由气体润滑轴承支撑的静电感应微型电动机

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906535

Luc G. Fréchette, Steve Nagle, R. Ghodssi, S. Umans, Martin A. Schmidt, Jeffrey H. Lang

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引用次数: 82

摘要

本文报道了一种基于气体润滑轴承的静电感应微型电机的首次成功制造和演示，用于电-机械能转换。该器件由五(5)片深度反应离子蚀刻(DRIE)融合硅片堆叠而成，带有一个由高压高频薄膜定子驱动的直径4.2 mm的封闭式转子。测试表明，在每分钟15,000转的转速下，扭矩为0.3 /spl mu/Nm，对应的轴功率为0.5 mW。这项开发工作有助于支持创建各种功率MEMS器件，如微型泵，压缩机，发电机和冷却器。

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An electrostatic induction micromotor supported on gas-lubricated bearings

This paper reports the first successful fabrication and demonstration of an electrostatic induction micromotor supported on gas-lubricated bearings for electrical-to-mechanical energy conversion. The device consists of a stack of five (5) deep reactive ion etched (DRIE) fusion bonded silicon wafers, with an enclosed 4.2 mm diameter rotor driven by a high-voltage, high-frequency thin-film stator. Testing has demonstrated a torque of 0.3 /spl mu/Nm at a rotation rate of 15,000 revolutions per minute, corresponding to a shaft power of 0.5 mW. This development effort serves to support the creation of a wide array of power MEMS devices such as micro-scale pumps, compressors, generators, and coolers.

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Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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