3-D Printing Assisted Micromachined RF Patch Antenna

Jun Ying Tan, T. Yun, Mohammad Almuslem, J. Kim
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Abstract

This paper presents a three-dimensional (3-D) printing assisted microfabrication of RF patch antenna. As the 3-D printing can provide more flexibility of the structural design, this paper introduces the combined fabrication methods of the metal patterning by conventional micromachining processes on the 3-D printed frames for a patch antenna. Challenges of the combined fabrication processes include; (1) the 3-D printed material has to be well defined to predict the RF loss or performance in particular with the effective dielectric constant, (2) the printed surface smoothness should satisfy for minimizing RF losses, and (3) microlithography process should be compatible with the 3-D printed substrate. To address the material property and define the effective dielectric constant, a ring resonator was designed, fabricated, characterized on the flat 3-D printed substrate. In the fabrication, a 10-μm gap between the feeding line in the ring resonator was successfully micromachined on the 3-D printed substrate. The surface smoothness was improved by an additional spray coating on the 3-D printed frame. A customized 3-D printed shadow mask process enabled the micropatterning process to form a 3-D shape patch antenna. The proposed fabrication process has great potential for various 3-D antennas, waveguides, and other RF components.
3d打印辅助微机械射频贴片天线
提出了一种三维打印辅助射频贴片天线微加工技术。由于3d打印技术可以为贴片天线的结构设计提供更大的灵活性,本文介绍了在贴片天线的3d打印框架上结合传统微加工工艺制作金属图案的方法。组合制造工艺的挑战包括:(1) 3d打印材料必须有很好的定义,以预测射频损耗或性能,特别是有效介电常数;(2)打印表面的光洁度应满足最小化射频损耗的要求;(3)微光刻工艺应与3d打印基板兼容。为了解决材料特性和确定有效介电常数,在平面3d打印衬底上设计、制造并表征了环形谐振器。在制造过程中,环形谐振腔的进给线之间的间隙被成功地微加工在3d打印衬底上。通过在3d打印框架上额外喷涂涂层,表面光滑度得到了改善。定制的3d打印阴影掩膜工艺使微图纹工艺能够形成3d形状的贴片天线。提出的制造工艺在各种三维天线、波导和其他射频元件方面具有很大的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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