2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)最新文献_第5页

UV-LED Lithography System and Characterization UV-LED光刻系统及其特性

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265607

Sabera Fahmida Shiba, J. Beavers, D. Laramore, Bo Lindstrom, James Brovles, Corey Gaither, Tyler Hieber, J. Kim

{"title":"UV-LED Lithography System and Characterization","authors":"Sabera Fahmida Shiba, J. Beavers, D. Laramore, Bo Lindstrom, James Brovles, Corey Gaither, Tyler Hieber, J. Kim","doi":"10.1109/NEMS50311.2020.9265607","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265607","url":null,"abstract":"This paper presents a design, system setup, characterization, and microfabrication of high-intensity UV-LED microlithography. Since the high enough intensity of the UV light enables even a millimeter thick SU-8 photoresist process, an array of high-intensity UV-LEDs has been optimized as a light source of the microlithography system. A simple waveguide with a single optical lens has made light collimation without high attenuation of the light intensity while the rotation of the light source provides uniform light distribution. Adopting the x-y-z-r stage to the light source enables a mask aligning function together with light intensity and exposure time controllers. The maximum intensity of 448 mW/cm2 has been measured and the light collimation has been achieved within 5°. The uniform light distribution was measured without and with light rotation. The rotating light source resulted in approximately 29% better than the no-rotation case. The LED source has been stable over 100 hours of operation. The test microstructures include 3 μm lines, high-aspect-ratio micropillars, and 2-mm tall SU-8 pillar array. The proposed system has great flexibility and versatility as a mask aligner system that can be used as both conventional and MEMS microfabrication.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"11 1","pages":"73-76"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86491055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

A Self-Powered Vehicle Speed Sensor based on an Inertial Rotary Electromagnetic Energy Harvester 基于惯性旋转电磁能量采集器的自供电车辆速度传感器

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265523

Yifan Wang, Xiangtian Dai, Anxin Luo, Fei Wang

引用次数: 0

Performance Evaluation Of Via-free Non-spiral Planar Microcoils 无过孔非螺旋平面微线圈的性能评价

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265635

S. Krishnapriya, R. Komaragiri, J. SujaK.

引用次数: 0

Design and Analysis of a Band Pass Setback Arming Mechanism in MEMS Safety and Arming Device MEMS安全防护装置中带通挫折防护机构的设计与分析

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265564

Hengbo Zhu, Yun Cao, Z. Xi, W. Nie

引用次数: 0

Magnetic tweezers manipulate DNA slowdown based on nanopores 磁性镊子根据纳米孔操纵DNA减速

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265589

Gang Wang, Haisong Sun, Fan Luo, Chang Chen, Jingjie Sha

{"title":"Magnetic tweezers manipulate DNA slowdown based on nanopores","authors":"Gang Wang, Haisong Sun, Fan Luo, Chang Chen, Jingjie Sha","doi":"10.1109/NEMS50311.2020.9265589","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265589","url":null,"abstract":"As a nano-sensor, solid-state nanopores have demonstrated their high sensitivity in the field of rapid detection of single molecules, but they still face many challenges in distinguishing the internal bases of DNA. Driven by voltage, the speed of DNA passing through the nanopore is very fast. When the voltage is 200mv, the via speed of DNA reaches 30base/us. At such a speed, the current change caused by a single base is difficult to be used by existing instruments. catch. Effectively reducing the speed of DNA through nanopores has become a major challenge. In this paper, the magnetic tweezers system platform was designed and constructed; the biobeads-streptavidin was connected between the magnetic beads and DNA, and the influence of the bias voltage on the structure of the magnetic beads-DNA was studied; the magnetic beads were manipulated using the magnetic tweezers system , Actively control DNA to reverse through nanopores, significantly reducing the speed of DNA passing through solid nanopores, and achieving active control of the speed of DNA passing through solid nanopores; solving key technical problems in detecting single bases in solid nanopores Provides ideas.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"28 1","pages":"342-347"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73063922","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

DropPNA-GO: A Single-cell Uropathogen Sensor Based on PNA Probes and Graphene Oxide in Picoliter Droplets DropPNA-GO:基于PNA探针和皮升液滴氧化石墨烯的单细胞尿路病原体传感器

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265521

Pengfei Zhang, Aniruddha M. Kaushik, K. Hsieh, Tza-Huei Wang

{"title":"DropPNA-GO: A Single-cell Uropathogen Sensor Based on PNA Probes and Graphene Oxide in Picoliter Droplets","authors":"Pengfei Zhang, Aniruddha M. Kaushik, K. Hsieh, Tza-Huei Wang","doi":"10.1109/NEMS50311.2020.9265521","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265521","url":null,"abstract":"Rapid, sensitive, and specific methods for pathogen detection and phenotypic antibiotic susceptibility testing (ID/AST) are essential for combating the rise and spread of antimicrobial resistance. Towards this end, peptide nucleic acid (PNA) probes have been used for hybridization-based detection with enhanced sensitivity and specificity. At the same time, graphene oxide (GO) has been shown as a robust quencher for PNA probes with improved sensitivity and minimal cost. Here we report a novel PNA-GO biosensor, which uses GO as a universal quencher for PNA probe-based amplification-free pathogen ID and quantification in 32 min by means of a droplet microfluidic platform (dropPNA-GO). We have optimized GO concentration to maximize sensitivity. We show the dropPNA-GO biosensor enables specific pathogen ID and quantification across 4 orders of magnitude in picoliter droplets. With apparent advantages in simplicity and cost, we foresee further expansion of our dropPNA-GO biosensor for rapid and multiplexed ID/AST applications.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"2 1","pages":"537-540"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75235659","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of the Next Generation Microshutter Arrays for Space Telescope Applications 用于空间望远镜的新一代微快门阵列的研制

