Nanoscale Research Letters最新文献

{"title":"Self-assembled metal cluster-carbon quantum dot heterostructures with photothermal antibacterial properties","authors":"Xulei Yuan,&nbsp;Shaojun Liu,&nbsp;Jun Wang,&nbsp;Jiaqi Liu,&nbsp;Fang Qin,&nbsp;Min Zhang,&nbsp;Jinling Song,&nbsp;Xiang Mao","doi":"10.1186/s11671-025-04243-5","DOIUrl":"10.1186/s11671-025-04243-5","url":null,"abstract":"<div><p>Noble metal (Au, Ag, Cu) cluster is an emerging category of promising interest functions in form of designed constructions. Among various candidates, carbon dots could be treated as one interesting component for synthesis functional candidates while heterogeneous contents are orderly integrated together. In this work, we successfully fabricate heterostructural nanoparticles (HNPs) based on noble metal clusters (Au, Ag and Cu) integrated with carbon quantum dots (CQDs) through self-assembling approach. These HNPs demonstrate remarkable photothermal efficiency, high stability, low hemolysis ratio, excellent biocompatibility and significant bactericidal effects, making them promising candidates for photothermal applications. Notably, the Au–C achieved remarkable photothermal conversion efficiency (PTE) of 54.16% and antibacterial rate over 99%, which also significantly accelerated the healing process in methicillin-resistant <i>Staphylococcus aureus</i> (<i>MRSA)</i>-infected subcutaneous abscess model mice. Our findings highlight the potential of these self-assembled heterostructures, especially Au–C, as effective and promising photothermal agents with antibacterial functionality.</p><h3>Graphical Abstract</h3>\u0000<div><figure><div><div><picture><source><img></source></picture></div></div></figure></div></div>","PeriodicalId":51136,"journal":{"name":"Nanoscale Research Letters","volume":"20 1","pages":""},"PeriodicalIF":5.5,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s11671-025-04243-5.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143740859","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Bibliometric analysis of nanoparticle research for diagnostics and therapeutics in hepatocellular carcinoma","authors":"Xiaoqing Li,&nbsp;Yue Li,&nbsp;Jingyan Zhu,&nbsp;Yang Yang,&nbsp;Shipeng Yang","doi":"10.1186/s11671-025-04226-6","DOIUrl":"10.1186/s11671-025-04226-6","url":null,"abstract":"<div><h3>Objectives</h3><p>The aim of this study was to explore the bibliometric analysis of nanomaterials-based therapies for hepatocellular carcinoma as a means of assessing the current state of development and future trends in the field.</p><h3>Materials and methods</h3><p>Literature on hepatocellular carcinoma and nanomedicine interactions was searched from the core database of the Web of Science and bibliometric and visualisation analyses were performed using VOSviewer, CiteSpace and GraphPad Prism data analysis software. We focused on important keywords, countries, authors, affiliations, journals, and literature in the field of nanomaterials for HCC.</p><h3>Results</h3><p>The search resulted in the finalization of 421 documents. The search resulted in the finalization of 421 documents. From 2008 to 2023, nanomedicine research in HCC has developed rapidly, and the number of published papers has steadily increased, increasing by about 2300%. There are currently 57 countries involved in research in this area. Among them, The USA had the strongest international cooperation network and cooperated most closely with China. Gene delivery and carbon nanotubes were early keywords, immunotherapy and nanocarriers are recent research hotspots. It is important that the selection of nanocarriers and drug delivery have become the core trends driving the development of hepatocellular carcinoma.</p><h3>Conclusion</h3><p>The combination of nanomaterials with traditional imaging techniques such as MRI can improve the early diagnosis rate of HCC. Nanomaterials can achieve precise targeting of cancer cells by encapsulating drugs, loading bioactive molecules or modifying specific targeting ligands, thus significantly improving drug efficacy and effectively reducing adverse reactions in therapy.</p></div>","PeriodicalId":51136,"journal":{"name":"Nanoscale Research Letters","volume":"20 1","pages":""},"PeriodicalIF":5.5,"publicationDate":"2025-03-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s11671-025-04226-6.