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In situ TEM investigation of nickel catalytic graphitization 镍催化石墨化的原位 TEM 研究
IF 1 2区 材料科学
Materials Today Advances Pub Date : 2024-05-13 DOI: 10.1016/j.mtadv.2024.100494
Jaemin Kim, Seungwoo Son, Myeonggi Choe, Zonghoon Lee
{"title":"In situ TEM investigation of nickel catalytic graphitization","authors":"Jaemin Kim, Seungwoo Son, Myeonggi Choe, Zonghoon Lee","doi":"10.1016/j.mtadv.2024.100494","DOIUrl":"https://doi.org/10.1016/j.mtadv.2024.100494","url":null,"abstract":"With the increasing demand for production of graphitic materials for various applications, it becomes crucial to get a fundamental understanding of how graphene layers grow on metal catalysts. Here, we performed an heating transmission electron microscopy (TEM) study to understand the mechanism of graphitization of amorphous carbon (a-C) on Ni catalyst by following graphene growth at atomic resolution in real time. By discerning the NiC phase from the pure Ni phase during the graphitic carbon growth process, we demonstrate that growth occurs through the carbide graphitization of NiC. Additionally, during the graphitization, Ni diffusion has a crucial effect on the structure of the resulting graphene. Under our experimental conditions, we observed graphene contains islands of multilayers. Based on our experimental results, we suggest a mechanism for graphitization of the a-C/Ni system and explain the dynamics resulting from Ni diffusion. Our study can contribute to the control of graphitization by using Ni catalyst in the production of graphene and other graphitic materials.","PeriodicalId":48495,"journal":{"name":"Materials Today Advances","volume":"42 1","pages":""},"PeriodicalIF":10.0,"publicationDate":"2024-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141063760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Performance improvement of blue light micro-light emitting diodes (< 20 μm) by neutral beam etching process 通过中性束蚀刻工艺提高蓝光微型发光二极管(< 20 μm)的性能
IF 1 2区 材料科学
Materials Today Advances Pub Date : 2024-05-11 DOI: 10.1016/j.mtadv.2024.100496
Yu-Hsuan Hsu, Yun-Cheng Hsu, Chien-Chung Lin, Yi-Hsin Lin, Dong-Sing Wuu, Hao-Chung Kuo, Seiji Samukawa, Ray-Hua Horng
{"title":"Performance improvement of blue light micro-light emitting diodes (< 20 μm) by neutral beam etching process","authors":"Yu-Hsuan Hsu, Yun-Cheng Hsu, Chien-Chung Lin, Yi-Hsin Lin, Dong-Sing Wuu, Hao-Chung Kuo, Seiji Samukawa, Ray-Hua Horng","doi":"10.1016/j.mtadv.2024.100496","DOIUrl":"https://doi.org/10.1016/j.mtadv.2024.100496","url":null,"abstract":"In this study, micro-light emitting diodes array (μLEDs) with dimensions of 5 μm and 15 μm chip size were fabricated using Neutral Beam Etching (NBE) processes. Size-dependent issues of μLEDs processed by traditional inductively coupled plasma-reactive ion etching (ICPRIE) were alleviated by NBE technology, which exhibited lower equivalent resistance, turn-on voltage, and Ideality factor as compared with those of μLEDs by ICPRIE. Additionally, higher light output power of μLEDs processed by NBE with both 5 μm and 15 μm resulted in higher EQE 7.6 % and 7.7 % than those of μLEDs processed by ICPRIE. Furthermore, the size effect led to a decrease in EQE values of the ICPRIE sample by 0.4 %, but only a 0.1 % decay in NBE. Overall, samples fabricated by the NBE process exhibited superior optoelectronic characteristics. Finally, non-radiative recombination behaviors on the mesa sidewall were verified by cathodoluminescence analysis, showing significant decay in ICPRIE samples but not in NBE samples. These results demonstrated the potential of the NBE process for fabricating small chip sizes blue-light μLEDs required for high-brightness, high-efficiency, and high-resolution μLED displays.","PeriodicalId":48495,"journal":{"name":"Materials Today Advances","volume":"238 1","pages":""},"PeriodicalIF":10.0,"publicationDate":"2024-05-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141063704","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Strategies for robust electrocatalytic activity of 2D materials: ORR, OER, HER, and CO2RR 增强二维材料电催化活性的策略:ORR、OER、HER 和 CO2RR
IF 1 2区 材料科学
Materials Today Advances Pub Date : 2024-05-08 DOI: 10.1016/j.mtadv.2024.100488
Ali Raza, Jahan Zeb Hassan, Usman Qumar, Ayesha Zaheer, Zaheer Ud Din Babar, Vincenzo Iannotti, Antonio Cassinese
