Performance Evaluation Of Via-free Non-spiral Planar Microcoils

Abstract

Planar microcoils are essential components in magnetic biosensors for the detection of magnetic micro or nanoparticles. The particles are surface-functionalized to recognize specific molecular targets. Various nonspiral planar coil geometries are analyzed in this work to select the most suitable geometry for biosensing applications. Nonspiral planar coils have the advantage of the easier fabrication process and lower coil parasitics than that of its spiral counterparts. The microcoils are fabricated using a single mask level lithography and characterized to extract the electrical parameters of the microcoil. The results suggest that the circular geometry possesses the lowest series coil resistance and a uniform magnetic field distribution along the coil turns suitable for biosensing applications among the various nonspiral planar microcoils under consideration.