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143735425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Recent progress of nanomaterials-based composite hydrogel sensors for human–machine interactions","authors":"Yuyang Lin,&nbsp;Aobin Wu,&nbsp;Yitao Zhang,&nbsp;Haiyang Duan,&nbsp;Pengcheng Zhu,&nbsp;Yanchao Mao","doi":"10.1186/s11671-025-04240-8","DOIUrl":"10.1186/s11671-025-04240-8","url":null,"abstract":"<div><p>Hydrogel-based flexible sensors have demonstrated significant advantages in the fields of flexible electronics and human–machine interactions (HMIs), including outstanding flexibility, high sensitivity, excellent conductivity, and exceptional biocompatibility, making them ideal materials for next-generation smart HMI sensors. However, traditional hydrogel sensors still face numerous challenges in terms of reliability, multifunctionality, and environmental adaptability, which limit their performance in complex application scenarios. Nanomaterial-based composite hydrogels significantly improve the mechanical properties, conductivity, and multifunctionality of hydrogels by incorporating conductive nanomaterials, thereby driving the rapid development of wearable sensors for HMIs. This review systematically summarizes the latest research progress on hydrogels based on carbon nanomaterials, metal nanomaterials, and two-dimensional MXene nanomaterials, and provides a comprehensive analysis of their sensing mechanisms in HMI, including triboelectric nanogenerator mechanism, stress-resistance response mechanism, and electrophysiological acquisition mechanism. The review further explores the applications of composite hydrogel-based sensors in personal electronic device control, virtual reality/augmented reality (VR/AR) game interaction, and robotic control. Finally, the current technical status and future development directions of nanomaterial composite hydrogel sensors are summarized. We hope that this review will provide valuable insights and inspiration for the future design of nanocomposite hydrogel-based flexible sensors in HMI applications.</p></div>","PeriodicalId":51136,"journal":{"name":"Nanoscale Research Letters","volume":"20 1","pages":""},"PeriodicalIF":5.5,"publicationDate":"2025-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s11671-025-04240-8.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143726635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Ecofriendly synthesis of cellulose-silver nanocomposites and the evaluation of their antibacterial activity","authors":"Ibtissam Charti,&nbsp;Said Sair,&nbsp;Oussama Rafik,&nbsp;Younes Abboud,&nbsp;Abdeslam El Bouari","doi":"10.1186/s11671-024-04156-9","DOIUrl":"10.1186/s11671-024-04156-9","url":null,"abstract":"<div><p>The integration of nanotechnology with cellulose matrices has gained considerable attention due to the resulting enhanced mechanical, thermal, and antibacterial properties. This study introduces a facile and environment-friendly microwave-assisted method for synthesizing cellulose/Ag nanocomposites. Palm date wood extract was used as an efficient reductant for silver ions, facilitating their deposition onto cellulose surface. The cellulose-silver nanocomposite was synthesized by reducing silver in situ on the surface of cellulose extracted from date palm wood fibers. The extraction involved a series of specific chemical treatments, including alkalization and whitening. The resulting nanocomposite was subjected to various characterization techniques. FTIR spectra showed the elimination of non-cellulosic components post chemical treatments, while XRD affirmed the presence of cellulose peaks. Experimental results indicated that the palm date wood extract was an effective reductant for silver ions favoring the formation of silver with higher crystallinity and mass content in the nanocomposites. Silver nanoparticles were identified within the cellulose matrix through Scanning Electron Microscopy (SEM). The FTIR spectral characterization studies demonstrated the existence of silver in the cellulose nanocomposites. Additionally, the XRD analysis confirmed the formation of silver peaks within these composites. Qualitative antibacterial tests towards gram negative (Escherichia coli) and gram positive (Micrococcus luteus) bacteria were carried out and the results showed that the Ag-MFCs effectively inhibit the growth of both types of bacteria, with 9–13 mm of inhibition zone for both the bacteria. The ecofriendly synthesis method using cellulose as a stabilizing agent proved to be effective in producing well-dispersed spherical AgNPs. The synthesized cellulose silver nanocomposite demonstrated notable antibacterial properties, indicating their potential for applications in medical and environmental fields. This study highlights the feasibility of using green synthesis methods to develop nanocomposites with significant antibacterial activity.</p></div>","PeriodicalId":51136,"journal":{"name":"Nanoscale Research Letters","volume":"20 1","pages":""},"PeriodicalIF":5.5,"publicationDate":"2025-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s11671-024-04156-9.