2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)最新文献_第6页

Polymer Micromachined Transmission for Insect–Inspired Flapping Wing Nano Air Vehicles* 昆虫扑翼纳米飞行器的聚合物微机械传动*

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265594

D. Ishihara, S. Murakami, Naoto Ohira, Jyunpei Ueo, M. Takagi, Kohei Urakawa, T. Horie

引用次数: 7

Study on the influence of doping process on resistance of semiconductor bridge region 掺杂工艺对半导体电桥区电阻影响的研究

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265590

You-bin Deng, Li'ang Zhang, Wei Zhang

引用次数: 1

Micro-nano fiber sensor with high sensitivity for temperature measurement 用于温度测量的高灵敏度微纳光纤传感器

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265627

Fuzheng Zhang, Na Zhao, Qijing Lin, Feng Han, Libo Zhao, Ping Yang, Zhuangde Jiang

引用次数: 2

A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on Dry-wet Combination Etching Process 一种基于干湿组合蚀刻工艺的新型超低压力传感半岛-岛结构

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265584

Mimi Huang, Libo Zhao, Tingzhong Xu, Chen Jia, Ping Yang, Zhikang Li, Hongyan Wang, Yongshun Wu, Zhuangde Jiang

{"title":"A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on Dry-wet Combination Etching Process","authors":"Mimi Huang, Libo Zhao, Tingzhong Xu, Chen Jia, Ping Yang, Zhikang Li, Hongyan Wang, Yongshun Wu, Zhuangde Jiang","doi":"10.1109/NEMS50311.2020.9265584","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265584","url":null,"abstract":"An improved peninsula-island structured pressure sensor was presented with the novel dry-wet combination etching process. There were four pairs of segmented mass blocks attaching on the back of the diaphragm. Each segmented mass block was composed of a peninsula structure and an island structure with anisotropic-etching-induced sidewalls. The improved structure not only inherited the stress concentration feature of low strain energy dissipation but also improved the comprehensive ability of the sensor chip, including low fabrication cost, high etching uniformity, good temperature performance and low residual stress in the diaphragm. Also, the fabrication method combining DRIE (Deep Reactive Ion Etching) and anisotropic wet etching was verified by the simulation based on the Sentaurus 2013. The fabrication error caused by anisotropic wet etching was analyzed. Compared with the flat film of the same size, the proposed structure can increase the sensitivity by 225%, reduce the nonlinearity by 80.3%, and increase resonance frequency by 11%. In addition, the sensor structure can also be applied to pressure sensors with different working range, which will be helpful to design the pressure sensors with high efficiency and accuracy.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"30 1","pages":"167-170"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89778265","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Deep Memcapacitive Network 深度记忆容性网络

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265561

S. Tran, C. Teuscher

引用次数: 1

Low-Cost Parylene Based Micro Humidity Sensor for Integrated Human Thermal Comfort Sensing 基于聚对二甲苯的低成本微湿度传感器集成人体热舒适性检测

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265630

Izhar, Xiaoyi Wang, W. Xu, Hadi Tavakkoli, Yi-Kuen Lee

{"title":"Low-Cost Parylene Based Micro Humidity Sensor for Integrated Human Thermal Comfort Sensing","authors":"Izhar, Xiaoyi Wang, W. Xu, Hadi Tavakkoli, Yi-Kuen Lee","doi":"10.1109/NEMS50311.2020.9265630","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265630","url":null,"abstract":"In this paper, we report a CMOS-MEMS compatible Parylene C based Humidity Sensor (PHS) to be used for integrated human thermal comfort sensing for smart buildings. Interdigitated platinum (Pt) electrodes are deposited on a silicon substrate. A parylene C thin film as hygroscopic layer is coated on the electrodes using room-temperature chemical vapor deposition (CVD) technique. Three sensors with various dimensions (1.2 mm2, 4.8 mm2, and 7.5 mm2) are fabricated to study the size effect of the sensor on the sensitivity. The impedance, phase and capacitive response of the sensor at different frequencies of the operating voltage under various relative humidity (RH) levels are investigated. The overall impedance and capacitance changed from 23.02 to 3.744 MŸ and 64.165 to 194.14 pF respectively at 100 Hz operating frequency for the 4.8 mm2 sensor when RH is increased from 0.1 to 92%. The measured PHS’s sensitivity at the frequencies of 1~100 kHz shows highest (1.428 pF/%RH) at low frequency (100 Hz). The PHS with large sensing area showed higher sensitivity (0.11 ~ 0.53 pF/%RH) compared to medium and small sensors. Moreover, the PHS is tested for 3 days depicting good stability with respect to time.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"31 1","pages":"134-138"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85692591","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 5

