SPIE Micro + Nano Materials, Devices, and Applications最新文献

{"title":"Flexible pressure sensor on polymeric materials","authors":"M. Teng, A. Hariz, H. Hsu, T. Omari","doi":"10.1117/12.765970","DOIUrl":"https://doi.org/10.1117/12.765970","url":null,"abstract":"In this work we investigate the use of polymer materials as a basis for fabrication of a novel type of pressure sensors for use in medical diagnostics. Experience with solid-state micro-electromechanical systems (MEMS) sensors has proved them to provide a number of desirable characteristics in sensory applications, including miniaturization and low production cost. However, owing to their rigidity, and bio-incompatibility, the solid-state sensors are not ideally suited for applications in biomedical implants and in-vivo diagnostics. They often require extra encapsulation protection, and thus diminishing their sensitivity and selectivity. Polymeric materials such as polyimide have been for a number of years utilized to manufacture flexible printed circuit board (FPCB) and membrane switches used in computer keyboards. Related work on polymer electronics has shown feasible the fabrication of micro sensors using polymer materials. In this paper we show that combining the polymer thick-film (PTF) technology with the MEMS micromachining process yields a workable platform for the realization of a flexible sensor for pressure measurements. We will show simulation results that establish the validity of the model and which will confirm the promise that these devices hold for future biomedical instrumentations. Recent sensor research by another group demonstrated a multi-model tactile sensor which consists of hardness, temperature, and thermal conductivity sensing features, all combined and built on a polymer substrate [1] and [2]. Advantages of using polymer materials include flexibility, biocompatibility, robust characteristics, reduced fabrication complexity and reduced production costs, as well as the use of environmentally friendly manufacturing.","PeriodicalId":320411,"journal":{"name":"SPIE Micro + Nano Materials, Devices, and Applications","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122073068","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A new total static leakage estimation model for UDSM-based transistor stacks","authors":"H. Al-Hertani, D. Al-Khalili, C. Rozon","doi":"10.1117/12.758952","DOIUrl":"https://doi.org/10.1117/12.758952","url":null,"abstract":"This paper introduces a new input pattern dependent model for total static leakage estimation in ultra deep submicron processes. The model integrates gate tunnelling leakage, gate induced drain leakage (GIDL) and subthreshold leakage into a single leakage estimation framework. Subthreshold estimation is facilitated through the analytical estimation of nodal voltages between OFF transistors, while gate tunnelling leakage and GIDL are calculated based on simplified versions of their respective BSIM4 equations. The framework deals with all input patterns and accommodates scenarios where the various leakage currents interact. Similar approaches in the literature are either based on a look up table approach, and do not accommodate transistor stacks with varying widths, or are highly experimental and require a detailed knowledge of the transistor device physics. Several approaches also exist for modeling either subthreshold leakage or gate tunnelling leakage separately. Even those approaches use a lookup table approach, fix all widths in a transistor stack and/or limit the stack size to 2-3 transistors. The model proposed in this paper is tractable and almost completely analytical. It is capable of accommodating stacks with up to 4 transistors with varying transistor widths. A stack estimator function based on this model was coded in MatLab for the 65nm, 45nm and 32nm PTM process technologies. Compared with SPICE simulations the model exhibited an average error of 1.29%, 2.79%, 7.57% and 11.42% for stack sizes of 1, 2, 3 and 4 respectively across all three technologies. The model also exhibits significant runtime savings when compared with SPICE.","PeriodicalId":320411,"journal":{"name":"SPIE Micro + Nano Materials, Devices, and Applications","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132966488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"New type of dummy layout pattern to control ILD etch rate","authors":"O. Pohland, J. Spieker, Chih-Ta Huang, S. Govindaswamy, A. Balasinski","doi":"10.1117/12.759708","DOIUrl":"https://doi.org/10.1117/12.759708","url":null,"abstract":"Adding dummy features (waffles) to drawn geometries of the circuit layout is a common practice to improve its manufacturability. As an example, local dummy pattern improves MOSFET line and space CD control by adjusting short range optical proximity and reducing the aggressiveness of its correction features (OPC) to widen the lithography process window. Another application of dummy pattern (waffles) is to globally equalize layout