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143716950","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Polyherbal nanoformulation: a potent antifungal agent on fungal pathogens of Coffea arabica","authors":"S. Ranjani,&nbsp;S. Hemalatha","doi":"10.1186/s11671-025-04236-4","DOIUrl":"10.1186/s11671-025-04236-4","url":null,"abstract":"<div><p>Agriculture is the backbone of all countries which dictates the major economy of the country. The management of pathogens is critical in the field of agriculture. Many species of pathogenic fungi infect a broad range of hosts including cash crops and agricultural crops. Coffee is one of the most important commercial crop in the economy of many countries in the world. <i>Coffea arabica</i> is infected by several fungal species and results in decrease in the quality and quantity of coffee berries. Infection of fungi in plants not only kills the plants and fruit yield but also affect human being through toxin intoxication. Chemical fungicides are the primary choice for the control of plant pathogenic fungi. However, these chemicals pollute the environment, disturb the normal flora, fauna and aquatic environment. The intake of fungicides through inhalation or ingestion results in serious health consequences including immunological, endocrinal, neurological, gynaecological, and carcinogenic effects. Hence, it is a challenge to find a novel alternative green solution to control both pathogenic fungi and to detoxify the fungal toxins. Green nanotechnology can be adopted to develop eco-friendly nanoformulation to control fungal pathogens. In this study, fungal pathogens were isolated from infected coffee plants and identified through sequencing. The novelty of the study stands on uniqueness of Polyherbal nanoformulation which was synthesized by using Triphala. Antifungal studies were carried out by using a developed Polyherbal nanoformulation. From the results, fungal pathogens were identified as <i>Cladorrhinum flexuosum, Rigidoporus vinctus, Mucor circinelloides, Mucor lusitanicus, and Nigrospora oryzae.</i> On treating these fungal pathogens with PHNF, the radial growth of fungal strains was effectively controlled even at lower concentration of 3.125 µg/ml. The specific contribution of PHNF is ‘synergism’ which plays a significant role in controlling the growth of tested fungal pathogens. On further exploration of PHNF in field conditions will help to optimize the dosage for the commercial development of nano based fungicide for the benefit of farmers as well as a solution to global problem. In addition, these PHNF can be formulated to nanosprays and nanomaterials to control the fungal growth during post-harvest condition.</p></div>","PeriodicalId":51136,"journal":{"name":"Nanoscale Research Letters","volume":"20 1","pages":""},"PeriodicalIF":5.5,"publicationDate":"2025-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s11671-025-04236-4.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143706904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Efficiency improvement of AlGaInP-based red micron-scale light-emitting diodes using sidewall steam oxidation","authors":"Yuan-Chao Wang,&nbsp;Cheng-Jui Yu,&nbsp;Jian-Jang Huang","doi":"10.1186/s11671-025-04241-7","DOIUrl":"10.1186/s11671-025-04241-7","url":null,"abstract":"<div><p>Although micro-LED displays are considered emerging display technology, their micron-scale LED chip size suffers from significant efficiency degradation, which affects the display's power budget. The low light output efficiency is mainly attributed to an increased weighting of sidewall nonradiative recombination with the perimeter-area ratio of smaller chip size. To prevent carrier recombination in the dry-etching induced sidewall defects, we, in this study, introduce insulting regions in the mesa sidewall of the red LED. The insulting regions were created by oxidizing the metal components in the epi-structures. When the chip sizes of 100 × 100, 50 × 50, and 25 × 25 μm² are compared, our steam oxidation technique efficiently suppresses sidewall current flow and nonradiative recombination. The suppression is more obvious for a smaller mesa size. For a 25 × 25 μm² LED mesa, optical output power density increases by 31.4% compared to a device without oxidation. Additionally, under 20 A/cm² injection, a 25 × 25 μm² LED with sidewall oxidation shows only an 11.3% reduction in output power density compared to a larger 100 × 100 μm² device without oxidation. These results highlight the potential of sidewall oxidation in overcoming efficiency degradation issues for micro-red LEDs in displays.</p></div>","PeriodicalId":51136,"journal":{"name":"Nanoscale Research Letters","volume":"20 1","pages":""},"PeriodicalIF":5.5,"publicationDate":"2025-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s11671-025-04241-7.