Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)最新文献_第8页

Fabrication of microprobe array with sub-100 nm nano-heater for nanometric thermal imaging and data storage 用于纳米热成像和数据存储的亚100nm纳米加热器微探针阵列的制备

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906514

Dongwan Lee, T. Ono, T. Abe, M. Esashi

{"title":"Fabrication of microprobe array with sub-100 nm nano-heater for nanometric thermal imaging and data storage","authors":"Dongwan Lee, T. Ono, T. Abe, M. Esashi","doi":"10.1109/MEMSYS.2001.906514","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906514","url":null,"abstract":"A novel fabrication method of a micro-thermal probe and its array for nanometric thermal imaging and a technological approach for probe-based data storage are presented. A small metal wire for a nano-heater is fabricated at the apex of a pyramidal SiO/sub 2/ tip, which is formed by low temperature oxidation of a silicon etch-pit at 950/spl deg/C, consecutive metal deposition (Pt/Cr or Au/Cr) to fill the metal into the etch-pit, and etching of the SiO/sub 2/ in buffered HF solution. Another metal (Ni) is deposited on the small wire to form a metal-to-metal junction that enables to measure the temperature at the tip end. Metal feed-through are formed on a glass substrate that is bonded with the probe array, which enables to transmit a high-speed signal to a processing-circuit and increase the probe array density. Using the thermal probe, temperature distribution on a sample surface is measured. The heating capability of nano-heater is confirmed by the resistivity change and thermophoton emission from the nano-heater when flowing a small current into the nano-heater. By using a micro-probe, preliminary experiment for data writing and erasing is performed on phase change medium.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125085971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 22

Electrostatically actuated gas microvalve based on a Ta-Si-N membrane 基于Ta-Si-N膜的静电驱动气体微阀

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906597

P. Dubois, B. Guldimann, M. Gretillat, N. D. de Rooij

引用次数: 21

Bulk micromachined angular rate sensor based on the 'butterfly'-gyro structure 基于“蝶形”陀螺结构的体微机械角速度传感器

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906509

N. Hedenstierna, S. Habibi, S. Nilsen, T. Kvisterøy, G. U. Jensen

引用次数: 42

Modeling gas damping and spring phenomena in MEMS with frequency dependent macro-models 基于频率相关宏观模型的MEMS气体阻尼和弹簧现象建模

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906554

Y. Yang, M. Kamon, V. Rabinovich, Chahid K. Ghaddar, M. Deshpande, K. Greiner, J. Gilbert

引用次数: 23

Fabrication of 3-dimensional microstructures using moving mask deep X-ray lithography (M/sup 2/DXL) 移动掩模深x射线光刻(M/sup 2/DXL)制备三维微结构

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906487

O. Tabata, N. Matsuzuka, T. Yamaji, Hui You, J. Minakuchi, K. Yamamoto

引用次数: 20

A micro ER valve fabricated by micromachining 微机械加工制备的微型电磁阀

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906580

K. Yoshida, M. Kikuchi, Jung-Ho Park, S. Yokota

引用次数: 6

Optically-driven actuator using photo-induced phase-transition material 采用光致相变材料的光驱动驱动器

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906527

T. Ikehara, M. Tanaki, S. Shimada, H. Matsuda

{"title":"Optically-driven actuator using photo-induced phase-transition material","authors":"T. Ikehara, M. Tanaki, S. Shimada, H. Matsuda","doi":"10.1109/MEMSYS.2001.906527","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906527","url":null,"abstract":"The authors propose a new optically driven actuator which utilizes photo-induced phase-transition (PIPT) material. This actuator is expected to be useful for micromechanical systems, since it provides a wireless energy supply by light. In these PIPT materials the material phase is changed by irradiation of light, as well as by temperature or external fields. In this report, a kind of polydiacetylene (PDA) substituted with alkyl-urethane is investigated. This material is known to exhibit reversible PIPT around 125/spl deg/C between the 'blue' phase and 'red' phase. The authors measured the induced macroscopic elongation of PDA crystal using a displacement meter. The induced strains due to thermal phase transition were measured to be 2%, 0.03%, and 0.9% at 125/spl deg/C for the a-, b-, and c-axes, respectively. These values are larger than that of the piezoelectric or thermal-expansion materials conventionally used for microactuators. Material deformation due to light-pulse irradiation was demonstrated for the first time. The observed bending was explained by bimorph formation induced by phase transition at the irradiated surface.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"11 4","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131521640","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 8

Solder self-assembled micro axial flow fan driven by a scratch drive actuator rotary motor 焊料自组装微轴流风扇由划痕驱动执行机构旋转电机驱动

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906612

P. Kladitis, R. Linderman, V. Bright

引用次数: 18

High density electrical feedthrough fabricated by deep reactive ion etching of Pyrex glass 高温玻璃深层反应离子刻蚀制备高密度电馈通

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906488

Xiaghua Li, T. Abe, Yongxun Liu, M. Esashi

引用次数: 29

An electrostatic induction micromotor supported on gas-lubricated bearings 由气体润滑轴承支撑的静电感应微型电动机

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906535

Luc G. Fréchette, Steve Nagle, R. Ghodssi, S. Umans, Martin A. Schmidt, Jeffrey H. Lang

引用次数: 82