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2018 IEEE SENSORS最新文献

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Modeling and Fabrication Aspects of PVDF as a Membrane Material for Air Borne PMUT Applications PVDF作为机载PMUT膜材料的建模和制造方面
2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589809
Lisa Sarkar, J. Joseph, S. Singh, S. Vanjari
{"title":"Modeling and Fabrication Aspects of PVDF as a Membrane Material for Air Borne PMUT Applications","authors":"Lisa Sarkar, J. Joseph, S. Singh, S. Vanjari","doi":"10.1109/ICSENS.2018.8589809","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589809","url":null,"abstract":"This paper reports a thorough analysis on the viability of polyvinylidene difluoride (PVDF) as a membrane material for Piezoelectric Micromachined Ultrasonic Transducers using a well developed multiphysics finite element modeling approach. Key metrics such as frequency modes, membrane displacement sensitivity, generated acoustic pressure were analyzed not only for PVDF but also for other piezoelectric materials like Zinc Oxide (ZnO) and Aluminium Nitride (AIN). Based on the affirmative conclusions, fabrication of PMUT using PVDF as membrane material was carried out. One of the major bottlenecks encountered in the process is the poor adhesion between PVDF and metal. This generic issue not limited this particular process flow was resolved using simple chemical surface modification of metal surface. This resulted in the successful demonstration of PVDF based PMUT.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121857777","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Characterization of Field Asymmetric Ion Mobility Spectrometry Response to Binary Gas Mixture 场不对称离子迁移率光谱对二元气体混合物响应的表征
2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589749
Y. Yokoshiki, T. Nakamoto
{"title":"Characterization of Field Asymmetric Ion Mobility Spectrometry Response to Binary Gas Mixture","authors":"Y. Yokoshiki, T. Nakamoto","doi":"10.1109/ICSENS.2018.8589749","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589749","url":null,"abstract":"Characterization of Field Asymmetric Ion Mobility Spectrometry (FAIMS) was studied with two experiments. First, acetone and diethyl ether were used to examine the relationship between concentration and ion current. The results show FAIMS has a nonlinear dependency on gas concentration. Then, binary mixture gases made up of acetone, and diethyl ether was measured. The result shows FAIMS has a nonlinear characteristic for gas mixture analysis because the output of binary mixture gas was not equal to the summation of the outputs obtained from single gases. Moreover, it is an interesting phenomenon that one gas (diethyl ether) suppressed the response to other gas (acetone).","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121245236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Immunity to Temperature Fluctuations in Weakly Coupled MEMS Resonators 弱耦合MEMS谐振器对温度波动的抗扰性
2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589869
Milind S. Pandit, Chun Zhao, G. Sobreviela, A. Seshia
{"title":"Immunity to Temperature Fluctuations in Weakly Coupled MEMS Resonators","authors":"Milind S. Pandit, Chun Zhao, G. Sobreviela, A. Seshia","doi":"10.1109/ICSENS.2018.8589869","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589869","url":null,"abstract":"Eigenstate variations in weakly coupled MEMS resonators have been shown to exhibit common mode rejection capabilities that make them immune to environmental fluctuations to first order. In contrast to previous work on this topic, this paper shows in-depth experimental characterization of the resonator system at a range of temperatures between 35°C and 60°C using amplitude ratio as the readout metric. An analysis is conducted on the impact of the cross-sensitivity to temperature variations on the input-referred stiffness perturbation for the resonator system and this is compared to the variations in the frequency shift output metric within the same device. These results show 2 orders of magnitude improvement in temperature immunity for the amplitude ratio readout metric as compared to the conventional frequency shift method.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128038352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
A New Type of Bionics Based Piezoelectric Heartbeat Sensor Used in Pulse-Taking for Health Warning 一种用于健康预警脉搏测量的新型仿生压电心跳传感器
2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589641
Meining Ji, Xiaofeng Meng, J. Nie, Yaqin Wang, Liwei Lin