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143706953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The delivery carriers and applications for Xiaobojian","authors":"Shiyu Huang,&nbsp;Gangliang Huang","doi":"10.1186/s11671-025-04239-1","DOIUrl":"10.1186/s11671-025-04239-1","url":null,"abstract":"<div><p>Berberine, also known as Xiaobojian (XBJ), is a quaternary ammonium alkaloid isolated from the traditional Chinese medicine <i>Coptis chinensis</i>, and is the main effective ingredient for antibacterial purpose. This work systematically reviewed recent researches on XBJ in the whole range of delivery technologies. Compared with XBJ monomer administration, other forms of drug administration, such as tablets, pellets, XBJ polymer delivery system, lipid delivery system, superdeformed vesicles nanocrystallization or emulsification of XBJ and some special substances, will increase the absorption of XBJ. XBJ can be administered through various carriers, including oral administration and topical application. The importance of XBJ carrier administration is mainly reflected in wide application prospects, various pharmacological effects, and improving drug efficacy.</p><h3>Graphical Abstract</h3><div><figure><div><div><picture><img></picture></div></div></figure></div></div>","PeriodicalId":51136,"journal":{"name":"Nanoscale Research Letters","volume":"20 1","pages":""},"PeriodicalIF":5.5,"publicationDate":"2025-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s11671-025-04239-1.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143706957","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Length-flexible strategies for efficient SERS performance in gold-nanorod-gapped nanoantennas","authors":"Sergio F. Flores-Correa,&nbsp;L. M. León Hilario,&nbsp;I. A. Ramos-Pérez,&nbsp;Andres A. Reynoso","doi":"10.1186/s11671-025-04228-4","DOIUrl":"10.1186/s11671-025-04228-4","url":null,"abstract":"<div><p>Surface-enhanced Raman spectroscopy (SERS) using gold-nanorod-dimer nanoantennas has shown great potential in various applications. This reflects in their large values of the customary figure of merit of SERS: the enhancement factor (EF), which is essentially the fourth power of the electric field integrated at the gap, the location at which target molecules are to be sensed. However, fabrication errors in the nanorod lengths can lead to significant variations in the enhancement factor, resulting in performance limitations whenever low values of EF are encountered. Here, we report both design and procedural strategies to address this issue. First, we show that by reducing the nanorod diameter from 360 to 260 nm, the EF minima can be avoided for any nanorod length, mitigating the impact of fabrication errors. In addition, we explore the influence of incident wave polarization and orientation on the EF. Our simulations reveal that by tilting the excitation away from normal incidence, it is possible to substantially enhance EF under conditions that would otherwise exhibit low enhancement. In particular, this includes the case of 360 nm diameter. These findings expand the fabrication tolerance and broaden the range of usability of gold-nanorod-dimer nanoantennas, enabling more robust and reliable SERS performance. Importantly, we also show that these strategies also apply to nanoantennas with covered nanorod ends, which are of particular interest for realizing hybrid devices that combine SERS with electrical transport measurements.</p></div>","PeriodicalId":51136,"journal":{"name":"Nanoscale Research Letters","volume":"20 1","pages":""},"PeriodicalIF":5.5,"publicationDate":"2025-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s11671-025-04228-4.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143688386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Bioinspired Fe3O4@Ag@ indocyanine green/adenosine triphosphate nanoenzyme in synergistic antibacterial performance","authors":"Dongmei Hu,&nbsp;Qing Wu,&nbsp;Yujun Yang,&nbsp;Yan Wang,&nbsp;Yanhao Li,&nbsp;Haixiang Chen,&nbsp;Liang Tang,&nbsp;Xiang Mao,&nbsp;Zhenyu Wang","doi":"10.1186/s11671-025-04232-8","DOIUrl":"10.1186/s11671-025-04232-8","url":null,"abstract":"<div><p>Metal-based nanoenzymes with excellent biocompatibility and stable chemical properties are an effective antimicrobial agent against bacterial resistance due to their radical-mediated catalysis. In this work, due to the pH of most bacterial infection sites being close to neutral, targeting the problem of Fe₃O₄@Ag difficulty in maintaining the catalytic activity of nanoenzymes in neutral environments, we prepare a novel multifunctional Fe₃O₄@Ag@ indocyanine green/adenosine triphosphate peroxidase nanoenzymes for synergistic antibacterial activity. ICG (Indocyanine Green) and ATP (Adenosine triphosphate) are adsorbed on the surface of Fe₃O₄@Ag through electrostatic