用原子力显微镜研究纳米结构的形成机制

H. Lee, L. Peng, K. Wang, M. Yapici, Jun Zou, H. Liang
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引用次数: 0

摘要

基于扫描探针显微镜(SPM)的光刻技术在制造纳米结构方面提出了重大挑战。在脉冲电流的帮助下使用这种技术,可以在材料表面上直接沉积或氧化。在本研究中,我们使用原子力显微镜(AFM)在环境环境下将固体(金)特征写入衬底(硅)上。在接触滑动过程中,金(Au)尖端上的物质转移到单晶硅(Si)表面。这种转移是原子地发生的,如图所示的光滑磨损的金尖端。这个过程几乎就像用铅笔写一条线一样简单。本文讨论了摩擦引起的热能分散。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Mechanisms of formation of nanostructures with atomic force microscopy
The scanning probe microscopy-based (SPM) lithography techniques have presented significant challenges in fabricating nanostructures. Using this technique with assistance of pulse current, direct deposition or oxidation can be introduced on material surfaces. In present research, we use an atomic force microscope (AFM) to write a solid (gold) feature onto a substrate (silicon) in ambient environment. During the contact-sliding, the material on the gold (Au) tip transferred onto the surface of the single crystalline silicon (Si). This transfer takes place atomically as shown on a smoothly worn Au tip. This process is almost as simple as writing a line with a pencil. Dispersion of thermal energy inducted through friction is discussed in this presentation.
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