Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)最新文献

Electrostatic impact-drive microactuator 静电冲击驱动微执行器

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-03-16 DOI: 10.1109/MEMSYS.2001.906610

M. Mita, M. Arai, S. Tensaka, D. Kobayashi, P. Basset, A. Kaiser, P. Masquelier, L. Buchaillot, D. Collard, H. Fujita

引用次数: 23

Smart dust mote forerunners 智能尘粒先行者

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906552

B. Warneke, B. Atwood, K. Pister

引用次数: 109

Modeling of capillary forces and binding sites for fluidic self-assembly 流体自组装毛细管力和结合位点的建模

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906555

K. Böhringer, U. Srinivasan, Roger T. Howe

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引用次数: 93

Pulse and DC operation lifetimes of bent-beam electrothermal actuators 弯梁电热执行器的脉冲和直流工作寿命

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906605

L. Que, L. Otradovec, A. Oliver, Y. Gianchandani

引用次数: 27

MEMS microfilter with acoustic cleaning 带有声学清洗的MEMS微滤波器

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906583

P. Caton, R. White

引用次数: 6

An elastic thin-film microlens array with a pneumatic actuator 带气动致动器的弹性薄膜微透镜阵列

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906543

K. Hoshino, I. Shimoyama

引用次数: 12

Selective growth of carbon nanotubes for nano electro mechanical device 纳米机电器件中碳纳米管的选择性生长

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906538

H. Miyashita, T. Ono, P. N. Minh, M. Esashi

引用次数: 5

Chaotic mixing in electrokinetically and pressure driven micro flows 电动和压力驱动微流中的混沌混合

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1007/978-3-642-56763-6_20

Yi-Kuen Lee, J. Deval, Patrick Tabeling, Chih-Ming Ho

引用次数: 158

Aggressive media exposed differential pressure sensor with a deposited membrane 侵蚀介质暴露差压传感器与沉积膜

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906502

Salim Bouaidat, Gert Friis Eriksen, R. D. Reus, P. E. Andersen, Siebe Bouwstra

引用次数: 0

A static turbine flow meter with a micromachined silicon torque sensor 静态涡轮流量计与微机械硅扭矩传感器

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906515

N. Svedin, E. Stemme, Göran Stemme

引用次数: 42