pattern density, to reduce long-range inter-layer dielectric (ILD) thickness variations after the CMP process and improve contact resistance uniformity over the die area. In this work, we discuss a novel type of dummy pattern with a mid-range interaction distance, to control the ILD composition driven by its deposition and etch process. This composition is reflected on sidewall spacers and depends on the topography of the underlying poly pattern. During contact etch, it impacts the etch rate of the ILD. As a result, the deposited W filling the damascene etched self-aligned trench contacts in the ILD may electrically short to the underlying gates in the areas of isolated poly. To mitigate the dependence of the ILD composition on poly pattern distribution, we proposed a special dummy feature generation with the interaction range defined by the ILD deposition and etch process. This helped equalize mid-range poly pattern density without disabling the routing capability with damascene trench contacts in the periphery which would have increased the layout footprint.","PeriodicalId":320411,"journal":{"name":"SPIE Micro + Nano Materials, Devices, and Applications","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128322865","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Feature extraction of performance variables in elite half-pipe snowboarding using body mounted inertial sensors","authors":"Jason Harding, Jason Harding, James William Small, Daniel Arthur James, Daniel Arthur James","doi":"10.1117/12.759259","DOIUrl":"https://doi.org/10.1117/12.759259","url":null,"abstract":"Recent analysis of elite-level half-pipe snowboard competition has revealed a number of sport specific key performance variables (KPV's) that correlate well to score. Information on these variables is difficult to acquire and analyse, relying on collection and labour intensive manual post processing of video data. This paper presents the use of inertial sensors as a user-friendly alternative and subsequently implements signal processing routines to ultimately provide automated, sport specific feedback to coaches and athletes. The author has recently shown that the key performance variables (KPV's) of total air-time (TAT) and average degree of rotation (ADR) achieved during elite half-pipe snowboarding competition show strong correlation with an athlete's subjectively judged score. Utilising Micro-Electrochemical System (MEMS) sensors (tri-axial accelerometers) this paper demonstrates that air-time (AT) achieved during half-pipe snowboarding can be detected and calculated accurately using basic signal processing techniques. Characterisation of the variations in aerial acrobatic manoeuvres and the associated calculation of exact degree of rotation (DR) achieved is a likely extension of this research. The technique developed used a two-pass method to detect locations of half-pipe snowboard runs using power density in the frequency domain and subsequently utilises a threshold based search algorithm in the time domain to calculate air-times associated with individual aerial acrobatic manoeuvres. This technique correctly identified the air-times of 100 percent of aerial acrobatic manoeuvres within each half-pipe snowboarding run (n = 92 aerial acrobatic manoeuvres from 4 subjects) and displayed a very strong correlation with a video based reference standard for air-time calculation (r = 0.78 ± 0.08; p value < 0.0001; SEE = 0.08 ×/÷ 1.16; mean bias = -0.03 ± 0.02s) (value ± or ×/÷ 95% CL).","PeriodicalId":320411,"journal":{"name":"SPIE Micro + Nano Materials, Devices, and Applications","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114336524","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Effect of dispersing nano-materials into structural adhesive on the electrical and mechanical properties","authors":"Anil Chinnabhandar, H. N. Narasimha Murthy, M. Krishna","doi":"10.1117/12.784812","DOIUrl":"https://doi.org/10.1117/12.784812","url":null,"abstract":"This paper highlights a systematic investigation (related to percentage addition of solvents) of finding the appropriate solvent to reduce the viscosity of the structural grade of resin (AV138M) within castable range to effectively disperse the nano-fillers (Carbon Nano Powder - CNP and Multi Walled Carbon Nano Tubes - MWCNT). AV138M + HY998/CNP and AV138 + HY998/MWCNT were cast within-process degassing using a vacuum pump of capacity 4 torr. High energy sonic waves (27000 kHz) were used for dispersion. Morphological studies were undertaken to analyze the uniformity in dispersion of nano-fillers. The cured specimens were subjected to: Resistivity measurements using a Resistivity Meter, Glass Transition Temperature (Tg) using a Differential Scanning Calorimetry (DSC) and Tensile properties using UTM. The properties have been determined for the nanocomposites with different wt % of the fillers. It has been found that for 0.6 wt % of filler (CNP / MWCNT), there is an increase in UTS of 10 times for MWCNT compared