Decouple Analysis of Triaxial Tactile Sensor Based on Triangular Comb Electrodes

Tactile sensing provides contact force information between grippers and objects for better manipulation. How to receive higher integration of tactile information, especially in measurement of tangential force, is under further discussion. Design, decoupling and simulation results of a tactile sensor which satisfies triaxial force information is presented in this paper. The sensor, based on triangular top and bottom plates, comprises two layers shaped of floating comb-like electrodes. The proposed structure guarantees the sensor's sensitivity to both normal and tangential force with a smaller size. Testing results proves that displacement of the sensor's plates can be analytically decoupled. Capacitance change of the sensor shows high linearity to triaxial force.