{"title":"Strategies for robust electrocatalytic activity of 2D materials: ORR, OER, HER, and CO2RR","authors":"Ali Raza, Jahan Zeb Hassan, Usman Qumar, Ayesha Zaheer, Zaheer Ud Din Babar, Vincenzo Iannotti, Antonio Cassinese","doi":"10.1016/j.mtadv.2024.100488","DOIUrl":"https://doi.org/10.1016/j.mtadv.2024.100488","url":null,"abstract":"Electrocatalysis utilizing 2D materials is an encouraging approach for advancing sustainable energy conversion technologies. This review explores the strategies employed to achieve robust electrocatalytic activity of 2D materials in key reactions, namely, the OER, HER, and CORR. The distinct structural and electrical characteristics of 2D materials offer opportunities for rapid catalytic performance, indicating significant energy efficiency and selectivity. We systematically discuss the factors governing the electrocatalytic efficiency of two-dimensional materials, including their intrinsic properties, surface modification techniques, heterostructure engineering, and the role of defects. Furthermore, we summarize the recent advances in experimental and theoretical studies to understand the fundamental mechanisms of 2D materials with respect to their catalytic behavior. For the HER, OER, and ORR, defect engineering, phase engineering, interface engineering, and heteroatom doping techniques have been explored. In addition, in the case of the CORR, surface modification, surface-structure tuning, and electrolyte and electrolyzer optimization strategies were examined. This review emphasizes prospective two-dimensional materials as efficient and sustainable electrocatalysts for energy conversion processes. Moreover, it provides future insights into this rapidly evolving field and highlights the possible challenges. In conclusion, it aims to serve as a remarkable resource for researchers seeking to harness the potential response of two-dimensional materials for sustainable energy conversion applications.","PeriodicalId":48495,"journal":{"name":"Materials Today Advances","volume":"111 1","pages":""},"PeriodicalIF":10.0,"publicationDate":"2024-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140934550","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
First integration of Ni barrier layer for enhanced threshold switching characteristics in Ag/HfO2-based TS device 在基于 Ag/HfO2 的 TS 器件中首次集成镍阻挡层以增强阈值开关特性
IF 1 2区 材料科学
Materials Today Advances Pub Date : 2024-05-03 DOI: 10.1016/j.mtadv.2024.100492
Daeyoung Chu, Sanghyun Kang, Gwon Kim, Juho Sung, Jaehyuk Lim, Yejoo Choi, Donghwan Han, Changhwan Shin
{"title":"First integration of Ni barrier layer for enhanced threshold switching characteristics in Ag/HfO2-based TS device","authors":"Daeyoung Chu, Sanghyun Kang, Gwon Kim, Juho Sung, Jaehyuk Lim, Yejoo Choi, Donghwan Han, Changhwan Shin","doi":"10.1016/j.mtadv.2024.100492","DOIUrl":"https://doi.org/10.1016/j.mtadv.2024.100492","url":null,"abstract":"Utilizing Ag/HfO with nickel (Ni) as a barrier layer, a novel threshold switching (TS) device is devised to overcome challenges such as low reliability, high threshold voltage, and high leakage current. Compared against an Ag/Ti/HfO-based TS device, the Ag/Ni/HfO-based TS device exhibits improved electrical characteristics: yield enhancement from 31.7 % to 40.0 %, enhanced endurance from ∼10 cycles to ∼300 cycles, and suppression in off-state current (I) from 1.2 × 10 A to 5.2 × 10 A under a high compliance current (e.g., 10 A). The results obtained through transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy (EDS), and atomic force microscopy (AFM) support the evidence of those accomplishments. Reducing the effective area of the TS device improves control over erratically generated filaments and the electric field within the switching layer, resulting in enhanced performance such as a reduced threshold voltage (V ∼0.35 V), minimized V variability (∼0.01 V), decreased a threshold current (I, i.e., the leakage current in the off-state before activation, ∼5.2 × 10 A), and maximum conductance (∼5.0 × 10 S) of low-resistance state. These findings suggest that the optimized Ag/Ni/HfO-based TS device can serve as a practical solution for low-power applications.","PeriodicalId":48495,"journal":{"name":"Materials Today Advances","volume":"72 1","pages":""},"PeriodicalIF":10.0,"publicationDate":"2024-05-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140934634","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Wet-spinning of reduced graphene oxide composite fiber by mechanical synergistic effect with graphene scrolling method 利用机械协同效应和石墨烯卷绕法湿法纺制还原氧化石墨烯复合纤维