to CNP; for 1.0 wt % of the fillers, the Tg improved by 10 ºC for MWCNT and by 4 ºC for CNP when compared with neat resin. Both CNP and MWCNT showed drop in electrical resistivity of the neat resin; a drop to the extent of 103 has been achieved with 1 wt % MWCNT and the same was 2 wt % in case of CNP.","PeriodicalId":320411,"journal":{"name":"SPIE Micro + Nano Materials, Devices, and Applications","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134211679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Estimation of atomic hydrophobicities using molecular dynamics simulation of peptides","authors":"M. Held, D. Nicolau","doi":"10.1117/12.759385","DOIUrl":"https://doi.org/10.1117/12.759385","url":null,"abstract":"The hydrophobic force is one of the main driving forces in protein folding and binding. However, its nature is not yet well understood and consequently there are more than 80 different scales published trying to quantify it. Most of the hydrophobicity scales are amino acid-based, but the interaction between the molecular surface of the proteins (and DNA) and surfaces they are immobilized on, e.g., on biomedical micro/nanodevices, occurs on fractions of, rather than whole amino acids. This fragmented structure of the biomolecular surface requires the derivation of atom-level hydrophobicity. Most attempts for the evaluation of atomic hydrophobicities are derived from amino acid-based values, which ignore dynamic and steric factors. This contribution reports on the Molecular Dynamics simulations that aim to overcome this simplification. The calculations examine various tripeptides in an aqueous solution and the analysis focuses on the distance of the nearest water molecules to the individual atoms in the peptides. Different environments result in a variation of average distances for similar atoms in different tripeptides. Comparison with the atomic hydrophobicities derived from the amino acid-based hydrophobicity obtained from peptide partition in water-octanol (Dgoct) and transport through the membrane interface (Dgwif) shows a similar trend to the calculated distances. The variations are likely due to the steric differences of similar types of atoms in different geometric contexts. Therefore, Molecular Dynamics simulations proved convenient for the evaluation of atomic hydrophobicities and open new research avenues. The atomic hydrophobicities can be used to design surfaces that mimic the biomolecular surfaces and therefore elicit an expected biomolecular activity from the immobilized biomolecules.","PeriodicalId":320411,"journal":{"name":"SPIE Micro + Nano Materials, Devices, and Applications","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130138706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Atomic force microscopy study on the attachment of E. coli and S. aureus to a patterned surface of different materials","authors":"Hailong Zhang, András Komáromy, R. Boysen, G. Rius, X. Borrisé, F. Pérez-Murano, M. Hearn, D. Nicolau","doi":"10.1117/12.761401","DOIUrl":"https://doi.org/10.1117/12.761401","url":null,"abstract":"Many bacterial species are able to colonize the surfaces of biomedical tools or devices and form biofilms creating a source of infection and other deleterious effects. Biofilms constitute environments in which bacteria grow and are protected from the host's immune system and antimicrobial medications. The bacterial adhesion, which is an important and first step in biofilm formation, is influenced by several physico-chemical and topographical factors at the interfaces between the bacterial cell and the surface. Therefore, the mechanism of initial adhesion needs to be investigated to better understand the events of anchorage and film formation as bacteria colonise surfaces. In this work, atomic force microscopy (AFM) in the tapping mode of imaging has been employed to investigate the attachment of bacteria onto a structured surface patterned with different hydrophilic and hydrophobic areas. The interactions of Escherichia coli and Staphylococcus aureus with these structures were also monitored by fluorescence microscopy. AFM was successfully employed for the study of the cell responses to both nanotopography and the surface chemistry via observation of various cell functions; including extracellular polymeric substance (EPS) mediated cellular adhesion.","PeriodicalId":320411,"journal":{"name":"SPIE Micro + Nano Materials, Devices, and Applications","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126846749","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Mechanisms of formation of nanostructures with atomic force microscopy","authors":"H. Lee, L. Peng, K. Wang, M. Yapici, Jun Zou, H. Liang","doi":"10.1117/12.760121","DOIUrl":"https://doi.org/10.1117/12.760121","url":null,"abstract":"The scanning probe microscopy-based (SPM) lithography techniques have presented significant challenges in fabricating nanostructures. Using this technique with assistance of pulse current, direct deposition