2018 IEEE SENSORS最新文献_第9页

Simultaneous Sensing of Vapor Concentration and Temperature Utilizing Multimode of a MEMS Resonator 利用MEMS谐振器的多模态同时传感蒸汽浓度和温度

2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589875

N. Jaber, S. Ilyas, O. Shekhah, M. Eddaoudi, M. Younis

{"title":"Simultaneous Sensing of Vapor Concentration and Temperature Utilizing Multimode of a MEMS Resonator","authors":"N. Jaber, S. Ilyas, O. Shekhah, M. Eddaoudi, M. Younis","doi":"10.1109/ICSENS.2018.8589875","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589875","url":null,"abstract":"Most gas sensors suffer from the cross sensitivity to environmental temperature, which significantly reduces the accuracy and reliability of measurements. Current solutions require the fabrication of a thermometer in close proximity to the gas sensor or an identical reference sensor to compensate for the sensor drift due to temperature. This increases the device size, fabrication cost, and the power required to operate the sensor; and also adds to the complexity of the device circuit for signal processing. Here, we demonstrate a single resonant gas sensor, based on a microbeam uniformly coated with metal-organic frameworks (MOFs), capable of simultaneously measuring environmental temperature and gas concentration (water vapor). Using the electrostatic harmonic voltage, we actuate the microbeam simultaneously near the first and second vibration modes. The frequency shifts of these two modes due to physical stimuli changes are monitored in real time. The lower electrode of the clamped-clamped microbeam resonator is perforated to reduce the effect of squeeze film damping, thereby allowing operation under atmospheric pressure. We demonstrate experimentally the effectiveness of this technique to measure the environmental temperature and gas concentration.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123031985","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Acetone Adsorption Characteristics of Pd/AlGaN/GaN Heterostructure Grown by PAMBE: A Kinetic Interpretation at Low Temperature PAMBE生长Pd/AlGaN/GaN异质结构的丙酮吸附特性:低温动力学解释

2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589545

Subhashis Das, S. Majumdar, Saptarsi Ghosh, A. Bag, S. Sharma, D. Biswas

引用次数: 1

Ultra Low Cost All Polymer Systems for Biosensing Applications 生物传感应用的超低成本全聚合物系统

2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589843

B. Rakshith, T. Chandrika, M. Varma, G. R. Prashanth

引用次数: 1

Fabrication of MEMS Accelerometer for Vibration Sensing in Gas Turbine 燃气轮机振动传感用MEMS加速度计的研制

2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589799

S. Kalaiselvi, L. Sujatha, R. Sundar

引用次数: 6

Decouple Analysis of Triaxial Tactile Sensor Based on Triangular Comb Electrodes 基于三角梳状电极的三轴触觉传感器解耦分析

2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589551

Chenying Liu, Xuesong Luo, Shaoping Wang

引用次数: 1

Silicon Photonics Based On-Chip Cantilever Vibration Measurement 基于硅光子学的片上悬臂振动测量

2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589808

V. Mere, Aneesh Dash, Rakshitha Kallega, R. Pratap, A. Naik, S. Selvaraja

引用次数: 3

Growth Optimization, Morphological, Electrical and Sensing Characterization of V2O5 Films for SO2Sensor Chip so2传感器芯片中V2O5薄膜的生长优化、形态学、电学和传感特性

2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589650

C. Prajapati, N. Bhat

{"title":"Growth Optimization, Morphological, Electrical and Sensing Characterization of V2O5 Films for SO2Sensor Chip","authors":"C. Prajapati, N. Bhat","doi":"10.1109/ICSENS.2018.8589650","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589650","url":null,"abstract":"In this work, we investigate the Sulphur dioxide (SO<inf>2</inf>) sensing characteristics of reactive-ion magnetron sputtered vanadium oxide (V<inf>2</inf>O<inf>5</inf>) film of different thicknesses, followed by morphological and electrical characterization. Later, sensing material is integrated on MEMS platform to develop a sensor chip to integrated with electronics to enable portable, real-time monitoring of gas. Sputtered films are studied for their sensing characteristics at different operating conditions to realize the optimum thickness film to integrate it with CMOS platform. SO<inf>2</inf>limit of detection (LOD) and the detection precision is quantified as 38 ppb [(R<inf>a</inf> - R<inf>g</inf>)/R<inf>a</inf> x 100% = 0.7] and ~10 ppb using optimized ~ 61 nm V<inf>2</inf>O<inf>5</inf>film. The film is found to be more selective towards SO<inf>2</inf>gas as against CO, CO<inf>2</inf>and NO<inf>2</inf>gases. This optimized film is successfully integrated on the sensor platform, with the chip size of 1 mm<sup>2</sup>, with an inbuilt microheater power consumption of ~22 mW (at 326°C), to provide a localized uniform temperature to sensor film.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121663274","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6

Catalytic Hafnium Oxide Calorimetric MEMS Gas and Chemical Sensor 催化氧化铪量热MEMS气体和化学传感器

2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589851

M. Serry, Ioana Voiculcscu, Ahmed Kobtan

引用次数: 3

Separation, Sensing, and Metagenomic Analysis of Aerosol Particles Using MMD Sensors 使用MMD传感器的气溶胶颗粒分离、传感和宏基因组分析

2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589778

Xiaobo Yin, Koki Yamamoto, E. Wandera, Y. Ichinose, S. Kanba, T. Kondo, M. Hasegawa

{"title":"Separation, Sensing, and Metagenomic Analysis of Aerosol Particles Using MMD Sensors","authors":"Xiaobo Yin, Koki Yamamoto, E. Wandera, Y. Ichinose, S. Kanba, T. Kondo, M. Hasegawa","doi":"10.1109/ICSENS.2018.8589778","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589778","url":null,"abstract":"In this study, we developed a new metal mesh device (MMD) sensor to quantify the amount of aerosol particles. MMDs are substrate materials consisting of thin membranes with a periodic structure on smooth surfaces that can be used to detect and separate particles. The surface structure comprises square apertures of characteristic size that bestow unique optical properties. Aerosol particles, including the damaging environmental pollutant particulate matter 2.5 (PM2.5), were separated based on size and captured on MMD surfaces using a small air pump. The amount of captured particles was evaluated by band shifts in infrared (IR) transmittance spectra. Furthermore, bacterial genomic DNA attached to aerosol particles could be extracted with high yield, and extracted DNA resulted in bacterial constitution, as demonstrated by next-generation sequencing (NGS) analysis of bacterial 16S ribosomal DNA. MMD sensors were used to analyze aerosol particles from suburbs of Kenya and Japan. The results provided information on the bacterial biota of the environment in each local area, and pathogenic bacteria were identified. The results suggest that MMD sensors are useful tools for epidemiological and environmental studies, as well as quality control applications for drugs, fine chemicals, and food components.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114267918","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Automatic Mode-Matching and Scale Factor Adjustable Detection System for Force to Rebalance Control of Cobweb-Like Gyroscopes 蛛网状陀螺仪再平衡力控制的自动模式匹配和比例因子可调检测系统

2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589903

Mengmeng Cheng, Shuwen Guo, Bo Fan, Quan Wan, Zuxiang Wen, Dacheng Xu

引用次数: 5