IF 1 2区 材料科学
Materials Today Advances Pub Date : 2024-05-03 DOI: 10.1016/j.mtadv.2024.100491
Chae-Lin Park, Du Won Kim, Sujin Ryu, Joonmyung Choi, Young-Chul Song, Keon Jung Kim, Sang Won Lee, Seongjae Oh, Doyoung Kim, Young Hwan Bae, Hyun Kim, Seon-Jin Choi, Jaehoon Ko, Shi Hyeong Kim, Hyunsoo Kim
{"title":"Wet-spinning of reduced graphene oxide composite fiber by mechanical synergistic effect with graphene scrolling method","authors":"Chae-Lin Park, Du Won Kim, Sujin Ryu, Joonmyung Choi, Young-Chul Song, Keon Jung Kim, Sang Won Lee, Seongjae Oh, Doyoung Kim, Young Hwan Bae, Hyun Kim, Seon-Jin Choi, Jaehoon Ko, Shi Hyeong Kim, Hyunsoo Kim","doi":"10.1016/j.mtadv.2024.100491","DOIUrl":"https://doi.org/10.1016/j.mtadv.2024.100491","url":null,"abstract":"Carbon-based fibers have attracted attention in various field owing to their exceptional properties, including high tensile strength, thermal stability, and electrical conductivity. In particular, graphene-based high-strength fibers are promising materials in aerospace, automotive, and marine sectors. Recently, the hybrid fiber, consisting of carbon nanotubes (CNTs) and graphene with enhanced toughness was reported by deflecting cracks and enabling high deformation. However, complex synthesis and structural optimization of composite fiber with two different materials make challenge for mass production. Here, we introduce a novel graphene composite fiber, consisting of reduced graphene oxide (rGO) and scrolled rGO (SrGO), showing remarkable toughness. A multidimensional-state solution with 2D rGO and 1D SrGO was obtained by using a simple sonication technique. Mass production of high-toughness composite fibers was achieved via wet-spinning, with enhanced toughness attributed to microstructure optimization by controlling the SrGO ratio. Additionally, the use of poly(vinyl alcohol) (PVA) as the matrix facilitated high deformation, resulting in a remarkable 90.7 % increase in mechanical toughness without complex composite material synthesis.","PeriodicalId":48495,"journal":{"name":"Materials Today Advances","volume":"32 1","pages":""},"PeriodicalIF":10.0,"publicationDate":"2024-05-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140934632","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dynamic and controlled stretching of macroscopic crystalline membranes towards unprecedented levels 宏观晶体膜的动态可控拉伸达到前所未有的水平
IF 1 2区 材料科学
Materials Today Advances Pub Date : 2024-04-17 DOI: 10.1016/j.mtadv.2024.100489
T.U. Schülli, E Dollekamp, Z Ismaili, N. Nawaz, T. Januel, T. Billo, P. Brumund, H. Djazouli, S.J. Leake, M. Jankowski, V. Reita, M. Rodriguez, L. André, A. Aliane, Y.M. Le Vaillant
{"title":"Dynamic and controlled stretching of macroscopic crystalline membranes towards unprecedented levels","authors":"T.U. Schülli, E Dollekamp, Z Ismaili, N. Nawaz, T. Januel, T. Billo, P. Brumund, H. Djazouli, S.J. Leake, M. Jankowski, V. Reita, M. Rodriguez, L. André, A. Aliane, Y.M. Le Vaillant","doi":"10.1016/j.mtadv.2024.100489","DOIUrl":"https://doi.org/10.1016/j.mtadv.2024.100489","url":null,"abstract":"Imposing and controlling strain in materials such as semiconductors or ferroelectrics is a promising way to obtain new or enhance existing properties. Although the field of strain engineering has seen a rapid expansion over the last two decades, straining semiconductor membranes over large areas remains a challenge. A generic way of tuning strain and hence band structure and electric or magnetic properties of any crystalline material can be obtained by compression of a composite structure involving poorly compressible elastomers. Mechanically similar to the principle of a hydraulic press, this work proposes a device and describes analytically a methodology to easily strain macroscopic membranes up to unprecedented values. Using X-ray diffraction and Raman spectroscopy, we tuned the biaxial strain in silicon membranes up to a value of 2.1 %, paving the way for new studies in the field of strain related physics, from semiconductors to perovskite oxide multiferroics.","PeriodicalId":48495,"journal":{"name":"Materials Today Advances","volume":"47 1","pages":""},"PeriodicalIF":10.0,"publicationDate":"2024-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140804693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-throughput design of three-dimensional carbon allotropes with Pmna space group 高通量设计具有 Pmna 空间群的三维碳同素异形体