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265604

Meng-Ping Chang, R. Brekosky, Ari D. Brown, N. Costen, M. Greenhouse, G. Hu, Kyowon Kim, C. Kotecki, A. Kutyrev, Mary J. Li, S. McCandliss, Frederick H. Wang, E. Aguayo

{"title":"Development of the Next Generation Microshutter Arrays for Space Telescope Applications","authors":"Meng-Ping Chang, R. Brekosky, Ari D. Brown, N. Costen, M. Greenhouse, G. Hu, Kyowon Kim, C. Kotecki, A. Kutyrev, Mary J. Li, S. McCandliss, Frederick H. Wang, E. Aguayo","doi":"10.1109/NEMS50311.2020.9265604","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265604","url":null,"abstract":"We present the first space flight use of the electrostatically actuated Next Generation MicroShutter Array systems (NGMSA) as multiple celestial object selectors developed for NASA space telescope missions at the NASA Goddard Space Flight Center. The NGMSA assembly was installed in the Next Generation Far-ultraviolet Off Rowland-circle Telescope for Imaging and Spectroscopy (NG-FORTIS) and successfully launched recently from the White Sands Missile Range in October 2019. We started to investigate this electrostatic NGMSA technology at the late stages of James Webb Space Telescope (JWST) in 2009 to strategically align with requirements of larger field of view for future telescopes in space. The NGMSA in NG-FORTIS is a 128 X 64 programable 2-D addressing microfabricated shutter array while the current NGMSA system under development is a 736 X 384 large format. The new microshutter array (MSA) features several unique designs aiming at performance improvements: electrostatic actuation, thinned microshutters, better electrical wall insulation and anti-stiction surface coating. To ensure reliable operation in the space environment, NGMSA systems have passed a series of critical environment tests including acoustic, random vibration, life cycle of operation, thermal cycling, and optical contrast tests. The successful launch of the NG-FORTIS sounding rocket equipped with NGMSA demonstrates our NGMSA technology have achieved the highest NASA Technical Readiness Level 9 for sounding rocket space applications.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"121 1","pages":"89-92"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75177270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Molecular Dynamics Simulation for Protein Unfolding 蛋白质展开的分子动力学模拟

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265552

Meng Yu, Wei Si, Jingjie Sha

引用次数: 1

The effect of substrate on the tribological properties of graphene 衬底对石墨烯摩擦学性能的影响

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265622

Xin Feng, Lingling Li, Zhiyong Wei

引用次数: 1

2 x 3 Arrayed CMOS Capacitive Biosensors for Detection of microRNAs on a Microfluidic System 2 × 3阵列CMOS电容式生物传感器用于微流体系统上的微小rna检测

2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS) Pub Date : 2020-09-27 DOI: 10.1109/NEMS50311.2020.9265636

Yu-Husan Kuo, Chi-Chien Huang, Yi-Sin Chen, Po-Chiun Huang, Gwo-Bin Lee

{"title":"2 x 3 Arrayed CMOS Capacitive Biosensors for Detection of microRNAs on a Microfluidic System","authors":"Yu-Husan Kuo, Chi-Chien Huang, Yi-Sin Chen, Po-Chiun Huang, Gwo-Bin Lee","doi":"10.1109/NEMS50311.2020.9265636","DOIUrl":"https://doi.org/10.1109/NEMS50311.2020.9265636","url":null,"abstract":"Breast cancer is one of the most important cancers among women worldwide. Since breast cancer is prone to metastasis and recurrence, mortality is relatively high if not diagnosed early. Therefore, it is important to develop a device that can quickly and accurately diagnose breast cancer. Recently, microRNAs such as microRNA-195 and microRNA-126 have been reported to act as biomarkers for breast cancer diagnosis. Therefore, this study reported an integrated microfluidic system capable of extracting microRNAs by microfluidic techniques, detecting and quantifying microRNAs by using complementary-metal-oxide-semiconductor (CMOS) capacitive biosensors for rapid and accurate diagnosis of breast cancer. Monolithic sensor with integrated-circuits reduces parasitic effects and submicron interdigitated microelectrodes as sensing interfaces significantly improves sensitivity. microRNA-195 detection for concentrations ranging from 1 fM to 10 pM could be successfully obtained, allowing detection in physiological conditions for cancer patients in the near future.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"162 1","pages":"541-544"},"PeriodicalIF":0.0,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80237834","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0