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2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)最新文献

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Direct Graphene Growth on Anodic Aluminum Oxide Membrane Using Chemial Vapour Deposition for Solar Evaporator Performance Enhancment 化学气相沉积法在阳极氧化铝膜上直接生长石墨烯以提高太阳能蒸发器性能
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265601
Aamna Alshehhi, I. Saadat, Amal Alghaferi
{"title":"Direct Graphene Growth on Anodic Aluminum Oxide Membrane Using Chemial Vapour Deposition for Solar Evaporator Performance Enhancment","authors":"Aamna Alshehhi, I. Saadat, Amal Alghaferi","doi":"10.1109/NEMS50311.2020.9265601","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265601","url":null,"abstract":"In this paper, we have demonstrated additive-free direct CVD graphene growth on anodic alumina oxide (AAO) membranes at lower temperature benchmark (1000oC) for thermal desalination absorber applications. Various film deposition parameters are optimized to obtain the best absorption performance. The absorbance is varying between 95 to 97 % (vs. 20 % for AAO) which leads to maximizing the heat energy absorption in the system leading to more vapor for condensing process.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"3 1","pages":"301-307"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72732639","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polymer/paper-based double touch mode capacitive pressure sensing element for wireless control of robotic arm 用于机械臂无线控制的聚合物/纸基双触模电容式压力传感元件
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265605
R. B. Mishra, Wedyan Babatain, Nazek El‐atab, A. Hussain, M. Hussain
{"title":"Polymer/paper-based double touch mode capacitive pressure sensing element for wireless control of robotic arm","authors":"R. B. Mishra, Wedyan Babatain, Nazek El‐atab, A. Hussain, M. Hussain","doi":"10.1109/NEMS50311.2020.9265605","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265605","url":null,"abstract":"In this work, a large area, low cost and flexible polymer/paper-based double touch mode capacitive pressure sensor is demonstrated. Garage fabrication processes are used which only require cutting, taping and assembly of aluminum (Al) coated polyimide (PI) foil, PI tape and double-sided scotch tape. The presented pressure sensor operates in different pressure regions i.e. normal (0 to 7.5 kPa), transition (7.5 to 14.24 kPa), linear (14.24 to 54.9 kPa) and saturation (above 54.9 kPa). The advantages of the demonstrated double touch mode capacitive pressure sensors are low temperature drift, long linear range, high pressure sensitivity, precise pressure measurement and large die area. The linear output along with a high sensitivity range (14.24 to 54.9 kPa pressure range) of the sensor are utilized to wirelessly control the movement of a robotic arm with precise rotation and tilt movement capabilities.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"1 1","pages":"95-99"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81270786","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Motion nonlinearity of gimbaled micromirror in omnidirectional scanning for LiDAR application* 激光雷达全向扫描框架微镜运动非线性研究*
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265557
Katsuya Suzuki, Takashi Sasaki, K. Hane
{"title":"Motion nonlinearity of gimbaled micromirror in omnidirectional scanning for LiDAR application*","authors":"Katsuya Suzuki, Takashi Sasaki, K. Hane","doi":"10.1109/NEMS50311.2020.9265557","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265557","url":null,"abstract":"Gimbaled MEMS mirror for omnidirectional LiDAR often suffers strong nonlinearity. The motion equations of the mirror are derived analytically. The motion nonlinearity is explained from the interaction between the motions on two axes. Moreover, a structural condition for stable mirror operation is found from the equations. In order to investigate basic characteristics of omnidirectional scanning, a gimbaled micromirror is fabricated by silicon SOI micromachining and tested.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"10 1","pages":"130-133"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84432331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
AC Electrothermal Flow-Enhanced, Label-Free Immunosensor for Rapid Electrochemical Sensing 用于快速电化学传感的交流电热流增强、无标记免疫传感器
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265631
Jiran Li, P. Lillehoj