IF 1 2区 材料科学
Materials Today Advances Pub Date : 2024-04-17 DOI: 10.1016/j.mtadv.2024.100486
Qingyang Fan, Heng Liu, Chongdan Ren, Sining Yun, Udo Schwingenschlögl
{"title":"High-throughput design of three-dimensional carbon allotropes with Pmna space group","authors":"Qingyang Fan, Heng Liu, Chongdan Ren, Sining Yun, Udo Schwingenschlögl","doi":"10.1016/j.mtadv.2024.100486","DOIUrl":"https://doi.org/10.1016/j.mtadv.2024.100486","url":null,"abstract":"284 carbon allotropes with space group (No. 53) are proposed based on high-throughput calculations and density functional theory. Out of 14,285 initially identified candidates, 284 carbon allotropes are confirmed by structure optimization, removal of repetitive structures, calculation of relative enthalpies, and verification of the mechanical and thermal stabilities. Among them, 135 are metals, 55 are direct band gap semiconductors (in 15 cases with a band gap between 1.0 and 1.5 eV), 46 have three-dimensional conductive channels, 32 are superhard, and 3 are type-I Dirac semimetals.","PeriodicalId":48495,"journal":{"name":"Materials Today Advances","volume":"52 1","pages":""},"PeriodicalIF":10.0,"publicationDate":"2024-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140615336","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Low magnetic noise, easy-to-process polystyrene-grafted amorphous alloy composites for extremely-weak magnetic measurement at ultra-low frequency 低磁噪声、易加工的聚苯乙烯接枝非晶合金复合材料,用于超低频极弱磁场测量
IF 1 2区 材料科学
Materials Today Advances Pub Date : 2024-04-16 DOI: 10.1016/j.mtadv.2024.100487
Ting Sai, Pengfei Wang, Xiaoying Gu, Xueping Xu, Jinji Sun, Jing Ye
{"title":"Low magnetic noise, easy-to-process polystyrene-grafted amorphous alloy composites for extremely-weak magnetic measurement at ultra-low frequency","authors":"Ting Sai, Pengfei Wang, Xiaoying Gu, Xueping Xu, Jinji Sun, Jing Ye","doi":"10.1016/j.mtadv.2024.100487","DOIUrl":"https://doi.org/10.1016/j.mtadv.2024.100487","url":null,"abstract":"Cobalt-based amorphous alloys (Co-MG) demonstrate ultra-high permeability and remarkably-low power loss, positioning them as promising candidates for shielding (near-) static magnetic fields and addressing accuracy limitations in extremely-weak magnetic measurements. , the brittleness and poor understanding about magnetic performance below 100 Hz have impeded their widespread adoption. To integrate satisfied processing, magnetic and mechanical performances, polystyrene-grafted Co-MG composites are developed. Compared with permalloy-1J85, Co-MG-(-PS_35 %) composite exhibits 40 % increase in initial permeability, 48 % increase in saturation magnetization, 71 % reduction in remanence within shielding area. In contrast to Mn–Zn ferrite, Co-MG-(-PS_35 %) composite demonstrates the power loss and ″/′ values lower by an order of magnitude, resulting in magnetic noises 85 % lower at 1 Hz. Furthermore, the resultant composite maintains similar processing-rheological behaviors and mechanical properties compared with bulk polystyrene. It provides an innovative solution to expand real-world applications for biomagnetic detection, and overcome the sensitivity limitation of extremely-weak magnetic measurement.","PeriodicalId":48495,"journal":{"name":"Materials Today Advances","volume":"305 1","pages":""},"PeriodicalIF":10.0,"publicationDate":"2024-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140615312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Emerging hydrogel therapies for translating brain disease: Materials, mechanisms, and recent research 用于转化脑部疾病的新兴水凝胶疗法:材料、机制和最新研究
IF 1 2区 材料科学
Materials Today Advances Pub Date : 2024-04-10 DOI: 10.1016/j.mtadv.2024.100490
Xinyu Lu, Yi Luo, Xiaochun Hu, Jianjian Chu, Siqi Li, Mengqi Hao, Jianhua Zhuang, Yan Liu, Jie Gao, You Yin