adsorption to form its structure. The cell viability remained above 90%, indicating its good biocompatibility. By complexing ATP with nanoenzymes to participate in single electron transfer and binding with Fe (II), ATP promotes the sudden release of hydroxyl radical (·OH) from the system, successfully transferring Fe₃O₄@Ag the peroxidase activity of nanoenzymes extends to neutral pH. By utilizing ICG as a photosensitizer and a sonosensitizer, under the combined treatment of near-infrared light and ultrasound, the photodynamic therapy (PDT)/photothermal therapy (PTT)/sonodynamic therapy (SDT) functions can be achieved, achieving multifunctional synergistic antibacterial effects. In a neutral environment, its bactericidal efficiency against Gram negative (<i>Escherichia coli</i>) and Gram positive (<i>Staphylococcus aureus</i>) is 99.9% and 99.7%, respectively, providing a new multi-mode synergistic antibacterial strategy for bacterial infections.</p><h3>Graphical abstract</h3><div><figure><div><div><picture><source><img></source></picture></div><div><p>Metal based nanoenzymes with excellent biocompatibility and stable chemical properties are an effective antimicrobial agent against bacterial resistance due to their radical mediated catalysis. The prepared multifunctional Fe₃O₄@Ag@ICG/ATP exhibit peroxidase nanoenzymes perform ance for synergistic antibacterial activity. ICG and ATP are adsorbed on the surface of Fe₃O₄@Ag through electrostatic adsorption to form its structure</p></div></div></figure></div></div>","PeriodicalId":51136,"journal":{"name":"Nanoscale Research Letters","volume":"20 1","pages":""},"PeriodicalIF":5.5,"publicationDate":"2025-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s11671-025-04232-8.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143698448","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Development of an innovative low-temperature PEALD process for stress-compensated TiO2 and SiO2 multilayer anti-reflective coatings","authors":"Duy Thanh Cu,&nbsp;Kuan-Yu Ko,&nbsp;Wen-Hao Cho,&nbsp;Chao-Te Lee,&nbsp;Meng-Chi Li,&nbsp;Chien-Cheng Kuo","doi":"10.1186/s11671-025-04238-2","DOIUrl":"10.1186/s11671-025-04238-2","url":null,"abstract":"<div><p>This study presents a low-temperature plasma-enhanced atomic layer deposition (PEALD) technique for fabricating high-performance, stress-reduced anti-reflective coatings (ARCs). To the best of our knowledge, this is the first extensive study on titanium dioxide (TiO₂)/silicon dioxide (SiO₂) stacking with PEALD at such a low temperature of 70 °C, which may help to overcome high-temperature deposition issues and mechanical stress for polymer substrates. Despite the presence of impurities in the low-temperature deposited films, the measured extinction coefficient (k &lt; 10^–4) indicates negligible optical absorption in both TiO₂ and SiO₂ layers, ensuring optimal performance for ARCs. Stress compensation is observed between tensile TiO₂ films (≈ 220 MPa) and compressive SiO₂ films (≈ − 35 MPa). For multi-layer ARCs, this combination strategy leads to a very low total stress of 48 MPa, which is a big step forward for stress control in optical coatings. This stress-reduction effect remains effective even when the thickness difference reaches up to 9.6%. This consistency has been demonstrated in real-world applications, where achieving an ideal level of thinness can be challenging. The optimized process at 150 W plasma power produces high-quality optics with an average reflectivity of 0.35% in the visible range while maintaining low stress, a significant achievement in low temperature deposited optical coatings. The choice of common, cost-effective materials like SiO₂ and TiO₂ makes this approach easily scalable for industrial use and can see the future of manufacturing ARCs for various applications. These films are characterized by a low density of defects and an amorphous structure with the smoothness of their surface being close to one atomic monolayer (≈ 0.2 nm), which indicates their high optical quality, comparable to films deposited at high temperatures. The low-temperature PEALD presented in this work not only pushes the boundary in advanced optical coatings but also enlarges the capacity in coating temperature-sensitive substrates and complex 3D structures. This innovation paves the way for applications in bendable electronics, high-performance optical components, and next generation display devices.</p></div>","PeriodicalId":51136,"journal":{"name":"Nanoscale Research Letters","volume":"20 1","pages":""},"PeriodicalIF":5.5,"publicationDate":"2025-03-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1186/s11671-025-04238-2.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143688324","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}