{"title":"A New Type of Bionics Based Piezoelectric Heartbeat Sensor Used in Pulse-Taking for Health Warning","authors":"Meining Ji, Xiaofeng Meng, J. Nie, Yaqin Wang, Liwei Lin","doi":"10.1109/ICSENS.2018.8589641","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589641","url":null,"abstract":"This work demonstrates a novel bionics-based heartbeat sensor combined with approximate entropy (ApEn) algorithm for health warning. The design of the proposed sensor was inspired by pulse-taking therapy in traditional Chinese medicine (TCM). A flexible piezoelectric film was adhered to a wooden cylinder to simulate the structure of the finger to achieve pulse-taking. The simulation of piezoelectric film under different force area and bending degree was realized by ANSYS. The results showed that the sensor structure proposed in this paper can not only simulate the characteristics of the finger to achieve the TCM pulse-taking, but also improve the sensitivity of piezoelectric film. The sensor was used to measure the pulse signal of human under different states of motion and different health conditions. Then the sample data were analyzed using the ApEn. The results showed that the ApEn value is 0.1 can be used as a threshold for judging and predicting human health status. The experiment proved that this method can avoid the requirement of the same force in the traditional pulse-taking. It not only can obtain the low distortion pulse signal, but also can obtain the heart rate accurately. Using this method can quickly achieve rapid detection and early warning of human health.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133171883","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Curve-Shaped Anchor for Durability and Efficiency Improvement of Piezoelectric MEMS Energy Harvesters 提高压电MEMS能量采集器耐用性和效率的曲线型锚
2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589817
Seyedfakhreddin Nabavi, Lihong Zhang
{"title":"Curve-Shaped Anchor for Durability and Efficiency Improvement of Piezoelectric MEMS Energy Harvesters","authors":"Seyedfakhreddin Nabavi, Lihong Zhang","doi":"10.1109/ICSENS.2018.8589817","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589817","url":null,"abstract":"In this paper we propose a new curve-shaped anchoring scheme to improve the durability and energy conversion efficiency of the piezoelectric MEMS harvesters. In this regard, a doubly clamped curve beam with a mass at its center is considered as an anchor, while a straight beam with proof mass is integrated to the center of this anchor. To the best of our knowledge, thus far no study has been done to assess the fatigue damage, which is actually critical to the micro-sized silicon-based piezoelectric harvesters. We have utilized the Coffin-Manson method and finite element modeling (FEM) to comprehensively study the fatigue lifetime of the proposed geometry. By using a micro-fabrication process, our proposed piezoelectric harvester has been fabricated and its capability in harnessing the vibration energy has been examined experimentally. It is found that the harvested energy can be enlarged by a factor of 2.66, while this improvement is gained by the resonant frequency reduction and failure force magnitude enlargement, in comparison with the conventional geometry of the piezoelectric MEMS harvesters.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133458049","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
A Finite Element Method Based Approach of Modeling of a Piezoresistive Accelerometer by Incorporating Doping Profile of a Diffused Resistor 采用扩散电阻掺杂谱的压阻式加速度计有限元建模方法
2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589691
K. Meena, R. Mathew, A. Sankar
{"title":"A Finite Element Method Based Approach of Modeling of a Piezoresistive Accelerometer by Incorporating Doping Profile of a Diffused Resistor","authors":"K. Meena, R. Mathew, A. Sankar","doi":"10.1109/ICSENS.2018.8589691","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589691","url":null,"abstract":"Finite element analysis (FEA) is an efficient method to observe the behavior of a sensor and to optimize the design to achieve high performance. In the modeling of piezoresistive sensors, typical FEA techniques simplify the doping concentration as a constant profile throughout the junction depth of a piezoresistor. This approximation overestimates or underestimates the performance of the modeled device from the actual fabricated device. In this paper, a two-step modeling of piezoresistive sensors by incorporating nonuniformly doped piezoresistor is presented using TCAD TSUPREM4® and IntelliSuite® tools to achieve lower deviation between simulation and experimental results. The two-step modeling technique illustrates the method of choosing the number of slices and the slicing strategy to effectively model the uniform doping profile of a piezoresistor. A quad-beam proof-mass aligned piezoresistive accelerometer is considered for the validation of the modeling method by comparing the simulated results with the fabrication results. From the results, it is observed that the proposed adaptive slicing method with more slices at the surface of the piezoresistor provides the least deviation error of 5.43 %.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132295010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Characteristics of a Ce-Doped Silica Fiber Irradiated by a Neutron Field Up to 400 MeV 400 MeV中子场辐照掺铈二氧化硅光纤的特性
2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589510
N. Savard, M. Dehnel, C. Hoehr
