{"title":"so2传感器芯片中V2O5薄膜的生长优化、形态学、电学和传感特性","authors":"C. Prajapati, N. Bhat","doi":"10.1109/ICSENS.2018.8589650","DOIUrl":null,"url":null,"abstract":"In this work, we investigate the Sulphur dioxide (SO<inf>2</inf>) sensing characteristics of reactive-ion magnetron sputtered vanadium oxide (V<inf>2</inf>O<inf>5</inf>) film of different thicknesses, followed by morphological and electrical characterization. Later, sensing material is integrated on MEMS platform to develop a sensor chip to integrated with electronics to enable portable, real-time monitoring of gas. Sputtered films are studied for their sensing characteristics at different operating conditions to realize the optimum thickness film to integrate it with CMOS platform. SO<inf>2</inf>limit of detection (LOD) and the detection precision is quantified as 38 ppb [(R<inf>a</inf> - R<inf>g</inf>)/R<inf>a</inf> x 100% = 0.7] and ~10 ppb using optimized ~ 61 nm V<inf>2</inf>O<inf>5</inf>film. The film is found to be more selective towards SO<inf>2</inf>gas as against CO, CO<inf>2</inf>and NO<inf>2</inf>gases. This optimized film is successfully integrated on the sensor platform, with the chip size of 1 mm<sup>2</sup>, with an inbuilt microheater power consumption of ~22 mW (at 326°C), to provide a localized uniform temperature to sensor film.","PeriodicalId":405874,"journal":{"name":"2018 IEEE SENSORS","volume":"31 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Growth Optimization, Morphological, Electrical and Sensing Characterization of V2O5 Films for SO2Sensor Chip\",\"authors\":\"C. Prajapati, N. Bhat\",\"doi\":\"10.1109/ICSENS.2018.8589650\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, we investigate the Sulphur dioxide (SO<inf>2</inf>) sensing characteristics of reactive-ion magnetron sputtered vanadium oxide (V<inf>2</inf>O<inf>5</inf>) film of different thicknesses, followed by morphological and electrical characterization. Later, sensing material is integrated on MEMS platform to develop a sensor chip to integrated with electronics to enable portable, real-time monitoring of gas. Sputtered films are studied for their sensing characteristics at different operating conditions to realize the optimum thickness film to integrate it with CMOS platform. SO<inf>2</inf>limit of detection (LOD) and the detection precision is quantified as 38 ppb [(R<inf>a</inf> - R<inf>g</inf>)/R<inf>a</inf> x 100% = 0.7] and ~10 ppb using optimized ~ 61 nm V<inf>2</inf>O<inf>5</inf>film. The film is found to be more selective towards SO<inf>2</inf>gas as against CO, CO<inf>2</inf>and NO<inf>2</inf>gases. This optimized film is successfully integrated on the sensor platform, with the chip size of 1 mm<sup>2</sup>, with an inbuilt microheater power consumption of ~22 mW (at 326°C), to provide a localized uniform temperature to sensor film.\",\"PeriodicalId\":405874,\"journal\":{\"name\":\"2018 IEEE SENSORS\",\"volume\":\"31 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE SENSORS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2018.8589650\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE SENSORS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2018.8589650","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Growth Optimization, Morphological, Electrical and Sensing Characterization of V2O5 Films for SO2Sensor Chip
In this work, we investigate the Sulphur dioxide (SO2) sensing characteristics of reactive-ion magnetron sputtered vanadium oxide (V2O5) film of different thicknesses, followed by morphological and electrical characterization. Later, sensing material is integrated on MEMS platform to develop a sensor chip to integrated with electronics to enable portable, real-time monitoring of gas. Sputtered films are studied for their sensing characteristics at different operating conditions to realize the optimum thickness film to integrate it with CMOS platform. SO2limit of detection (LOD) and the detection precision is quantified as 38 ppb [(Ra - Rg)/Ra x 100% = 0.7] and ~10 ppb using optimized ~ 61 nm V2O5film. The film is found to be more selective towards SO2gas as against CO, CO2and NO2gases. This optimized film is successfully integrated on the sensor platform, with the chip size of 1 mm2, with an inbuilt microheater power consumption of ~22 mW (at 326°C), to provide a localized uniform temperature to sensor film.
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