Polymer Micromachined Transmission for Insect–Inspired Flapping Wing Nano Air Vehicles*

Abstract

This paper presents a polymer micromachined transmission from small translational displacement to large rotational displacement, which has the potential for further miniaturizing a variety of micro robot applications such as insect-inspired flapping wing nano air vehicles (FWNAVs). Innovative claims include (1) the transmission mechanism using a geometrically nonlinear bending, (2) the microfabrication process consisting of only the standard steps such as the deposition, the photolithography, the curing, and the release without any post-assembling, and (3) the stroke angle of about 40° without any dynamic effect.