{"title":"AC Electrothermal Flow-Enhanced, Label-Free Immunosensor for Rapid Electrochemical Sensing","authors":"Jiran Li, P. Lillehoj","doi":"10.1109/NEMS50311.2020.9265631","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265631","url":null,"abstract":"We report a label-free immunosensor employing AC electrothermal flow- (ACEF-) induced mixing for rapid electrochemical measurements of protein biomarkers. Compared with conventional immunoassays that require long (> 1 hr) incubation periods, ACEF-induced mixing significantly reduces the time required for immunocomplex formation while also enhancing the detection sensitivity. Numerical simulations and experimental studies were performed to validate the ACEF mixing approach, and optimize the ACEF operating parameters. Through cyclic voltammetry and fluorescence imaging, we show that ACEF mixing enhances antigen-antibody binding resulting in improved detection sensitivity compared with incubation- based immunocomplex formation. For proof of concept, this immunosensor was used for quantitative measurements of Plasmodium falciparum histidine-rich protein 2 (PfHRP2), a biomarker for malaria infection, in buffer samples, which could be detected from 1 ng/mL - 10,000 ng/mL in < 10 min with excellent specificity.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"10 1","pages":"554-558"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81244952","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
3-D Printing Assisted Micromachined RF Patch Antenna 3d打印辅助微机械射频贴片天线
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265553
Jun Ying Tan, T. Yun, Mohammad Almuslem, J. Kim
{"title":"3-D Printing Assisted Micromachined RF Patch Antenna","authors":"Jun Ying Tan, T. Yun, Mohammad Almuslem, J. Kim","doi":"10.1109/NEMS50311.2020.9265553","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265553","url":null,"abstract":"This paper presents a three-dimensional (3-D) printing assisted microfabrication of RF patch antenna. As the 3-D printing can provide more flexibility of the structural design, this paper introduces the combined fabrication methods of the metal patterning by conventional micromachining processes on the 3-D printed frames for a patch antenna. Challenges of the combined fabrication processes include; (1) the 3-D printed material has to be well defined to predict the RF loss or performance in particular with the effective dielectric constant, (2) the printed surface smoothness should satisfy for minimizing RF losses, and (3) microlithography process should be compatible with the 3-D printed substrate. To address the material property and define the effective dielectric constant, a ring resonator was designed, fabricated, characterized on the flat 3-D printed substrate. In the fabrication, a 10-μm gap between the feeding line in the ring resonator was successfully micromachined on the 3-D printed substrate. The surface smoothness was improved by an additional spray coating on the 3-D printed frame. A customized 3-D printed shadow mask process enabled the micropatterning process to form a 3-D shape patch antenna. The proposed fabrication process has great potential for various 3-D antennas, waveguides, and other RF components.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"20 1","pages":"234-237"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86036739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Glucose abiotic fuel cell 葡萄糖非生物燃料电池
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265559
Dominic Nnanyelugoh, A. Baingane, Peyton Miesse, G. Slaughter
{"title":"Glucose abiotic fuel cell","authors":"Dominic Nnanyelugoh, A. Baingane, Peyton Miesse, G. Slaughter","doi":"10.1109/NEMS50311.2020.9265559","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265559","url":null,"abstract":"The generation of power from diverse sources of energy continues to be of research interest as the need for zero emissions energy grows. In this paper, we report on an abiotic glucose fuel cell (BFC) that generates power from glucose that utilizes colloidal platinum electrodeposited on gold microwire (AU-co-Pt) as anode, and a platinum loaded gas diffusion electrode as cathode material. The fuel cell demonstrated an open circuit voltage of 0.55TV and a short circuit current of 98.3 μA in 20 mM glucose. This power is enough to drive a power amplification circuit, which is then used to power an LED.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"56 1","pages":"277-280"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79611943","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The Comparison of Experimental and Theoretical Study on Graphene Peeling off from SiO2 石墨烯从SiO2上剥离的实验与理论比较研究
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265556
Qi Zhang, Dongliang Zhang, X. Pang, Yulong Zhao
{"title":"The Comparison of Experimental and Theoretical Study on Graphene Peeling off from SiO2","authors":"Qi Zhang, Dongliang Zhang, X. Pang, Yulong Zhao","doi":"10.1109/NEMS50311.2020.9265556","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265556","url":null,"abstract":"By surface scanning Raman spectrum, the peeling off state of graphene from SiO2 surface was observed. It is found because the defects of graphene produced during the transferring process, graphene are easily exfoliated. A straight upward velocity was forced on the topmost graphene, and the exfoliation process of graphene was observed when weak contacted with SiO2 substrate. In multilayer graphene system, three two critical velocities to exfoliate graphene from SiO2 surface were found, and three kinds of distinct exfoliation processes took place determined by critical upward velocities. The critical velocity to exfoliate all graphene layers was even 10 times smaller than that of topmost layer. The maximum exfoliation force to exfoliate the topmost layer graphene was 3200 times larger than that of all graphene layers. And it required 139.79 mJ/m2 to get monolayer graphene from multilayers, while peel off all layers without effort.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"15 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88623621","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fabrication of Small-Scale Solid-State Nanopores by Dielectric Breakdown 介质击穿法制备小型固体纳米孔