3D Printed Micro-Scaffolds Loaded by Inkjet Printing with μg-Precise Amount of Drug μg-精确剂量药物的3D打印微支架

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265525

Fengyi Zheng, Jongmoon Jang, C. Tse, J. Brugger

引用次数: 1

A comparative molecular study between chlorpyriphos and parathion using CuO nanohair pesticide sensor 利用CuO纳米毛农药传感器对毒死蜱和对硫磷进行分子比较研究

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265555

Nattida Rongwaree, Tongchatra Watcharawittayakul, Cholthisa Sooksamphanwong, Phichamon Sakdarat, C. Thanachayanont, S. Prichanont, P. Pungetmongkol

引用次数: 5

Duhem Hysteresis Modeling of Magnetic Shape Memory Alloy Actuator via Takagi-Sugeno Fuzzy Neural Network 基于Takagi-Sugeno模糊神经网络的磁形状记忆合金作动器Duhem磁滞建模

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265582

Chen Zhang, Yewei Yu, Jingwen Xu, Zhiwu Han, Miaolei Zhou

{"title":"Duhem Hysteresis Modeling of Magnetic Shape Memory Alloy Actuator via Takagi-Sugeno Fuzzy Neural Network","authors":"Chen Zhang, Yewei Yu, Jingwen Xu, Zhiwu Han, Miaolei Zhou","doi":"10.1109/NEMS50311.2020.9265582","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265582","url":null,"abstract":"The magnetic shape memory alloy (MSMA)-based actuator is a promising candidate in the micro positioning field by virtues of its large stroke and small volume. However, the inherent hysteresis nonlinearity between the input current and the output displacement seriously limited the application of the MSMA-based actuator. In this paper, the hysteresis, which is related to the input frequency and working condition (such as load), is analyzed. Then a mathematical modeling method using Duhem model (DM) and Takagi-Sugeno fuzzy neural network (TSFNN) is introduced to describe the hysteresis behavior. The mathematical expression of the DM is explicit and simple; and the TSFNN, which has the advantages of both fuzzy system and NN structure, is used to identify the DM parameter. Hence, the proposed TSFNN-DM method has the merits of self adjustment and clear expression. To certify the validity of the developed model, comparative experiments with the modeling methods in other literatures are executed. Experimental results confirm that the TSFNN-DM has the better modeling performance to depict the hysteresis under the different input frequencies and loads than other modeling methods in previous studies.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"10 1","pages":"77-82"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89156104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Nanosecond Pulsed Laser Activated Massively Parallel Single-cell Intracellular Delivery Using Ti Micro-Dish 纳秒脉冲激光激活大规模平行单细胞细胞内递送的钛微皿

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265624

Pallavi Shinde, Kavitha Illath, Srabani Kar, T. Santra

{"title":"Nanosecond Pulsed Laser Activated Massively Parallel Single-cell Intracellular Delivery Using Ti Micro-Dish","authors":"Pallavi Shinde, Kavitha Illath, Srabani Kar, T. Santra","doi":"10.1109/NEMS50311.2020.9265624","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265624","url":null,"abstract":"Single-cell intracellular delivery is a booming field of interest with the various challenges faced due to the impermeability of cargo to the cell membrane barrier. The idea is to locally disrupt cell membrane for allowing cargo passage into the cytosol such as to create its therapeutic effect. Till to date, most of the intracellular delivery is performed in bulk approaches, which provides an average ensemble data, losing low-frequency rare information. Besides, reliable results require huge data from multiple cells. Hence, to ensure huge data on individual cells it becomes necessary to carry out delivery experiments on a large number of single-cells simultaneously. This ensures the same experimental conditions conserving heterogeneity in the cell population. The collection of data from individual cells provides information about rare low-frequency alleles in the cell population. Massively parallel delivery ensures such uniform experimental conditions with uniform cargo delivery to a large number of individual cells. The proposed device platform is an array of photothermal Micro-dish patterned with fibronectin protein to obtain specific Single-cell attachment. The device can deliver 10,000 individual cells with 97% efficiency and 95% cell viability simultaneously.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"16 1","pages":"320-324"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90433705","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1