucose Biofuel Cell with MWCNT patterned Printed Circuit Board Electrodes","authors":"Prakash Rewatkar, S. Goel","doi":"10.1109/NEMS50311.2020.9265600","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265600","url":null,"abstract":"Enzymatic biofuel cells (EBFCs) have gained a substantial attention due to their ability to be produce clean, economical and qualitative self-sustainable power. In this regards, a variety of methodologies have been reported in the field of device and electrode manufacturing, and dedicated enzyme immobilization chemistry. However, the lower power output, shorter enzyme life, and high operating and maintenance overheads are key barriers to the commercialization of EBFCs. Here, easily fabricated and cost-efficient printed circuit board (PCB) electrodes, patterned with multi-walled carbon nanotubes (MWCNT), have been presented. These bioelectrodes were further positioned over a Y-shaped PDMS microchannel and tested under microfluidic environment. The electrodes were further immobilized with GOx and laccase enzymes, to behave as anode and cathode respectively, and voltammetric electrochemical performance was established with respective electrolytes (glucose and oxygen). Finally the polarization studies of fully integrated EBFC were evaluated, where the maximum peak power density of 2.29 μW.cm-2 was observed at maximum current density of 32 μA.cm-2 with open circuit potential of 0.257 V.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"3 1","pages":"26-30"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84234962","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Flexible Electrochemical Lactate Biosensor 柔性电化学乳酸生物传感器
Peyton Miesse, G. Slaughter
{"title":"Flexible Electrochemical Lactate Biosensor","authors":"Peyton Miesse, G. Slaughter","doi":"10.1109/NEMS50311.2020.9265579","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265579","url":null,"abstract":"Lactic acid is a key indicator for trauma and exercise intolerance. It is the primary metabolically produced acid responsible for tissue acidosis that can lead to muscle fatigue. During intensive exercise, the muscles go through anerobic metabolism to produce energy. This leads to decreases in the blood flow of nutrients and oxygen to the muscles and increases in lactate production, which in turn cause lactic acidosis. Currently, changes in blood lactate concentrations are monitored by sensors that can be invasive via blood or wearable based sensors that use the enzyme lactate oxidase. Lactate oxidase produces hydrogen peroxide, which is a toxic byproduct and can foul the surface of the sensor. Here we present the development of a noninvasive wearable electrochemical lactate biosensor for the detection of lactic acid. This work presents the development of non- invasive wearable electrochemical lactate biosensor for detection of lactic acid. The bioelectrode comprised D-Lactate dehydrogenase (D-LDH) immobilized on multi-walled carbon nanotubes (MWCNTs) using polydimethylsiloxane (PDMS) as a flexible substrate platform. The lactate biosensor exhibited a dynamic linear range of 2 mM to 44 mM lactic acid with a good sensitivity of 189.89 μA/mM cm2. This electrochemical biosensor has the potential to be used for the real-time detection of lactate in the clinical, biological and sports medicine fields.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"7 1","pages":"580-583"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82484974","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信