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265603
Zengdao Gu, Dexian Ma, Zhicheng Zhang, Yin Zhang, Jingjie Sha
{"title":"Fabrication of Small-Scale Solid-State Nanopores by Dielectric Breakdown","authors":"Zengdao Gu, Dexian Ma, Zhicheng Zhang, Yin Zhang, Jingjie Sha","doi":"10.1109/NEMS50311.2020.9265603","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265603","url":null,"abstract":"As a tool for next-generation DNA sequencing, solid-state nanopores have significant advantages in terms of stability and process integration. However, traditional manufacturing methods such as FIB and TEM are pretty expensive and require higher-skilled operators. In this paper, we explored the effect of the initial leakage current on the dielectric breakdown time and then demonstrated a low-cost and rapid method of fabricating SiNx nanopores. We prepared nanopores of appropriate size by changing the voltage and cut-off current, and finally realized the preparation of nanopores as small as a few nanometers and as large as tens of nanometers. We also found that the thinned area of silicon nitride film affects the value of the initial leakage current, thereby impacting the time of dielectric breakdown. The foundation of these problems helps us to perfect the fabrication of nanopores by dielectric breakdown.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"58 1","pages":"242-246"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91163170","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Modeling and Simulation of MEMS Capacitive Displacement Sensors MEMS电容位移传感器的建模与仿真
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265618
Mehadi Hasan Ziko, M. Ghouri, A. Koel
{"title":"Modeling and Simulation of MEMS Capacitive Displacement Sensors","authors":"Mehadi Hasan Ziko, M. Ghouri, A. Koel","doi":"10.1109/NEMS50311.2020.9265618","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265618","url":null,"abstract":"The MEMS (Micro-Electro-Mechanical Systems) or NEMS (Nano-Electro-Mechanical Systems) based tensile testing platform serves the purpose of material characterization and failure behaviors at submicron and nanoscopic scales. In the electrostatic transduction of devices, capacitance and electrostatic-forces are the most critical parameters need to be evaluated for the tensile testing setup. In this work, we model a unit cell of a capacitance-based displacement sensor and actuator using the FEM (Finite Element Modeling) tool ANSYS. We study the change in capacitance with respect to transverse and lateral displacements of the capacitor plates and study the relationship between the attractive electrostatic forces generated by applied voltages. Additionally, the influence of fringe fields on the capacitance of unit cell displacement sensors is also studied. Furthermore, the simulation results obtained from FEM ANSYS are compared with the analytical results.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"14 1","pages":"171-175"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75431435","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A Contour Mode AIN Piezoelectric Resonator based on SOI Substrate 基于SOI衬底的轮廓型AIN压电谐振器
2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265593
Sitao Fei, Hao Ren
{"title":"A Contour Mode AIN Piezoelectric Resonator based on SOI Substrate","authors":"Sitao Fei, Hao Ren","doi":"10.1109/NEMS50311.2020.9265593","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265593","url":null,"abstract":"Aluminum nitride (AIN) piezoelectric MEMS resonators have been extensively developed in recent years due to their small size and CMOS compatibility. In this paper, a simple microfabrication process based on Silicon on Insulator (SOI) is presented to fabricate a contour mode resonator, and the piezoelectric material is aluminum nitride (AIN). SOI wafer is directly applied as the substrate and patterned as bottom electrode. Theoretical calculation and finite element method simulation is performed to estimate the resonant frequency. X-Ray Diffraction (XRD) is used to detect the full width at half maximum (FWHM) of AIN which is 0.164°. AFM is applied to measure the roughness of AIN film and the measured RMS roughness is 0.87 nm. Vector network analyzer and probe stations are applied to measure the one- port S parameter. It is founded that the result of resonant frequency is very close between the simulation and the actual measurement which is 146.9MHz and 144MHz. The resonator may find wide application in biosensing.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"115 1","pages":"180-183"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77916856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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