{"title":"Characteristics of a Ce-Doped Silica Fiber Irradiated by a Neutron Field Up to 400 MeV","authors":"N. Savard, M. Dehnel, C. Hoehr","doi":"10.1109/ICSENS.2018.8589510","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589510","url":null,"abstract":"A $mathbf{200} mu mathbf{m}$ and $mathbf{600} mu mathbf{m}$ diameter Ce3+ doped silica fiber, part of the UniBEaM charged-particle beam profiler system from D-Pace, were tested with 0 – 400 MeV neutrons at the TNF facility at TRIUMF, Canada. The detector's response to neutrons as a function of fiber length exposure was found to be linear, and the fiber was used to measure this neutron beam along its horizontal axis. This demonstrates the potential of the UniBEaM to measure neutron beam profiles.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134218420","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A System-Level Simulation Approach for Analyzing MEMS Gyroscope Manufacture Error MEMS陀螺仪制造误差分析的系统级仿真方法
2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589823
Bowen Xing, Rui Li, Zhihui Lin, Qi Wei, Bin Zhou, Rong Zhang
{"title":"A System-Level Simulation Approach for Analyzing MEMS Gyroscope Manufacture Error","authors":"Bowen Xing, Rui Li, Zhihui Lin, Qi Wei, Bin Zhou, Rong Zhang","doi":"10.1109/ICSENS.2018.8589823","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589823","url":null,"abstract":"In this paper, an effective system-level simulation approach for MEMS gyroscope is reported to analyze the effect of imperfections. This approach establishes the dynamic model of gyroscope with manufacture error by model-order reduction (MOR), and deeply the paper provides an electrical system model in Verilog-A to simulate with interface circuit. The system model can capture typical effects such as quadrature and synthetic signal, which represent the degree of structural asymmetry due to manufacture errors. With this flexible approach, the dimensional errors in supporting beams are evaluated by quadrature error signal of the outputs. The match of the practical experiments and the simulation within less than 9.22% deviation has proved the feasibility of this approach.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133045913","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Through-Wall Mapping Using a Short Range Radar 利用近距离雷达进行穿墙测绘
2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589866
Sedat Dogru, Lino Marques
{"title":"Through-Wall Mapping Using a Short Range Radar","authors":"Sedat Dogru, Lino Marques","doi":"10.1109/ICSENS.2018.8589866","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589866","url":null,"abstract":"In this paper, we show the feasibility of using an off the shelf short range automotive radar working at 24GHz frequency for through-wall mapping. For this purpose, an enclosed arena made of portable wall segments was constructed, creating various indoor wall configurations, and these were probed from the outside using the radar mounted on the top of a differential drive robot. It was shown that the radar can detect most wall segments hidden behind the outer walls, and the robot can construct a 2D map of the environment in sufficient detail probing the environment with a short range radar from multiple known positions.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115197149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Design of Low-Frequency Impedance Measurement Sensors for Respiratory Health 用于呼吸系统健康的低频阻抗测量传感器设计
2018 IEEE SENSORS Pub Date : 2018-10-01 DOI: 10.1109/ICSENS.2018.8589787
G. Naishadham, E. Bekyarova, Yuchen Qian, K. Naishadham
{"title":"Design of Low-Frequency Impedance Measurement Sensors for Respiratory Health","authors":"G. Naishadham, E. Bekyarova, Yuchen Qian, K. Naishadham","doi":"10.1109/ICSENS.2018.8589787","DOIUrl":"https://doi.org/10.1109/ICSENS.2018.8589787","url":null,"abstract":"Real-time monitoring of environmental exposure causing chronic diseases including asthma and COPD has assumed enormous significance due to prolific advances in materials science and electronics. Such monitoring demands low-power electronic devices for signal conditioning and measurement to be integrated with state-of-the-art environmental sensors. Ozone is a known trigger of asthma causing significant health burden worldwide. In this paper, sensitive detectors based on functionalized (i.e. high specificity) single-walled carbon nanotubes are designed to measure ambient ozone exposure. The electronic interface comprises low-power integration of the chemical sensor with a commercial device to measure the complex (sensor) impedance at a frequency between 40 kHz and 1 MHz. Simultaneous measurement of magnitude and phase on several ozone sensors reveal response change of 35% in the former and 80% in the latter, and a detection limit of only 10 ppb. This innovative chip-based impedance measurement technique has the potential for characterizing the personal exposure to ambient air pollution triggers of respiratory diseases.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115412129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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