H. Lee, L. Peng, K. Wang, M. Yapici, Jun Zou, H. Liang
{"title":"用原子力显微镜研究纳米结构的形成机制","authors":"H. Lee, L. Peng, K. Wang, M. Yapici, Jun Zou, H. Liang","doi":"10.1117/12.760121","DOIUrl":null,"url":null,"abstract":"The scanning probe microscopy-based (SPM) lithography techniques have presented significant challenges in fabricating nanostructures. Using this technique with assistance of pulse current, direct deposition or oxidation can be introduced on material surfaces. In present research, we use an atomic force microscope (AFM) to write a solid (gold) feature onto a substrate (silicon) in ambient environment. During the contact-sliding, the material on the gold (Au) tip transferred onto the surface of the single crystalline silicon (Si). This transfer takes place atomically as shown on a smoothly worn Au tip. This process is almost as simple as writing a line with a pencil. Dispersion of thermal energy inducted through friction is discussed in this presentation.","PeriodicalId":320411,"journal":{"name":"SPIE Micro + Nano Materials, Devices, and Applications","volume":"238 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-12-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Mechanisms of formation of nanostructures with atomic force microscopy\",\"authors\":\"H. Lee, L. Peng, K. Wang, M. Yapici, Jun Zou, H. Liang\",\"doi\":\"10.1117/12.760121\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The scanning probe microscopy-based (SPM) lithography techniques have presented significant challenges in fabricating nanostructures. Using this technique with assistance of pulse current, direct deposition or oxidation can be introduced on material surfaces. In present research, we use an atomic force microscope (AFM) to write a solid (gold) feature onto a substrate (silicon) in ambient environment. During the contact-sliding, the material on the gold (Au) tip transferred onto the surface of the single crystalline silicon (Si). This transfer takes place atomically as shown on a smoothly worn Au tip. This process is almost as simple as writing a line with a pencil. Dispersion of thermal energy inducted through friction is discussed in this presentation.\",\"PeriodicalId\":320411,\"journal\":{\"name\":\"SPIE Micro + Nano Materials, Devices, and Applications\",\"volume\":\"238 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-12-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE Micro + Nano Materials, Devices, and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.760121\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Micro + Nano Materials, Devices, and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.760121","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Mechanisms of formation of nanostructures with atomic force microscopy
The scanning probe microscopy-based (SPM) lithography techniques have presented significant challenges in fabricating nanostructures. Using this technique with assistance of pulse current, direct deposition or oxidation can be introduced on material surfaces. In present research, we use an atomic force microscope (AFM) to write a solid (gold) feature onto a substrate (silicon) in ambient environment. During the contact-sliding, the material on the gold (Au) tip transferred onto the surface of the single crystalline silicon (Si). This transfer takes place atomically as shown on a smoothly worn Au tip. This process is almost as simple as writing a line with a pencil. Dispersion of thermal energy inducted through friction is discussed in this presentation.