{"title":"Emerging hydrogel therapies for translating brain disease: Materials, mechanisms, and recent research","authors":"Xinyu Lu, Yi Luo, Xiaochun Hu, Jianjian Chu, Siqi Li, Mengqi Hao, Jianhua Zhuang, Yan Liu, Jie Gao, You Yin","doi":"10.1016/j.mtadv.2024.100490","DOIUrl":"https://doi.org/10.1016/j.mtadv.2024.100490","url":null,"abstract":"Brain diseases, encompassing neurodegenerative disorders, strokes, and brain tumors, represent significant medical conditions with profound implications for human health. The blood-brain barrier (BBB) and the blood-cerebral-spinal cord barrier (BCSFB) limited drug penetration, poor drug targeting, and limited proliferation and easy death of mature neuronal cells greatly impair regeneration of the central nervous system after the injury, and thus call for more advanced therapeutic strategies in the clinic. Biomedical hydrogel research presents a potentially novel therapeutic approach for the management of brain disorders. Hydrogels are extremely biocompatible scaffolding materials that can be loaded with a variety of drugs for achieving effective treatments for brain disorders and can be customized with different mechanical properties to match the target organ or modulate its environment. This article offers an overview of recent research progress, challenges, and prospective developments in the utilization of hydrogels for treating brain disorders, with the objective of accentuating their potential as an early intervention in the preclinical phase. The unique mechanisms of drug release in hydrogels are examined in detail: extended-release medications, environmental release of drugs, and the material's own activity. An understanding of these mechanisms helps to make more effective drug delivery systems to the brain possible.","PeriodicalId":48495,"journal":{"name":"Materials Today Advances","volume":"211 1","pages":""},"PeriodicalIF":10.0,"publicationDate":"2024-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140572067","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Performance comparison of InGaN-based 40–80 μm micro-LEDs fabricated with and without plasma etching 使用和不使用等离子刻蚀技术制造的基于 InGaN 的 40-80 μm 微型 LED 的性能比较
IF 1 2区 材料科学
Materials Today Advances Pub Date : 2024-03-29 DOI: 10.1016/j.mtadv.2024.100485
Yu-Yun Lo, Yi-Ho Chen, Yun-Cheng Hsu, Tzu-Yi Lee, Yu-Ying Hung, Yu-Cheng Kao, Hsiao-Wen Zan, Dong- Sing Wuu, Hao-Chung Kuo, Seiji Samukawa, Ray-Hua Horng
{"title":"Performance comparison of InGaN-based 40–80 μm micro-LEDs fabricated with and without plasma etching","authors":"Yu-Yun Lo, Yi-Ho Chen, Yun-Cheng Hsu, Tzu-Yi Lee, Yu-Ying Hung, Yu-Cheng Kao, Hsiao-Wen Zan, Dong- Sing Wuu, Hao-Chung Kuo, Seiji Samukawa, Ray-Hua Horng","doi":"10.1016/j.mtadv.2024.100485","DOIUrl":"https://doi.org/10.1016/j.mtadv.2024.100485","url":null,"abstract":"The fabrication of InGaN-based blue 4✕4 array micro-LEDs (μLEDs) with 40 μm ✕40 μm chip size and 2✕2 array μLEDs with 80 μm ✕80 μm chip size etching by the inductive coupled plasma reactive ion etching (ICPRIE) and defect-free neutral beam etching (NBE) processes was studied in this work. In μLEDs of this size, the influence of defects formation in the sidewalls on EQE was evaluated. There was almost no difference in EQE between μLEDs array etched by the NBE process no matter 40 μm ✕40 μm and 80 μm ✕80 μm, but the dependence was observed in the ICPRIE. Even with this size, it was found that the size effect of EQE is smaller than that in case of using ICPRIE for defect-free neutral beam etching. This impact is substantial since μLED predominantly operated at low current density, around 1–5 A/cm. Consequently, the reduction of defect density, encompassing both internal and sidewall defects, becomes imperative even in 40–80 μm InGaN-based μLEDs. This not only improves the overall efficiency of μLEDs but also fortifies the brightness stability of μLED displays if process etching by NBE. It was also found that the etching shape had an influence on EQE. It could be attributed to fact that the etching profile angle of NBE was more vertical than that of ICPRIE. Because the different angles of the mesa resulted in different light intensity. The μLEDs emitting with a wavelength of 450 nm, the light extraction efficiency and intensity at a mesa angle 58° of NBE etching μLEDs was about 8% lower than those of an angle (38°) of ICPRIE etching μLEDs by simulation.","PeriodicalId":48495,"journal":{"name":"Materials Today Advances","volume":"120 1","pages":""},"PeriodicalIF":10.0,"publicationDate":"2024-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140572072","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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