or oxidation can be introduced on material surfaces. In present research, we use an atomic force microscope (AFM) to write a solid (gold) feature onto a substrate (silicon) in ambient environment. During the contact-sliding, the material on the gold (Au) tip transferred onto the surface of the single crystalline silicon (Si). This transfer takes place atomically as shown on a smoothly worn Au tip. This process is almost as simple as writing a line with a pencil. Dispersion of thermal energy inducted through friction is discussed in this presentation.","PeriodicalId":320411,"journal":{"name":"SPIE Micro + Nano Materials, Devices, and Applications","volume":"238 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123330576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Thermal analysis of cell electro-rotation chip","authors":"Guolin Xu, D. Lee, M. Vyshnavi, J. Ying","doi":"10.1117/12.758180","DOIUrl":"https://doi.org/10.1117/12.758180","url":null,"abstract":"Electrorotation method is a useful technique for characterizing dielectric properties of individual cells or particles. During the electrorotation process, a dielectric cell is subjected to rotating electric field of high frequency and its rotation speed is monitored. As high conductivity buffer is used in the process, heat is generated which in turn affects cell rotation performance. In this work, we present temperature analytical results of a 4-electrode electrorotation chip using finite element method. The simulation conditions include variation of applied voltage, buffer conductivity and material of the chip. We found that the applied voltage and conductivity of buffer used are two main factors affecting temperature rise in electrorotation process.","PeriodicalId":320411,"journal":{"name":"SPIE Micro + Nano Materials, Devices, and Applications","volume":"85 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115623239","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The molecular adsorption-type endotoxin detection system using immobilized ε-polylysine","authors":"K. Ooe, A. Tsuji, N. Nishishita, Y. Hirano","doi":"10.1117/12.759459","DOIUrl":"https://doi.org/10.1117/12.759459","url":null,"abstract":"Hemodialysis for chronic renal failure is the most popular treatment method with artificial organs. However, hemodialysis patients must continue the treatment throughout their life, the results of long term extracorporeal dialysis, those patients develop the various complications and diseases, for example, dialysis amyloidosis etc. Dialysis amyloidosis is one of the refractory complications, and endotoxin is thought to be the most likely cause of it, recently. Endotoxin is one of the major cell wall components of gram-negative bacteria, and it has various biological activities. In addition, it is known that a mount of endotoxin exists in living environment, and medicine is often contaminated with endotoxin. When contaminated dialyzing fluids are used to hemodialysis, above-mentioned dialysis amyloidosis is developed. Therefore, it is important that the detection and removal of endotoxin from dialyzing fluids. Until now, the measurement methods using Limulus Amebosyte Lysate (LAL) reagent were carried out as the tests for the presence of endtoxin. However, these methods include several different varieties of measurement techniques. The following are examples of them, gelatinization method, turbidimetric assay method, colorimetric assay method and fluoroscopic method. However, these techniques needed 30-60 minutes for the measurement. From these facts, they are not able to use as a \"real-time endotoxin detector\". The detection of endotoxin has needed to carry out immediately, for that reason, a new detection method is desired. In this research, we focused attention to adsorption reaction between ε-polylysine and endotoxin. ε-polylysine has the structure of straight chain molecule composed by 25-30 residues made by lysine, and it is used as an antimicrobial agent, moreover, cellulose beads with immobilized ε-polylysine is used as the barrier filter for endotoxin removal. The endotoxin is adsorbed to immobilized ε-polylysine, as the result of this reaction, the mass incrementation is occurred, and the existence of endtoxin can be detected immediately, by using of Quartz Crystal Microbalance (QCM). In this report, the immobilization of ε-polylysine onto the Au and Si substrate and its adsorptive activity are described. We use X-ray Photoelectron Spectroscopy (XPS) to confirm the ε-polylysine immobilization, and the adsorptive activity of immobilized ε-polylysine is measured by AFM and QCM. This molecular adsorption type endotoxin sensor aims to the realization of \"real-time endotoxin detection system\".","PeriodicalId":320411,"journal":{"name":"SPIE Micro + Nano Materials, Devices, and Applications","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-12-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124908385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}